JPS6289372A - Piezoelectric porcelain - Google Patents
Piezoelectric porcelainInfo
- Publication number
- JPS6289372A JPS6289372A JP60230180A JP23018085A JPS6289372A JP S6289372 A JPS6289372 A JP S6289372A JP 60230180 A JP60230180 A JP 60230180A JP 23018085 A JP23018085 A JP 23018085A JP S6289372 A JPS6289372 A JP S6289372A
- Authority
- JP
- Japan
- Prior art keywords
- value
- piezoelectric
- temperature
- composition
- porcelain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052573 porcelain Inorganic materials 0.000 title claims abstract description 23
- 239000000203 mixture Substances 0.000 claims abstract description 25
- 238000005245 sintering Methods 0.000 abstract description 6
- 239000000843 powder Substances 0.000 abstract description 4
- 239000002131 composite material Substances 0.000 abstract description 3
- 230000008878 coupling Effects 0.000 abstract description 2
- 238000010168 coupling process Methods 0.000 abstract description 2
- 238000005859 coupling reaction Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 abstract 2
- 230000007423 decrease Effects 0.000 description 11
- 230000000694 effects Effects 0.000 description 7
- 230000005684 electric field Effects 0.000 description 5
- 239000002994 raw material Substances 0.000 description 4
- 230000010287 polarization Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 229910003781 PbTiO3 Inorganic materials 0.000 description 1
- 229910003069 TeO2 Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- LAJZODKXOMJMPK-UHFFFAOYSA-N tellurium dioxide Chemical compound O=[Te]=O LAJZODKXOMJMPK-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Inorganic Insulating Materials (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、酸化物圧電性磁器に係る。さらに詳〔発明の
軟硬〕
本発明は、複合酸化物圧電性磁器において、新とにより
、焼結性に優れ、電気機械結合係数(xpl圧電係数(
d、st ) に優れ、キューり温度(Tc)の昼い
圧電性磁器を得ることに成功したものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to oxide piezoelectric porcelain. More Details [Soft/hardness of the invention] The present invention provides composite oxide piezoelectric porcelain that has excellent sinterability and electromechanical coupling coefficient (xpl piezoelectric coefficient (
d, st), and succeeded in obtaining daytime piezoelectric porcelain with a low cue temperature (Tc).
従来の複合酸化物圧電性磁器でソフト材料と呼ばれてい
るもものは、特公昭60−22516゜特公昭56−1
3032.特公昭55−91891に示されるように、
Pb(Ni土Nb具 )o3−pb(Nnl Nb2
)03−Pb TiO3PbZrO3系において、
pb原子の一部iBi、Sr等で置換し、副成分として
、’Li100g 、 Or!O3#kO@ 、 81
03 、 TeO2等を添加したものが主流であった。The conventional composite oxide piezoelectric porcelain, which is called a soft material, is manufactured by Japanese Patent Publication No. 60-22516゜Special Publication No. 56-1
3032. As shown in Special Publication No. 55-91891,
Pb (Ni soil Nb tool) o3-pb (Nnl Nb2
)03-Pb TiO3PbZrO3 system,
Some of the pb atoms are replaced with iBi, Sr, etc., and 'Li100g, Or! O3#kO@, 81
03, those to which TeO2, etc. were added were the mainstream.
オた、一部では、P b (M gl N b 11
) O3P b T i 01 P b Z r
03 とかPb(Mnt Sb2 )03−PbT
iOl−PbZrOlとかの三成分系組成物を主成分と
し、副成分と1.て、Bi、 Oa、 Ba、 Sb等
を加乏たものも使用されてい〔発明が解決17ようとす
る問題点及び目的〕しかし、前述の従来技術では、’K
T)、dsxk大きくするために、周知のPbTi0l
−PI)ZrO3系に、ため、Tcが低下するという問
題点を持ってい友。In some cases, P b (M gl N b 11
) O3P b T i 01 P b Z r
03 or Pb(Mnt Sb2)03-PbT
A three-component composition such as iOl-PbZrOl is the main component, and subcomponents and 1. However, in the above-mentioned prior art, 'K
T), to increase dsxk, the well-known PbTi0l
-PI) ZrO3 system has the problem of lowering Tc.
