JPS6284946U - - Google Patents
Info
- Publication number
- JPS6284946U JPS6284946U JP1985175039U JP17503985U JPS6284946U JP S6284946 U JPS6284946 U JP S6284946U JP 1985175039 U JP1985175039 U JP 1985175039U JP 17503985 U JP17503985 U JP 17503985U JP S6284946 U JPS6284946 U JP S6284946U
- Authority
- JP
- Japan
- Prior art keywords
- displacement response
- piezoelectric element
- response speed
- voltage
- speed detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Control Of Position Or Direction (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985175039U JPS6284946U (US20020051482A1-20020502-M00012.png) | 1985-11-15 | 1985-11-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985175039U JPS6284946U (US20020051482A1-20020502-M00012.png) | 1985-11-15 | 1985-11-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6284946U true JPS6284946U (US20020051482A1-20020502-M00012.png) | 1987-05-30 |
Family
ID=31113991
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985175039U Pending JPS6284946U (US20020051482A1-20020502-M00012.png) | 1985-11-15 | 1985-11-15 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6284946U (US20020051482A1-20020502-M00012.png) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5237684A (en) * | 1975-09-19 | 1977-03-23 | Japan Servo Co Ltd | Servomechanism |
JPS54111072A (en) * | 1978-02-17 | 1979-08-31 | Fujitsu Ltd | Displacement controlling apparatus |
JPS55120186A (en) * | 1979-03-09 | 1980-09-16 | Ngk Spark Plug Co Ltd | Piezoelectric element displacement control system |
JPS59112669A (ja) * | 1982-12-20 | 1984-06-29 | Hitachi Ltd | 微小変位発生装置 |
JPS5949207B2 (ja) * | 1975-08-16 | 1984-12-01 | バイエル・アクチエンゲゼルシヤフト | ジエンの製造方法 |
JPS60108913A (ja) * | 1983-11-18 | 1985-06-14 | Canon Inc | 電歪素子制御装置 |
JPS61285082A (ja) * | 1985-06-10 | 1986-12-15 | Toshiba Corp | 圧電型駆動装置 |
-
1985
- 1985-11-15 JP JP1985175039U patent/JPS6284946U/ja active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5949207B2 (ja) * | 1975-08-16 | 1984-12-01 | バイエル・アクチエンゲゼルシヤフト | ジエンの製造方法 |
JPS5237684A (en) * | 1975-09-19 | 1977-03-23 | Japan Servo Co Ltd | Servomechanism |
JPS54111072A (en) * | 1978-02-17 | 1979-08-31 | Fujitsu Ltd | Displacement controlling apparatus |
JPS55120186A (en) * | 1979-03-09 | 1980-09-16 | Ngk Spark Plug Co Ltd | Piezoelectric element displacement control system |
JPS59112669A (ja) * | 1982-12-20 | 1984-06-29 | Hitachi Ltd | 微小変位発生装置 |
JPS60108913A (ja) * | 1983-11-18 | 1985-06-14 | Canon Inc | 電歪素子制御装置 |
JPS61285082A (ja) * | 1985-06-10 | 1986-12-15 | Toshiba Corp | 圧電型駆動装置 |