JPS6284449A - Simultaneously forming method for plural grooves - Google Patents

Abstract

PURPOSE:To simultaneously generates a locus made of plural points by forming an optical stripe pattern due to multi-interruption, coaxially forming the dot string of calescence points of stopped light through the use of a cylindrical lens and scanning the dot string. CONSTITUTION:A laser beam coming out of a laser light source is passed through an expander and is made into a parallel beam 1 by a lens, after which, it is upwardly transmitted through a part forming multi-interruption conditions for two reflection plates 2 and 3 crossing by an inclination angle psi. Due to an intervals (d) between the reflection plates 2 and 3, an interruption waveform with a minimum transmission can be obtained. If the flatness of the reflection plates 2 and 3 is sufficiently high, an interval P from one peak to another can be made constant. The interruption waveform formed by the reflection plates 2 and 3 is shaped through a slit 4, and further stopped coaxially by the cylindrical lens 5. Thus the dot string 7 made of plural calescence points of light is formed on a focused face 6, and plotting can be possible through the use of plural dot strings 7.

Description

[Detailed Description of the Invention] [Industrial Field of Application] The present invention relates to original disks and original cards. This paper relates to a method of creating a large number of original beam guides #1 at the same time, which is sometimes performed.

[Prior art] In order to record on the original disk using recording pits of about 1 μmφ, a technique for positioning the surface of the seminiferous tube is required.
To achieve this, it is necessary to form a marker in advance on the part to be marked. This marker is located at λ/8 (λ
is the wavelength of the light to be used), and it is common to form a fine groove with a depth of about 700 to 900λ69. To form this, an Ar ion laser, a He-Cd laser, etc. are used8 It is common to develop after exposing the resist coated to a certain thickness.

[Problems to be Solved by the Invention] In such a conventional groove forming method, the laser source is narrowed down to one point and the groove formation is performed while the disk is rotated, so if one disk is 〈 is the original for the disk! It took 3 to 6 hours to produce 1, which had the disadvantage of low productivity.

In addition, because it takes time to manufacture a single disc, the process of creating a master disc and then duplicating it based on this disc is a cumbersome process, which is the cause of errors that occur in this process. There were many defects, and the original had a defect of 10-1 to 10", whereas the original had a width of about -7 to 10".Also, the entire surface was drawn with a single beam. Therefore, extremely precise accuracy is required for the rotation system and feeding system.In other words, the distance between grooves is required to be within ±0.05 μm, which is the ultimate mechanical precision, and approximately 10 g+
Since it is necessary to express the value t7 with an accuracy of 10-@ to 10-8 over a long span, the drawing system itself is extremely complex and expensive.

[Means for solving problems]

The method for simultaneously forming multiple grooves according to the present invention was developed to resolve the problem t-S such as 7'L as described above. By narrowing down the light to , a line of bright spots of the p light is formed, and by scanning this spot lI\r, the locus of multiple points is generated simultaneously.

[For production]

In the present invention, since a dot array of bright spots of L light is formed and this dot array is scanned, a large number of #I can be corrected at once, and not only the width of the grooves but also the pitch between the grooves can be kept constant. Deroru.

First, since a large number of #s can be drawn at the same time, the drawing speed is several times faster than in the past, significantly improving productivity.

〔Example〕

Hereinafter, the present invention will be described in detail based on embodiments shown in the drawings.

