JPS6291338U - - Google Patents

Info

Publication number
JPS6291338U
JPS6291338U JP18389685U JP18389685U JPS6291338U JP S6291338 U JPS6291338 U JP S6291338U JP 18389685 U JP18389685 U JP 18389685U JP 18389685 U JP18389685 U JP 18389685U JP S6291338 U JPS6291338 U JP S6291338U
Authority
JP
Japan
Prior art keywords
filament
section
ion source
low
arc discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18389685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18389685U priority Critical patent/JPS6291338U/ja
Publication of JPS6291338U publication Critical patent/JPS6291338U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP18389685U 1985-11-27 1985-11-27 Pending JPS6291338U (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18389685U JPS6291338U (US08063081-20111122-C00044.png) 1985-11-27 1985-11-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18389685U JPS6291338U (US08063081-20111122-C00044.png) 1985-11-27 1985-11-27

Publications (1)

Publication Number Publication Date
JPS6291338U true JPS6291338U (US08063081-20111122-C00044.png) 1987-06-11

Family

ID=31131051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18389685U Pending JPS6291338U (US08063081-20111122-C00044.png) 1985-11-27 1985-11-27

Country Status (1)

Country Link
JP (1) JPS6291338U (US08063081-20111122-C00044.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005183382A (ja) * 2003-12-19 2005-07-07 Samsung Electronics Co Ltd イオンソース及びこれを有するイオン注入装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005183382A (ja) * 2003-12-19 2005-07-07 Samsung Electronics Co Ltd イオンソース及びこれを有するイオン注入装置
JP4589096B2 (ja) * 2003-12-19 2010-12-01 三星電子株式会社 イオンソース及びこれを有するイオン注入装置

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