JPS6287781U - - Google Patents
Info
- Publication number
- JPS6287781U JPS6287781U JP17766385U JP17766385U JPS6287781U JP S6287781 U JPS6287781 U JP S6287781U JP 17766385 U JP17766385 U JP 17766385U JP 17766385 U JP17766385 U JP 17766385U JP S6287781 U JPS6287781 U JP S6287781U
- Authority
- JP
- Japan
- Prior art keywords
- coating material
- chamber
- extrusion piston
- passage
- filling chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 8
- 238000001125 extrusion Methods 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17766385U JPS6287781U (zh) | 1985-11-19 | 1985-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17766385U JPS6287781U (zh) | 1985-11-19 | 1985-11-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6287781U true JPS6287781U (zh) | 1987-06-04 |
Family
ID=31119075
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17766385U Pending JPS6287781U (zh) | 1985-11-19 | 1985-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6287781U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01244618A (ja) * | 1988-03-25 | 1989-09-29 | Tokyo Electron Ltd | 処理液供給方法 |
-
1985
- 1985-11-19 JP JP17766385U patent/JPS6287781U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01244618A (ja) * | 1988-03-25 | 1989-09-29 | Tokyo Electron Ltd | 処理液供給方法 |