JPS6287781U - - Google Patents

Info

Publication number
JPS6287781U
JPS6287781U JP17766385U JP17766385U JPS6287781U JP S6287781 U JPS6287781 U JP S6287781U JP 17766385 U JP17766385 U JP 17766385U JP 17766385 U JP17766385 U JP 17766385U JP S6287781 U JPS6287781 U JP S6287781U
Authority
JP
Japan
Prior art keywords
coating material
chamber
extrusion piston
passage
filling chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17766385U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17766385U priority Critical patent/JPS6287781U/ja
Publication of JPS6287781U publication Critical patent/JPS6287781U/ja
Pending legal-status Critical Current

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  • Coating Apparatus (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図ないし第3図はこの考案の塗布装置を示
すもので、第1図は断面図、第2図は押圧板を示
す側面図、第3図は同じく底面図、第4図ないし
第6図はこの塗布装置の動作を説明するためのも
ので、第4図および第5図は断面図、第6図はタ
イムチヤートである。 1…本体、3…シリンダ、4…押出ピストン、
5…充填室、6…圧力室、7…塗布材流入通路、
8…塗布材吐出通路、17…小エアシリンダ、1
7a…ピストン、17b…バネ、17c…加圧室
、20…気体通路。
Figures 1 to 3 show the coating device of this invention, in which Figure 1 is a sectional view, Figure 2 is a side view showing the pressing plate, Figure 3 is a bottom view, and Figures 4 to 6. The figures are for explaining the operation of this coating device, and FIGS. 4 and 5 are cross-sectional views, and FIG. 6 is a time chart. 1...Main body, 3...Cylinder, 4...Extrusion piston,
5... Filling chamber, 6... Pressure chamber, 7... Application material inflow passage,
8...Applying material discharge passage, 17...Small air cylinder, 1
7a... Piston, 17b... Spring, 17c... Pressurizing chamber, 20... Gas passage.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 本体内に形成されたシリンダの内部空間を、押
出ピストンによつて二分し、一方を圧力室とし、
他方を塗布材が充填される充填室とし、充填室に
は塗布材を導入する塗布材流入通路および塗布材
を吐出する塗布材吐出通路を設け、圧力室には加
圧気体を導入する加圧気体導入通路を設け、押出
ピストンの内部に圧力室と充填室とを連通する気
体通路を形成し、押出ピストンが充填室内の塗布
材を吐出後この気体通路を開放する弁を押出ピス
トンに設けたことを特徴とする塗布装置。
The internal space of the cylinder formed in the main body is divided into two by an extrusion piston, and one side is used as a pressure chamber,
The other side is a filling chamber filled with a coating material, the filling chamber is provided with a coating material inflow passage for introducing the coating material and a coating material discharge passage for discharging the coating material, and the pressure chamber is provided with a pressurization chamber for introducing pressurized gas. A gas introduction passage is provided, a gas passage is formed inside the extrusion piston that communicates the pressure chamber and the filling chamber, and a valve is provided on the extrusion piston to open this gas passage after the extrusion piston discharges the coating material in the filling chamber. A coating device characterized by:
JP17766385U 1985-11-19 1985-11-19 Pending JPS6287781U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17766385U JPS6287781U (en) 1985-11-19 1985-11-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17766385U JPS6287781U (en) 1985-11-19 1985-11-19

Publications (1)

Publication Number Publication Date
JPS6287781U true JPS6287781U (en) 1987-06-04

Family

ID=31119075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17766385U Pending JPS6287781U (en) 1985-11-19 1985-11-19

Country Status (1)

Country Link
JP (1) JPS6287781U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01244618A (en) * 1988-03-25 1989-09-29 Tokyo Electron Ltd Method of supplying treating solution

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01244618A (en) * 1988-03-25 1989-09-29 Tokyo Electron Ltd Method of supplying treating solution

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