JPS6290504A - Measuring apparatus - Google Patents

Abstract

PURPOSE:To effect quick and highly accurate measurement, by visualizing whole and partly enlarged specimen images on a display screen after respectively detecting them by image sensors and detecting a position of the partial image. CONSTITUTION:An image of a specimen 21 is reflected by a half-mirror, introducing it into an image sensor 1 for displaying a whole image on a display 4, a transmitted beam of light from a mirror 23 is introduced into an image sensor 5 for partial visualization of the image on a display 9. A point A of the specimen 21 is displayed for introduction into a view field of the screen 9a and its window 5a is visualized on a screen 4a of the display 4 by moving the sensor 5. Positions of measuring points A, B on the specimen 21 are detected as co-ordinate values on a X-Y table 7. Thus, a part of the specimen is photographed with magnification by the sensor, a length between the points A, B is detected by an output of two sensors for improbements of measuring accuracy and resolving capacity.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a measuring device that measures the size of an object to be measured based on image information corresponding to the object to be measured.

[Prior Art] FIG. 1O is a principle diagram of a conventional measuring device using a two-dimensional image sensor. In FIG. 10, 31 is an object to be measured, 32 is a lens, and 33 is a two-dimensional image sensor in which a plurality of photoelectric conversion elements are arranged vertically and horizontally.

This measuring device forms an image of an object to be measured 31 on a two-dimensional image sensor 33 via a lens 32, and based on image information corresponding to the object to be measured 31 output from the two-dimensional image sensor 33, the image of the object to be measured 31 is It is designed to measure things such as the size of.

The resolution of the two-dimensional image sensor 33 is expressed by the number of pixels in the measurement field of view 7 of the two-dimensional image sensor 33. The measurement field of view is determined by the length of the optical path of the measurement device. Further, since a typical two-dimensional image sensor has about 400 photoelectric conversion elements in both the vertical and horizontal directions, the number of pixels (the number of charging conversion elements) is 150,000 pixels.

In order to improve the resolution, a two-dimensional image sensor 33
Instead, it is conceivable to use a one-dimensional image sensor 34 as shown in FIG. Some one-dimensional image sensors 34 have about 2000 pixels.

The measuring device using the one-dimensional image sensor 34 repeats reading scanning in the horizontal direction 2000x 2000-4
Get 1 million pixels.

[Problems to be solved by the invention] By the way, since the two-dimensional image sensor 33 has approximately 160,000 pixels, sufficient resolution may not be obtained depending on the measurement field of view.
Measurement accuracy may decrease.

Furthermore, since the one-dimensional image sensor 34 has approximately one million pixels, its resolution is sufficient. However, since the one-dimensional image sensor 34 is moved intermittently, there is a problem in that it takes time to obtain image information corresponding to the object to be measured. Furthermore, in order to measure the object to be measured based on the image information obtained by the one-dimensional image sensor 34, it is necessary to store the image information in memory, but the memory that can store the image information of 4 million pixels requires approximately 400 pixels. The problem was that the storage capacity was enormous, ie, megabytes.

Furthermore, there is a problem in that it is not possible to handle image information of approximately 4 million pixels with ordinary telephoto equipment (display, image processing circuit, etc.).

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a measuring device that can measure an object to be measured in a short time and with high measurement accuracy.

[Means for Solving the Problems] Therefore, in the present invention, at least the entire measured object enters the measurement field of view, and a first image sensor that outputs first image information corresponding to the measured object; a first image memory that stores image information; and a first image memory that displays the object to be measured based on the first image information stored in the first image memory.
a second image sensor that enlarges a portion of the measurement field of view of the first image sensor and outputs second image information corresponding to a portion of the wavemeter γ11 object; a second image memory that stores information, a second display that displays a portion of the object to be measured based on the second image information stored in the second image memory, and a first image sensor that measures the a window control means for specifying the position of the measurement field of view of the second image sensor in the visual field; a drive means for detecting the position of the second image sensor in the measurement field of view of the first image sensor, and a position detection means for outputting position information corresponding to the detected position; a measuring means for measuring the size of the object to be measured based on the
A measuring device is constituted by a third display that displays measurement results.

[Operation] In the measuring device configured as described above, the first display displays the object to be measured based on the first image information corresponding to the object to be measured outputted by the first image sensor. Next, the second image sensor is moved by the drive means to a position specified by the window control means, and the second image sensor enlarges and images a part of the object to be measured, thereby producing a second image corresponding to the part of the object to be measured. The second display displays a portion of the object to be measured based on the second image information. Further, the measuring means calculates the size of the object to be measured based on the second image information and the position information of the second image sensor detected by the position detecting means.