Tcの低下は、圧電性磁器の通常の使用温度範囲(−2
0℃〜80℃)における、比誘電率の温度安定性の低下
及び、抗電1(EC)の低下をもたらす。さらにECの
低下は、原料焼結体分極を容易にするというメリン)k
持つ反面、圧電性磁器をアクチュエータとして使用する
場合のように、圧電性磁器素子の駆動電圧が比較的高い
場合には、前配素子の厚みが005〜11.2龍と薄い
ことからみて、分極が消滅してしまうという致命的な問
題PbTiO3系のような圧電性磁器では、焼結温度が
高くなるために、pbの蒸発が焼結中に起こり、焼結後
の組成コントロールが難しいという問題点を有していた
。The decrease in Tc is within the normal operating temperature range of piezoelectric porcelain (-2
This results in a decrease in the temperature stability of the dielectric constant and a decrease in coercivity 1 (EC) at temperatures ranging from 0°C to 80°C. Furthermore, a decrease in EC facilitates polarization of the raw material sintered body)
On the other hand, when the drive voltage of the piezoelectric porcelain element is relatively high, such as when piezoelectric porcelain is used as an actuator, the polarization is small, considering that the thickness of the front element is as thin as 0.05 to 11.2 mm. In piezoelectric porcelains such as PbTiO3, evaporation of Pb occurs during sintering due to the high sintering temperature, making it difficult to control the composition after sintering. It had
そこで本発明はこのような問題点を解決するもので、そ
の目的とするところは、圧電、係数が大きいばかりでな
く、温度に対しすぐれた安定性を有し、抗電場Koが2
kty−以上あり、しかも工業的に容易に製造しうる
新規な圧電性磁器全提供するところにある。The present invention is intended to solve these problems, and aims to provide piezoelectricity that not only has a large coefficient, but also has excellent stability against temperature, and has a coercive electric field Ko of 2.
It is an object of the present invention to provide a novel piezoelectric porcelain having a piezoelectric porcelain having a value of at least 100 kty and which can be easily manufactured industrially.
本発明の圧電性磁器は、組成式をPb1−a−aKla
、 Bi、1a+b(Nil−8ZnoNl)2 )
TiyZr、032 2
3 !IXただしX+7+2+
!1と表わしたとき、組成を限定する”* 7+ Z*
a+ bsおよびCが、下記不等式全満足することf
%徴とする。The piezoelectric porcelain of the present invention has a composition formula of Pb1-a-aKla
, Bi, 1a+b(Nil-8ZnoNl)2)
TiyZr, 032 2
3! IX However, X+7+2+
! When expressed as 1, the composition is limited”*7+Z*
a+ bs and C fully satisfy the following inequality f
It is expressed as a percentage.
0、05 <、 x (、0,60 0、10りy≦070 0、10 <Z≦【155 0、05 <、 a <: 0.40 oくb≦005 1口1≦0くα50 〔実施例〕 以下具体的実施例について説明する。0, 05 <, x (, 0, 60 0,10riy≦070 0, 10 <Z≦[155 0, 05 <, a <: 0.40 okub≦005 1 mouth 1≦0 α50 〔Example〕 Specific examples will be described below.
実施例1
B KI Bit
組成式’ Pb1−a −−b −a Hail
)(Ni1−oZnoNす) TI Zr O3、た
だし、3 3X yZ−
5=
x+y+z=1 と表わしたとき、x* 7 * Z
をそれぞれ0.2.0.44.0.36とし、a、
、 b e ckそれぞれ
0、 [] 1 りa <、 0.40 、 0 <b
< 0.05 。Example 1 B KI Bit Composition formula' Pb1-a --b -a Hail
) (Ni1-oZnoNsu) TI Zr O3, however, 3 3X yZ-
When expressed as 5=x+y+z=1, x* 7 * Z
are respectively 0.2.0.44.0.36, and a,
, b e ck 0, [] 1 ri a <, 0.40, 0 < b
<0.05.