FIG. 1 is a basic configuration diagram of a method for simultaneously forming multiple grooves according to the present invention. In the same figure, a laser light tube emitted from a laser light source (not shown) is passed through a normal expander (a machine that widens the width of the light), and is further inserted into a lens (none of which is shown).
A parallel beam 1 is taken, and after 7, two reflecting plates 2.
The light is transmitted from above to the part where the multiple interference condition (3) can be formed. At this time, when the distance between the reflecting plates 2.3 is d, 2d/
λ-m (where λ is the original wavelength that can be used, mit integer) is the maximum transmission tube (, , 2d/λ = m + 7 conditions are fully satisfied, d), an interference waveform with minimum transmission is obtained, and the reflection If the flatness of the plate 2.3 is sufficiently close, an interference waveform like J shown in Fig. 2 will be obtained, and the interval P from peak to peak will be -ψ = "-', P 2P 9 - feet. For example, the inclination angle ψ of the two reflectors 2.3 is set to 19.5 degrees, and a HeN laser (
λ-0.6328 μm), it is possible to form a large number of interference fringes with a pitch of 1.6 #m. Furthermore, if an Ar ion laser of 0.488 μm is used, the inclination angle ψ is 15.2 degrees, which is 1. The interference waveform formed by these reflecting plates 2 and 3 and shown in FIG. 2 is shaped through the slit 4.
Further, by applying a j-Coo axis VC aperture to the cylindrical lens 5, a point array T consisting of a large number of original bright spots is formed on the pointless m6. Therefore, if this method is used, it is possible to draw simultaneously using a large number of point sequences 7.

[Example 1] Figure 3 shows a glass disk 10 on which 111 positive resists are applied.
This is an example of rotating drawing on glass disk 1.
The exposure means 11 having the configuration shown in FIG.
w, and the glass disk 10 was rotated at 10 Or, p, and m. At this time, the longitudinal direction of the slit was 10 mm. After exposure and development, multiple #12t-
[Example 2] FIG. 4 shows an example in which rotational drawing is performed on the glass disk 10 as in Example 1, but the longitudinal axis of the slits is set in the glass disk 10. Angle θ (θ-60°) with respect to the radial direction
The difference is that it is tilted. In such an arrangement, l/'2 (for 60°, (
2) Grooves 12 can be formed with a pitch of 60°=2 = 1/2).

Therefore, even if the inclination angle ψ of the two reflectors 2.8 cannot be used,
By controlling the inclination angle θ of the slit longitudinal axis, the groove 1
There is something that allows you to freely change the interval between the two.

[Example 3] When a resist was applied on a flat plate and drawing was performed by moving the flat plate in -1, a large number of parallel grooves could be formed at the same time.

By using this method, it was confirmed that the grooves for the original card could be formed continuously.O [Example 4] 5j! In Example 1, conventionally, 200r at 300rpm
When drawing concentric circles in the sink to create a groove substrate with mφ, 3~
It required 4 hours, which was rare, but by using this method, it could be produced in just about 20 minutes.

In addition, when the substrate obtained by this method was used to deposit Tθ′f and the error rate was evaluated as an optical disk, it was found that
In the conventional method using the transfer method, the error rate was rarely 2×10−6, but the error rate was less than 5×]0−7, and results with good characteristics were obtained. Furthermore, the pitch unevenness of the grooves obtained by Kenpo was 1005 μm or less.

〔Effect of the invention〕

As explained above, the method for simultaneously forming multiple grooves according to the present invention uses a cylindrical lens to uniaxially narrow down the fringe pattern caused by multiple interference, forms a string of original bright spots, and scans this point string. Since a large number of grooves are drawn at the same time, high-speed drawing can be achieved and productivity can be significantly improved. In the case of writing with the conventional single beam, the number of defects on the substrate increases because the master is prepared and then the copies and transfers are repeated, but with the method of the present invention, the substrate is fixed. Since it can be formed in contact, a low error rate can be achieved, and the pitch unevenness can be achieved as low as ±0.05 μm, whereas it was conventionally about ±0.1 μm, and a high quality product can be obtained. It also has the advantage that it is suitable for direct groove formation for original cards and allows continuous production of 91 cards.

[Brief explanation of drawings]

Figure 1 is a basic configuration diagram of the method of the present invention, Figure 2 is a diagram showing the relationship between the interference waveform and the inclination angle ψ, Figure 3 is a diagram showing an example of rough drawing on a glass disk, and Figure 4 is a diagram showing the relationship between the interference waveform and the inclination angle ψ. This is a diagram showing another example of groove drawing.

Claims (1)

[Claims] An optical striped pattern is formed by multiple interference, and by focusing uniaxially using a cylindrical lens, a line of bright spots of light is formed, and by scanning this line of points, a trajectory of multiple points is generated simultaneously. A method for simultaneously forming multiple grooves.