JPS6290737U - - Google Patents

Info

Publication number
JPS6290737U
JPS6290737U JP1985183563U JP18356385U JPS6290737U JP S6290737 U JPS6290737 U JP S6290737U JP 1985183563 U JP1985183563 U JP 1985183563U JP 18356385 U JP18356385 U JP 18356385U JP S6290737 U JPS6290737 U JP S6290737U
Authority
JP
Japan
Prior art keywords
container
vacuum
isolation
vessel
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985183563U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0711788Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985183563U priority Critical patent/JPH0711788Y2/ja
Publication of JPS6290737U publication Critical patent/JPS6290737U/ja
Application granted granted Critical
Publication of JPH0711788Y2 publication Critical patent/JPH0711788Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP1985183563U 1985-11-28 1985-11-28 真空容器内照明器 Expired - Lifetime JPH0711788Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985183563U JPH0711788Y2 (ja) 1985-11-28 1985-11-28 真空容器内照明器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985183563U JPH0711788Y2 (ja) 1985-11-28 1985-11-28 真空容器内照明器

Publications (2)

Publication Number Publication Date
JPS6290737U true JPS6290737U (Direct) 1987-06-10
JPH0711788Y2 JPH0711788Y2 (ja) 1995-03-22

Family

ID=31130418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985183563U Expired - Lifetime JPH0711788Y2 (ja) 1985-11-28 1985-11-28 真空容器内照明器

Country Status (1)

Country Link
JP (1) JPH0711788Y2 (Direct)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5848333U (ja) * 1981-09-24 1983-04-01 株式会社日立製作所 真空容器
JPS5939927U (ja) * 1982-09-07 1984-03-14 株式会社日立国際電気 薄膜生成装置の基板加熱装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5848333U (ja) * 1981-09-24 1983-04-01 株式会社日立製作所 真空容器
JPS5939927U (ja) * 1982-09-07 1984-03-14 株式会社日立国際電気 薄膜生成装置の基板加熱装置

Also Published As

Publication number Publication date
JPH0711788Y2 (ja) 1995-03-22

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