[Embodiment] An embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

FIG. 1 is a block diagram of a measuring device according to the present invention. In FIG. 1, 1 is at least a medical object (not shown).
The entire object enters the measurement field of view, and the first
2 is a first image sensor that outputs image information of
a drive circuit that causes the image sensor 1 to perform reading scanning;
3 is a first image memory that stores first image information; 4 is a first display that displays the object to be measured based on the first image information stored in the first image memory 3; 5 is a first display that displays the object to be measured based on the first image information stored in the first image memory 3; A part of the measurement field of view of the first image sensor 1 enters the measurement field of view, and a second image sensor that takes an enlarged image of a part of the object to be measured and outputs second image information corresponding to the part of the object to be measured.
6 is a drive circuit that causes the second image sensor 5 to perform reading scanning, 7 is an XY table to which the second image sensor 5 is attached, and 8 is a second image sensor that stores second image information. An image memory 9 is a second display that displays a portion of the object to be measured based on the second image information stored in the second image memory 8.

As shown in FIG. 2, the measuring device according to the present invention has a first sensor having a short focal length from an object to be measured 21 to a lens 22, a half mirror 23, a lens 24, and a first image sensor l.
and a second optical path with a long focal length and distance from the object to be measured 21 to the lens 22, the half mirror 23, and the second image sensor 5 attached to the XY table 7. Therefore, the first image sensor 1 includes the entire object to be measured 21 in its measurement field of view, and the second image sensor 5 includes the object to be measured 21 in the measurement field of view, which is a part of the measurement field of the first image sensor 1. will be included.

Next, lO is a window control means that specifies the position of the measurement field of view (hereinafter referred to as window) of the second image sensor 5 within the measurement field of view of the first image sensor 1 and outputs position information of the specified window. , 11 is a driving means that operates based on window position information and moves the second image sensor 5 attached to the XY table 7 two-dimensionally. The window control means 10 is constituted by, for example, a joystick, and the first display 4 has a display screen 4a as shown in FIG.
window 5a is displayed.

Next, 12 detects the position of the second image sensor 5 from the driving of the second image sensor 5 by the driving means 11 that drives the second image sensor 5, and detects a position indicating the position of the second image sensor 5. Position detection means for outputting information, 1
3 is a measuring means for measuring the size of the object to be measured 21 based on the second image information stored in the second image memory 8 and the position information outputted by the position detecting means 12;
4 is a third display that displays the measurement results.

Next, a fourth section regarding the overall operation of the measuring device according to the present invention will be described.
This will be explained with reference to the figures. In FIG. 4, FIG. 4(a) shows the display screen of the first display 4, and FIG. 4(b) shows the display screen of the second display 9. In this embodiment, it is assumed that the length of the object to be measured 21 from point A to point B is measured.

First, when the first image sensor 1 obtains first image information corresponding to the object to be measured 21, the first display 4 displays the object to be measured 21 (see FIG. 4(a)). The window 5a is then controlled by the window control means lO.
In response to the movement of the second image sensor 5, the driving means 11 moves the second image sensor 5 to bring the point A of the object to be measured 21 into the field of view of the second image sensor 5. At this time,
The second display 9 displays the object to be measured 21 on the display screen 9a.
Display a part of (including point A). Next, the measuring means 13 detects the position of point A of the object to be measured 21 on the display screen 9a of the second display 9 (measuring field of view of the second image sensor 5) based on the second image information, and further The measurement field of view of the first image sensor 1 is determined based on the position of the second image sensor 5 on the display screen 4a of the first display 4 (the measurement field of view of the first image sensor 1) detected by the position detection means 12. The position of point A of the object to be measured 21 at is detected.

Note that the position of point A of the object to be measured 21 is detected as coordinate values of XY orthogonal coordinates with the upper left corner of the display screen 4a of the first display 4 as the origin. Furthermore, the position of point B on the object to be measured 21 is detected in the same manner.

Next, the measuring means 13 measures the length of the object to be measured 21 from point A to point B.

Next, FIG. 5 is a block diagram showing another embodiment of the measuring device according to the present invention. Note that in FIG. 5, parts that perform the same functions as those in FIG.

In the above embodiment, the position detecting means 12 detects the position of the second image sensor 5 from the driving of the second image sensor 5 by the driving means 11. The detection accuracy of the position detection means 12 must exceed the resolution of the image sensor used. When using a solid-state two-dimensional image sensor that is currently commercially available, the position detection means 12 needs to have a position detection function of at least several micrometers. This level of detection accuracy is fully achievable. However, the tonality of the XY table 7 poses a problem when quantifying. Therefore, in this embodiment, the position detection pattern 15 is arranged on the entire front surface of the second image sensor 5, and the second image sensor 5 itself obtains the position information.

The position detection pattern 15 is as shown in the schematic diagram of FIG.
It has a size that covers the range in which the second image sensor 5 can move, and has straight lines drawn in a grid pattern on a transparent glass plate, and each intersection of each straight line is numbered.