0、01 <、 c < 0.30 の範囲で変化さ
せて、原料の配合をする。使用原料は工業用酸化物粉末
原料を使用した。The raw materials are blended by varying the values within the range of 0.01 < and c < 0.30. The raw material used was an industrial oxide powder raw material.
各粉末を所定号だけ秤量12、ボールミル1−2湿式湿
合りまたのち800〜900cで2時間仮焼金行い、再
度ボールミルで粉砕し、その粉砕粉を角板状に加圧成形
し、1050〜1200℃で数時間焼成した。得られた
磁器全厚さ02貫罵に研摩したのち、両面にN1電極を
付け、100℃のシリコンオイル中で3〜5KV/−の
印加電圧で30分間分極処理を行い、径方向電気機械結
合係数Kpおよび圧電定数d31.抗電場Fic、キュ
ーリ一温度Tcを測定した。Each powder was weighed by a predetermined number at 12, wetted in a ball mill 1-2, and then calcined for 2 hours at 800-900c, ground again in a ball mill, and the pulverized powder was pressure-molded into a rectangular plate shape. Calcined at ~1200°C for several hours. After polishing the resulting porcelain to a total thickness of 02 mm, N1 electrodes were attached to both sides, and polarization was performed in silicone oil at 100°C for 30 minutes at an applied voltage of 3 to 5 KV/- to create a radial electromechanical connection. Coefficient Kp and piezoelectric constant d31. Coercive electric field Fic and Curie temperature Tc were measured.
その結果の代表的な例を第1表に示す。Representative examples of the results are shown in Table 1.
第1表から明らかなように、本発明の組成物はP b
Z r Q3系圧電性磁器に比べ、圧電的特性であるK
p、dHが50慢以に捷さっているばかりでなく、Tc
、 Ec も向上している。As is clear from Table 1, the composition of the present invention has P b
Z r Compared to Q3 type piezoelectric porcelain, K which has piezoelectric characteristics
Not only are p and dH lower than 50, but Tc
, Ec has also improved.
また、本発明の組成式におけるaの値が005〜n、4
の範囲にある組成物のs KT’、asl s Eel
Tcとも良好な値を示しているが、aの値が05になる
と、逆に特性の低下をもたらしている。Further, the value of a in the composition formula of the present invention is 005 to n, 4
s KT', asl s Eel for compositions in the range of
Although both Tc shows good values, when the value of a becomes 05, the characteristics deteriorate on the contrary.
また、本発明の組成式におけるbの値が0〜005の範
囲にある組成物のFEllf的特性は良好な値を示して
いるが、bの値が007になると、Ecの低下をもたら
している。bの値は、主に焼成atの低下ケもたらして
いる。In addition, the FEllf properties of the compositions in which the value of b in the compositional formula of the present invention is in the range of 0 to 005 show good values, but when the value of b becomes 007, the Ec decreases. . The value of b mainly causes a decrease in firing at.
また、本発明の組成式におけるCの値が001〜03の
範囲にある組成物の圧電的特性は良好な値を示している
が、0の値が04になると、 Kcの低下全もたらして
いる。In addition, the piezoelectric properties of compositions in which the value of C in the composition formula of the present invention is in the range of 001 to 03 show good values, but when the value of 0 becomes 04, the Kc decreases completely. .
実施例2
実施例IVc示す組成式において、x+:l’ez+a
、b、cを任意に選び、実施例1と同様の試験を行って
、Kp*d3++ 必要に応じて、E c 。Example 2 In the compositional formula shown in Example IVc, x+:l'ez+a
, b, and c are arbitrarily selected, and the same test as in Example 1 is conducted to obtain Kp*d3++ and, if necessary, E c .
ご33/6o、ε、3/6.1oの温度係数を測定し7
だ。Measure the temperature coefficients of 33/6o, ε, and 3/6.1o.7
is.
その結果を第2表に示す。The results are shown in Table 2.
