JPS628399U - - Google Patents

Info

Publication number
JPS628399U
JPS628399U JP9998585U JP9998585U JPS628399U JP S628399 U JPS628399 U JP S628399U JP 9998585 U JP9998585 U JP 9998585U JP 9998585 U JP9998585 U JP 9998585U JP S628399 U JPS628399 U JP S628399U
Authority
JP
Japan
Prior art keywords
substrate
vibrator
electrode
vibrators
around
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9998585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9998585U priority Critical patent/JPS628399U/ja
Publication of JPS628399U publication Critical patent/JPS628399U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP9998585U 1985-06-29 1985-06-29 Pending JPS628399U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9998585U JPS628399U (US07534539-20090519-C00280.png) 1985-06-29 1985-06-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9998585U JPS628399U (US07534539-20090519-C00280.png) 1985-06-29 1985-06-29

Publications (1)

Publication Number Publication Date
JPS628399U true JPS628399U (US07534539-20090519-C00280.png) 1987-01-19

Family

ID=30969374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9998585U Pending JPS628399U (US07534539-20090519-C00280.png) 1985-06-29 1985-06-29

Country Status (1)

Country Link
JP (1) JPS628399U (US07534539-20090519-C00280.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008274932A (ja) * 2007-04-03 2008-11-13 Canon Inc マイクロ流体デバイスを用いた送液装置および送液方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59183100A (ja) * 1983-03-31 1984-10-18 Agency Of Ind Science & Technol 超音波ポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59183100A (ja) * 1983-03-31 1984-10-18 Agency Of Ind Science & Technol 超音波ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008274932A (ja) * 2007-04-03 2008-11-13 Canon Inc マイクロ流体デバイスを用いた送液装置および送液方法

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