JPS628942B2 - - Google Patents

Info

Publication number
JPS628942B2
JPS628942B2 JP54113231A JP11323179A JPS628942B2 JP S628942 B2 JPS628942 B2 JP S628942B2 JP 54113231 A JP54113231 A JP 54113231A JP 11323179 A JP11323179 A JP 11323179A JP S628942 B2 JPS628942 B2 JP S628942B2
Authority
JP
Japan
Prior art keywords
layer
wiring
film
oxide film
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54113231A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5637646A (en
Inventor
Rokuro Yoshizawa
Satoshi Shinozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP11323179A priority Critical patent/JPS5637646A/ja
Priority to US06/183,813 priority patent/US4371423A/en
Publication of JPS5637646A publication Critical patent/JPS5637646A/ja
Publication of JPS628942B2 publication Critical patent/JPS628942B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP11323179A 1979-09-04 1979-09-04 Manufacturing of semiconductor device Granted JPS5637646A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP11323179A JPS5637646A (en) 1979-09-04 1979-09-04 Manufacturing of semiconductor device
US06/183,813 US4371423A (en) 1979-09-04 1980-09-03 Method of manufacturing semiconductor device utilizing a lift-off technique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11323179A JPS5637646A (en) 1979-09-04 1979-09-04 Manufacturing of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5637646A JPS5637646A (en) 1981-04-11
JPS628942B2 true JPS628942B2 (enFirst) 1987-02-25

Family

ID=14606879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11323179A Granted JPS5637646A (en) 1979-09-04 1979-09-04 Manufacturing of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5637646A (enFirst)

Also Published As

Publication number Publication date
JPS5637646A (en) 1981-04-11

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