JPS6287440U - - Google Patents
Info
- Publication number
- JPS6287440U JPS6287440U JP17960285U JP17960285U JPS6287440U JP S6287440 U JPS6287440 U JP S6287440U JP 17960285 U JP17960285 U JP 17960285U JP 17960285 U JP17960285 U JP 17960285U JP S6287440 U JPS6287440 U JP S6287440U
- Authority
- JP
- Japan
- Prior art keywords
- clampers
- probe card
- actuator
- guide
- fixing mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 8
- 230000007246 mechanism Effects 0.000 claims 6
- 230000007723 transport mechanism Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17960285U JPH037955Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-11-21 | 1985-11-21 | |
| US06/928,502 US4721198A (en) | 1985-11-13 | 1986-11-07 | Probe card clamping and changing mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17960285U JPH037955Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-11-21 | 1985-11-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6287440U true JPS6287440U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-06-04 |
| JPH037955Y2 JPH037955Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-02-27 |
Family
ID=31122805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17960285U Expired JPH037955Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-11-13 | 1985-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH037955Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1985
- 1985-11-21 JP JP17960285U patent/JPH037955Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH037955Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-02-27 |
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