JPS6293686U - - Google Patents

Info

Publication number
JPS6293686U
JPS6293686U JP18401786U JP18401786U JPS6293686U JP S6293686 U JPS6293686 U JP S6293686U JP 18401786 U JP18401786 U JP 18401786U JP 18401786 U JP18401786 U JP 18401786U JP S6293686 U JPS6293686 U JP S6293686U
Authority
JP
Japan
Prior art keywords
furnace
preheating tower
furnace body
pressure detector
exhaust gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18401786U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6236058Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18401786U priority Critical patent/JPS6236058Y2/ja
Publication of JPS6293686U publication Critical patent/JPS6293686U/ja
Application granted granted Critical
Publication of JPS6236058Y2 publication Critical patent/JPS6236058Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Vertical, Hearth, Or Arc Furnaces (AREA)
  • Furnace Details (AREA)
JP18401786U 1986-11-29 1986-11-29 Expired JPS6236058Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18401786U JPS6236058Y2 (enExample) 1986-11-29 1986-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18401786U JPS6236058Y2 (enExample) 1986-11-29 1986-11-29

Publications (2)

Publication Number Publication Date
JPS6293686U true JPS6293686U (enExample) 1987-06-15
JPS6236058Y2 JPS6236058Y2 (enExample) 1987-09-12

Family

ID=31131292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18401786U Expired JPS6236058Y2 (enExample) 1986-11-29 1986-11-29

Country Status (1)

Country Link
JP (1) JPS6236058Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024020968A (ja) 2022-08-02 2024-02-15 ギガフォトン株式会社 極端紫外光生成装置、及び電子デバイスの製造方法

Also Published As

Publication number Publication date
JPS6236058Y2 (enExample) 1987-09-12

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