第2表から明らか々ように、本発明の組成物はPb(N
i I Zn Nb2 )03−PbZr03
系及び3” 3
Pb(Nil Zn Nb2 )03−PbTi0
3系出電性磁器に口 03
比べ圧室的特性であるKp、dHが30係以上まさって
いるばかりでなく、比誘電率の温度係数も50q6以辷
低い値全示している。As is clear from Table 2, the composition of the present invention has Pb(N
i I Zn Nb2 )03-PbZr03
system and 3”3Pb(NilZnNb2)03-PbTi0
Not only are Kp and dH, which are pressure chamber characteristics, more than 30 factors higher than 3-series electrical porcelain, but the temperature coefficient of relative permittivity is also lower than 50q6.
また、本発明の組成式におけるXの値が005〜0.6
0の範囲にある組成物のK p + dB 1 + K
O+ T Q h比誘電率の温度係数とも良好り値を
示しているが、Xの値が003あるいは07になると、
逆に特性の低下をもたらしている。Further, the value of X in the composition formula of the present invention is from 005 to 0.6.
K p + dB 1 + K of the composition in the range 0
O+ T Q h The temperature coefficient of relative permittivity both shows good values, but when the value of X becomes 003 or 07,
On the contrary, it causes a decline in characteristics.
オた、本発明の組成式におけるyの値が0.10〜07
0の範囲にある組成物のKp、 dB1 、 、KO,
Tc比比定電率温度係数とも良好な値を示1〜でいるが
、yの値が075あるいは0.08になると、逆に特性
の低下をもたらしている。Additionally, the value of y in the composition formula of the present invention is 0.10 to 07
Kp of the composition in the range 0, dB1, , KO,
Although both the Tc ratio, constant electric power, and temperature coefficient have good values of 1 to 1, when the value of y becomes 075 or 0.08, the characteristics deteriorate.
また、本発明の組成式における2の値が0.10〜0,
55の範囲にある組成物のKp、 dB1 、 EO,
Tc比誘電率の温度係数とも良好が値を示しているか2
の値が、0.05ちるいは060になると、逆に特性の
低下をもたらしている。Further, the value of 2 in the composition formula of the present invention is 0.10 to 0,
Kp, dB1, EO, for compositions in the range of 55
Does the temperature coefficient of Tc relative permittivity both show good values?2
When the value becomes 0.05 or 060, on the contrary, the characteristics deteriorate.
本発明の組成式Pb a KxBil (N
itl−a−−b −−a十b 3−0Zn、
N bt )TiyZrOlにおける、組成を限定する
x” y+ z * a e b及び0の論理的が根拠
は、解明されていないが、実験結果から下n已のように
推定されている。The compositional formula of the present invention is Pb a KxBil (N
itl-a--b --a ten b 3-0Zn,
The logical basis of x''y+z*a e b and 0 that limit the composition in N bt )TiyZrOl has not been elucidated, but is estimated as follows from experimental results.
1)xの値は比誘電率に影響をリオ、Xの値がalより
小さいと、本発明の圧電性磁器の酵電車か低下し1′ぎ
るため、Kp+’31 とも低くくなりすぎ、現用的で
ない。また、Xの値が06より大きいと、焼結性が低下
するため、Kp+dlllに悪影響がでるばかりか、T
c、 Ecの低下をまねき、現用的でない。1) The value of x has an effect on the relative dielectric constant. If the value of Not on point. Furthermore, if the value of
It causes a decrease in c and Ec and is not practical.
従って、Xの値は 0.10くX≦060に限定する必
要がある。Therefore, the value of X must be limited to 0.10 and X≦060.
2)y及び2のイ11も比誘電率に影響を力えるが、そ
の影響はXの値t1ど大きくない。y及び2の値の特性
に与える影響は相互にからみあっているため明確には説
明できなかった。しかし、実験結果からは、yの値が0
.10くyくtl、70.zの値が0.10 <Z <
、 CL 55の範囲とけずれると焼結性の低下がみら
れ、特性も同時に劣化した。2) y and A11 of 2 also have an influence on the relative dielectric constant, but the influence is not as large as the value t1 of X. The effects of the values of y and 2 on the characteristics cannot be clearly explained because they are intertwined with each other. However, from the experimental results, the value of y is 0
.. 10 years ago, 70. The value of z is 0.10 <Z <
, CL 55, the sinterability decreased and the properties also deteriorated at the same time.
