JPS6284158U - - Google Patents
Info
- Publication number
- JPS6284158U JPS6284158U JP17493985U JP17493985U JPS6284158U JP S6284158 U JPS6284158 U JP S6284158U JP 17493985 U JP17493985 U JP 17493985U JP 17493985 U JP17493985 U JP 17493985U JP S6284158 U JPS6284158 U JP S6284158U
- Authority
- JP
- Japan
- Prior art keywords
- ion milling
- end point
- point detector
- milled
- mirrors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000992 sputter etching Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
Description
第１図は本考案のイオンミリング装置の終点検
出器の実施例の縦断面図である。
１…レーザ光源、２…レーザ光検出素子、３…
イオンガン用高電圧電源及び制御部、４…ガラス
窓。
FIG. 1 is a longitudinal sectional view of an embodiment of the end point detector of the ion milling apparatus of the present invention. 1... Laser light source, 2... Laser light detection element, 3...
High voltage power supply and control unit for ion gun, 4...Glass window.
Claims (1)
試料がミリングされ終つたことを検出する装置に
おいて、複数個のミラーを用いることを特徴とす
るイオンミリング装置の終点検出器。 As one unit of ion milling equipment,
An end point detector for an ion milling device, characterized in that the device detects when a sample has been milled, using a plurality of mirrors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17493985U JPS6284158U (en) | 1985-11-15 | 1985-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17493985U JPS6284158U (en) | 1985-11-15 | 1985-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6284158U true JPS6284158U (en) | 1987-05-29 |
Family
ID=31113792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17493985U Pending JPS6284158U (en) | 1985-11-15 | 1985-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6284158U (en) |
-
1985
- 1985-11-15 JP JP17493985U patent/JPS6284158U/ja active Pending
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