JPS6285332U - - Google Patents
Info
- Publication number
- JPS6285332U JPS6285332U JP17797785U JP17797785U JPS6285332U JP S6285332 U JPS6285332 U JP S6285332U JP 17797785 U JP17797785 U JP 17797785U JP 17797785 U JP17797785 U JP 17797785U JP S6285332 U JPS6285332 U JP S6285332U
- Authority
- JP
- Japan
- Prior art keywords
- air supply
- supply passage
- movable table
- supply hole
- clamped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Machine Tool Units (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17797785U JPH0230186Y2 (enExample) | 1985-11-19 | 1985-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17797785U JPH0230186Y2 (enExample) | 1985-11-19 | 1985-11-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6285332U true JPS6285332U (enExample) | 1987-05-30 |
| JPH0230186Y2 JPH0230186Y2 (enExample) | 1990-08-14 |
Family
ID=31119677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17797785U Expired JPH0230186Y2 (enExample) | 1985-11-19 | 1985-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0230186Y2 (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6451241A (en) * | 1987-08-20 | 1989-02-27 | Toyoda Machine Works Ltd | Hydrostatic supporting device for slider |
| JPH02209620A (ja) * | 1989-02-04 | 1990-08-21 | Toyoda Mach Works Ltd | 角スライド静圧支承装置 |
| JP2009209962A (ja) * | 2008-02-29 | 2009-09-17 | Nikon Corp | 流体軸受、ステージ装置、露光装置、及びデバイス製造方法 |
| JP2010161926A (ja) * | 2010-04-21 | 2010-07-22 | Seiko Instruments Inc | アクチュエータ及びテーブル装置 |
| JP2011510229A (ja) * | 2008-01-14 | 2011-03-31 | ユーピーエム リミテッド | 静圧型空気軸受 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101857272B1 (ko) * | 2017-04-26 | 2018-05-14 | 덕흥 주식회사 | 스크류 가공장치의 클램핑 구조 |
-
1985
- 1985-11-19 JP JP17797785U patent/JPH0230186Y2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6451241A (en) * | 1987-08-20 | 1989-02-27 | Toyoda Machine Works Ltd | Hydrostatic supporting device for slider |
| JPH02209620A (ja) * | 1989-02-04 | 1990-08-21 | Toyoda Mach Works Ltd | 角スライド静圧支承装置 |
| JP2011510229A (ja) * | 2008-01-14 | 2011-03-31 | ユーピーエム リミテッド | 静圧型空気軸受 |
| JP2009209962A (ja) * | 2008-02-29 | 2009-09-17 | Nikon Corp | 流体軸受、ステージ装置、露光装置、及びデバイス製造方法 |
| JP2010161926A (ja) * | 2010-04-21 | 2010-07-22 | Seiko Instruments Inc | アクチュエータ及びテーブル装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0230186Y2 (enExample) | 1990-08-14 |