FIG. 7 shows a schematic diagram of the optical system of the measuring device according to this embodiment. From the object to be measured 21 to the lens 22, the half mirror 23, the lens 24, and the first image sensor 1
The first optical path leading to is the same as in the above embodiment, and the entire object to be measured 21 of the first image sensor 1 enters the measurement field of view. In the second optical path from the object to be measured 21 to the lens 22, the half mirror 23, and the second image sensor 5, the position detection pattern 15 is placed between the half mirror 23 and the second image sensor 5. Therefore, the second image sensor 5 is the object to be measured 2! A portion of the position detection pattern 15 will enter the measurement field of view, and the second display 14 will display the position detection pattern 15 on the display screen as shown in FIG.

The position detection means 12 stores the coordinate values of each intersection of the position detection pattern 15 in advance, and detects the position of the second image sensor 5 based on the image information of the second image sensor 5.

Note that the position detection pattern 15 does not need to be placed in front of the second image sensor 5. This is because the position detection pattern 15 may not be necessary.

Therefore, as shown in FIG. 2 image sensor 5
In addition to the second optical path leading to the lens 22, a third optical path leading from the position detection pattern 15 disposed near the lens 22 to the lens 25, the half mirror 23, and the second image sensor 5 may be set. . In the second image sensor 5, a portion of the object to be measured 21 and a portion of the position detection pattern 15 enter the measurement field of view, as in the above embodiment.

[Effects of the Invention] As described above, according to the present invention, a part of the object to be measured imaged by the first image sensor is enlarged and imaged by the second image sensor, and the first image outputted by the first image sensor is Since the object to be measured is measured based on the image information of the second image sensor and the second image information output from the second image sensor, the resolution is substantially improved and the measurement accuracy is increased.

Furthermore, since the driving means moves the second image sensor to the position designated by the window control means, any position of the object being imaged by the first image sensor can be measured in a short time. can.

[Brief explanation of drawings]

FIG. 1 is a block diagram of a measuring device according to the present invention, FIG. 2 is a schematic diagram of the optical system of the measuring device shown in FIG. 1, and FIG. 3 is a display screen of the first display shown in FIG. An explanatory diagram of
An explanatory diagram showing a measurement method using the measurement device shown in FIG.
FIG. 5 is a block diagram showing another embodiment of the measuring device according to the present invention, FIG. 6 is a schematic diagram of the position detection pattern shown in FIG. 5, and FIG. 7 is a block diagram of the measuring device shown in FIG. A schematic diagram of the optical system, FIG. 8 is an explanatory diagram of the display screen of the second display shown in FIG. 5, and FIG. 9 is an explanatory diagram when the arrangement position of the position detection pattern shown in FIG. FIG. 1θ is a principle diagram of a conventional measuring device, and FIG. 11 is an explanatory diagram when image information is obtained by a one-dimensional image sensor. 1.5... Image sensor, 2.6... Drive circuit,
3.8... Image memory, 4, 9.14... Display, F... XY table, 10... Window control means, 11... Drive means, 12... Position detection means, 13 -...Measuring means, 15...Position detection pattern.

Claims (5)

[Claims] (1) A first image sensor that includes at least the entire measured object within the measurement field of view and outputs a first image corresponding to the measured object; and a first image memory that stores the first image information. , a first image display device that displays the object to be measured based on the first image information stored in the first image memory.
a display, a part of the measurement field of view of the first image sensor enters the measurement field of view, a second image sensor that takes an enlarged image of a part of the object to be measured and outputs second image information corresponding to the part of the object to be measured. a second image sensor;
a second image memory that stores image information; a second display that displays a portion of the object to be measured based on the second image information stored in the second image memory; window control means for specifying the position of the measurement field of view of the second image sensor in the measurement field of view of the first image sensor; and the measurement field of view of the second image sensor is located at the position specified by the window control means. a driving means for moving the second image sensor, a position detecting means for detecting the position of the second image sensor and outputting position information indicating the detected position; A measuring device comprising: a measuring device that measures the size of the object to be measured based on the positional information; and a display that displays the measurement results of the measuring device. (2) The measuring device according to claim 1, wherein the first display displays the measurement field of view of the second image sensor superimposed on the object to be measured. (3) The measuring device according to claim 1, wherein the position detecting means detects the position of the second image sensor based on driving of the second image sensor by the driving means. (4) The position detection means has a position detection pattern placed in front of the second image sensor, and the position detection means detects the position detection pattern based on the image information corresponding to the position detection pattern imaged by the second image sensor. 2. The measuring device according to claim 1, which detects the position of the second image sensor. (5) The position detection means includes a position detection pattern and the second
The patent has an optical path for projecting the position detection pattern onto an image sensor, and detects the position of the second image sensor based on image information corresponding to the position detection pattern captured by the second image sensor. A measuring device according to claim 1.