JPS6242238U - - Google Patents
Info
- Publication number
- JPS6242238U JPS6242238U JP13374685U JP13374685U JPS6242238U JP S6242238 U JPS6242238 U JP S6242238U JP 13374685 U JP13374685 U JP 13374685U JP 13374685 U JP13374685 U JP 13374685U JP S6242238 U JPS6242238 U JP S6242238U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- annealing
- heating
- inert gas
- gas flows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000137 annealing Methods 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000011261 inert gas Substances 0.000 claims 2
- 238000005192 partition Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13374685U JPS6242238U (cs) | 1985-08-31 | 1985-08-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13374685U JPS6242238U (cs) | 1985-08-31 | 1985-08-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6242238U true JPS6242238U (cs) | 1987-03-13 |
Family
ID=31034340
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13374685U Pending JPS6242238U (cs) | 1985-08-31 | 1985-08-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6242238U (cs) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0454399U (cs) * | 1990-09-14 | 1992-05-11 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5636130A (en) * | 1979-08-31 | 1981-04-09 | Nec Corp | Manufacturing device of semiconductor |
JPS57143803A (en) * | 1981-03-03 | 1982-09-06 | Sony Corp | Method of forming resisotr |
-
1985
- 1985-08-31 JP JP13374685U patent/JPS6242238U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5636130A (en) * | 1979-08-31 | 1981-04-09 | Nec Corp | Manufacturing device of semiconductor |
JPS57143803A (en) * | 1981-03-03 | 1982-09-06 | Sony Corp | Method of forming resisotr |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0454399U (cs) * | 1990-09-14 | 1992-05-11 |