JPS6293175U - - Google Patents
Info
- Publication number
- JPS6293175U JPS6293175U JP18588885U JP18588885U JPS6293175U JP S6293175 U JPS6293175 U JP S6293175U JP 18588885 U JP18588885 U JP 18588885U JP 18588885 U JP18588885 U JP 18588885U JP S6293175 U JPS6293175 U JP S6293175U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- prefilters
- utility
- parallel
- sides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000011045 prefiltration Methods 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18588885U JPS6293175U (da) | 1985-12-02 | 1985-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18588885U JPS6293175U (da) | 1985-12-02 | 1985-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6293175U true JPS6293175U (da) | 1987-06-13 |
Family
ID=31134936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18588885U Pending JPS6293175U (da) | 1985-12-02 | 1985-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6293175U (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11107923A (ja) * | 1997-10-02 | 1999-04-20 | Chuo Giken:Kk | 空気圧縮機 |
-
1985
- 1985-12-02 JP JP18588885U patent/JPS6293175U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11107923A (ja) * | 1997-10-02 | 1999-04-20 | Chuo Giken:Kk | 空気圧縮機 |