3)aの値は、抗電場に影響を4乏、aの値が005よ
り小さいと、抗電場を上げる効果が得られず、抗電場も
29口k t、/inより小さくなってしまうため、実
用的でない。aの値が040會こぐると、焼結性が低下
し、特性も同時に劣化する。3) The value of a has a small effect on the coercive electric field. If the value of a is smaller than 005, the effect of increasing the coercive electric field cannot be obtained, and the coercive electric field will also become smaller than 29kt,/in. , impractical. When the value of a exceeds 040, the sinterability decreases and the properties also deteriorate at the same time.
従って、aの値は、0.05 < a≦040に限定す
る必要がある。Therefore, the value of a needs to be limited to 0.05<a≦040.
4)bの値は、焼結性に影響を与え、bの値が、0、0
5を越えると、焼結性の改善(焼結温度の低下)の効果
がなくなるばかりか、逆に、焼結性を低下させるため、
実用的でない。4) The value of b affects sinterability, and the value of b is 0, 0
If it exceeds 5, not only will the effect of improving sinterability (lower sintering temperature) be lost, but on the contrary, the sinterability will decrease.
Not practical.
従って、bの値は、oくbく0.05に限定する必要が
ある。Therefore, the value of b needs to be limited to 0.05.
5) cの値は、比U電率に影響を与えるが、その影
響は、Xの値と相互にからみあっているため明確に説明
できなかった。しかし、実験結果からは、Cの値が0.
01 <c≦030の範囲をはずれると、特性が低下し
た。5) The value of c influences the specific U electric rate, but this influence cannot be clearly explained because it is intertwined with the value of X. However, from the experimental results, the value of C is 0.
Outside the range of 01<c≦030, the characteristics deteriorated.
実施例からもわかるように、本発明の圧電性磁器は従来
公知の圧電性磁器の問題点を解決しており、下記のよう
な効果が得られた。As can be seen from the examples, the piezoelectric porcelain of the present invention solved the problems of conventionally known piezoelectric porcelain, and the following effects were obtained.
1)従来の公知の圧電性磁器に比べ、ds、が数10係
向上(7ている。1) Compared to conventionally known piezoelectric porcelain, ds is improved by several orders of magnitude (7).
2)比誘電率の温度係数が従来の公知の圧電性磁器に比
べ数倍良くなっているため、セラミンク振動子として使
用した場合、現在のセラミック揚動子の利点をいかした
まま、水晶振動子に近い性能=eltiすことができる
ため、新しい市場が造り川せる。2) The temperature coefficient of dielectric constant is several times better than that of conventionally known piezoelectric porcelain, so when used as a ceramic resonator, it can be used as a crystal resonator while taking advantage of the advantages of current ceramic lifters. Since it is possible to achieve performance close to elti, a new market can be created.
3)従来の公知の圧電性磁器の場合には、”31あるい
はKpの向上をめざすと、T c * Ec kぎせい
にしていたが、本発明の土竜性磁器ではTo、 Kc
をき゛せいにすることなく、尚いd31.Kpが得られ
るため、従来、005〜0.15 ygyn厚のn−電
アクチュエータの駆動電圧が約30V以下でしか使用で
きなかったのに対し、その駆動電圧を100v程度に呼
で高めることが′71六、その変位量も大きくできる。3) In the case of conventionally known piezoelectric porcelain, when aiming to improve ``31 or Kp, T c * Ec k was used, but with the earthen porcelain of the present invention, To, Kc
d31. Since Kp can be obtained, conventionally, the drive voltage of an n-electric actuator with a thickness of 0.005 to 0.15 ygyn could only be used at a voltage of about 30V or less, but it is now possible to increase the drive voltage to about 100V. 716, the amount of displacement can also be increased.
