JPS6287445U - - Google Patents
Info
- Publication number
- JPS6287445U JPS6287445U JP17961485U JP17961485U JPS6287445U JP S6287445 U JPS6287445 U JP S6287445U JP 17961485 U JP17961485 U JP 17961485U JP 17961485 U JP17961485 U JP 17961485U JP S6287445 U JPS6287445 U JP S6287445U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- chuck
- tipping
- linked
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17961485U JPS6287445U (https=) | 1985-11-21 | 1985-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17961485U JPS6287445U (https=) | 1985-11-21 | 1985-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6287445U true JPS6287445U (https=) | 1987-06-04 |
Family
ID=31122829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17961485U Pending JPS6287445U (https=) | 1985-11-21 | 1985-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6287445U (https=) |
-
1985
- 1985-11-21 JP JP17961485U patent/JPS6287445U/ja active Pending
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