4)本発明の庄′m件磁器iす、焼結温度も低いためp
Hの蒸発が?1とんどないだめ、焼結体の組成変動が少
々いため、不良率が従来に比べ小さくなっている。4) Since the porcelain of the present invention has a low sintering temperature,
Evaporation of H? 1. Because there is little variation in the composition of the sintered body, the defective rate is lower than in the past.
以上のように、本発明の圧電性破器け、撮動子、アクチ
ュエータとt7て使用した場合、特にすぐれた特性を有
する発明である。As described above, the present invention has particularly excellent characteristics when used in combination with the piezoelectric breakage device, camera, and actuator of the present invention.
す、上Su, top
Claims (1)
_/_2_a Bi_1_/_2_a_+_b(Ni_
1_/_3_cZn_cNb_1_/_3)_xTi_
yZr_zO_3、ただし、x+y+z=1とあらわし
たとき、組成を限定するx、y、z、=1と表したとき
、組成を限定するx、y、z、a、bおよびcが、下記
不等式を満足することを特徴とする圧電性磁器。 0.05≦x≦0.60 0.10≦y≦0.70 0.10≦z≦0.55 0.05≦a≦0.40 0≦b≦0.05 0.01≦c≦0.30[Claims] The compositional formula is Pb_1_-_a_-_3_/_2b K_1
_/_2_a Bi_1_/_2_a_+_b(Ni_
1_/_3_cZn_cNb_1_/_3)_xTi_
yZr_zO_3, however, when expressed as x+y+z=1, when x, y, z, which limits the composition, is expressed as =1, x, y, z, a, b, and c, which limit the composition, satisfy the following inequality Piezoelectric porcelain characterized by: 0.05≦x≦0.60 0.10≦y≦0.70 0.10≦z≦0.55 0.05≦a≦0.40 0≦b≦0.05 0.01≦c≦0 .30
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60230180A JPS6289372A (en) | 1985-10-16 | 1985-10-16 | Piezoelectric porcelain |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60230180A JPS6289372A (en) | 1985-10-16 | 1985-10-16 | Piezoelectric porcelain |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6289372A true JPS6289372A (en) | 1987-04-23 |
Family
ID=16903855
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60230180A Pending JPS6289372A (en) | 1985-10-16 | 1985-10-16 | Piezoelectric porcelain |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6289372A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5500142A (en) * | 1993-11-04 | 1996-03-19 | Mitsui Petrochemical Industries, Ltd. | Piezoelectric ceramics |
WO2008096761A1 (en) | 2007-02-07 | 2008-08-14 | Murata Manufacturing Co., Ltd. | Piezoelectric porcelain and piezoelectric element |
JP2009221096A (en) * | 2008-03-18 | 2009-10-01 | Ngk Insulators Ltd | Piezoelectric/electrostrictive ceramic composition |
EP2103581A3 (en) * | 2008-03-18 | 2012-03-14 | NGK Insulators, Ltd. | Piezoelectric/electrostrictiven ceramic composition |
-
1985
- 1985-10-16 JP JP60230180A patent/JPS6289372A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5500142A (en) * | 1993-11-04 | 1996-03-19 | Mitsui Petrochemical Industries, Ltd. | Piezoelectric ceramics |
WO2008096761A1 (en) | 2007-02-07 | 2008-08-14 | Murata Manufacturing Co., Ltd. | Piezoelectric porcelain and piezoelectric element |
EP2090556A4 (en) * | 2007-02-07 | 2011-03-09 | Murata Manufacturing Co | Piezoelectric porcelain and piezoelectric element |
US7965020B2 (en) | 2007-02-07 | 2011-06-21 | Murata Manufacturing Co., Ltd. | Piezoelectric ceramic and piezoelectric element |
JP2009221096A (en) * | 2008-03-18 | 2009-10-01 | Ngk Insulators Ltd | Piezoelectric/electrostrictive ceramic composition |
EP2103581A3 (en) * | 2008-03-18 | 2012-03-14 | NGK Insulators, Ltd. | Piezoelectric/electrostrictiven ceramic composition |
US8871111B2 (en) | 2008-03-18 | 2014-10-28 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive ceramic composition |
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