JPS628315A - Production of composite magnetic head - Google Patents

Abstract

PURPOSE:To position tracks with good accuracy by preliminarily forming marker grooves indicating track centers to an erasing head, forming marker grooves indicating the track centers to a thin film magnetic head and positioning the tracks by using these marker grooves and marker films. CONSTITUTION:A laser beam L is irradiated on the center in the track Te forming part on the front face 1b of a magnetic core half 5 facing the contact surface of a magnetic disk to form the marker groove 6. The marker films 23, 23 are formed simultaneously with pattern etching of coil conductors 25 and depth markers 24, 24. The marker films 23, 23 are disposed on both sides so as to face the front surface 21a (the surface facing the contact surface of the magnetic disk) of a substrate 21 in a manner as to be slightly spaced from each other with the center of the tracks Ttau (controlled by a thin magnetic film) in-between. The track Ttau are thus made chechable by such slight spacing.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing a composite magnetic head suitable for use in high-density recording on a magnetic disk such as a floppy disk. , relates to a track alignment method between an erasing head and a thin film magnetic head (recording/reproducing head) constituting the above composite magnetic head.

[Summary of the invention]

In the present invention, when manufacturing a composite magnetic head in which an erasing head and a thin film magnetic head are integrated, the erasing head is previously attached to a magnetic head. By forming a marker groove representing the ivy center and forming a marker film representing the track center on the thin-film magnetic head, and aligning the trunk position of each of the above heads using these marker grooves and marker film, these heads are integrated. , was an attempt to improve track positioning accuracy.

[Conventional technology]

For example, the floppy disk, which is an example of a magnetic disk, is relatively easy to handle and can record large amounts of signals, so its use as an external storage device for minicomputers, office computers, personal computers, etc. is expanding. .

Generally, in the magnetic disk described above, a substantially circular trunk is formed for recording predetermined data, so if the distance between the gap between the recording/reproducing head and the gap between the erasing head is large, positional deviation (off-trunk) etc. may occur. Furthermore, in recent years, as the diameter of the floppy disk has become smaller and recording density has increased, it has been desired to reduce the gap distance.

Therefore, we used a thin-film magnetic head fabricated using thin-film formation technology for recording and playback, and used a so-called bulk-type erase head using a ferrite core for erasing, and fused these thin-film magnetic heads and the erase head with glass, etc. Bonded composite magnetic heads have been proposed.

Since the composite magnetic head described above uses a thin film magnetic head for recording and reproducing, it can be made relatively compact, and since the erasing head is disposed adjacent to the thin film magnetic head, the gap between the thin film magnetic head and The distance between the magnetic head and the gear of the erasing head can be reduced, resulting in a composite magnetic head suitable for high-density recording on high-speed disks.

In order to manufacture this type of composite magnetic head, as shown in FIG. form. Then, a thin film block (51) having a plurality of thin film magnetic head elements in which the width of the trunk T is regulated by the magnetic thin film (54) is manufactured. On the other hand, the erase block (61) has a ferrite core (62) formed with a groove (64) that regulates the width of the track T.
, (63) are butted together with a gap film (65) interposed therebetween, and then fused with glass or the like.

Then, the recording/reproducing trunk T becomes an erasing trunk T,
After aligning the blocks (51) and (61) so that they are located in the center of each other, the blocks (51) and (61) are butted together and glass fused. After that, slicing is performed at predetermined positions, and the surface facing the magnetic disk is polished into a spherical surface. Processing is performed to manufacture composite magnetic heads.

In the composite magnetic head manufactured above, the positional relationship between the recording/reproducing trunk TR and the erasing trunk T is as follows, when the trunk TR is located at the center of the track T, and the width of the guard band of the thin film magnetic head is T6. It is necessary to form it so that T, l<T, ≦(Ti+ +2TO). That is, T8>T
, the unerased portion will be overwritten on the recorded track,
When TE > (T@+2Ta), the adjacent trunk will also be erased. Furthermore, if the trunk TR is not formed within the width of the track T1, recording will be performed even though the previous signal is not sufficiently erased, making it impossible to obtain good recording and reproduction.

However, the positioning of each of the tracks T, 72 is done visually and largely depends on the operator's intuition, and track T□ is track T.

It is not located in the center of the area, but is shifted to the left and right (e in Figure 1O)
It is the cause of this. This positional deviation amount e may reach as much as ten or more μm, and is a factor in reducing the processing yield.

[Problem that the invention seeks to solve]

In this way, when manufacturing a composite magnetic head that integrates a thin-film magnetic head and an erasing head, the track alignment between the thin-film magnetic head and the erasing head is performed based on the intuition of the operator, so the accuracy of track alignment is very high. There was a problem that the process yield varied and the processing yield deteriorated.

SUMMARY OF THE INVENTION The present invention has been proposed in order to solve the above-mentioned problems, and it is an object of the present invention to provide and provide a method for manufacturing a composite magnetic head that can accurately perform track alignment between a thin-film magnetic head and an erase head. With the goal.

[Means for solving problems]

In order to achieve this objective, the method for manufacturing a composite magnetic head of the present invention involves forming a marker groove representing the trunk center in an erasing head made of an oxide magnetic material, and making it possible to read and write data using a magnetic thin film formed on a substrate. The thin film magnetic head is
The present invention is characterized in that a marker film representing a track center is formed, and the erase head and the thin film magnetic head are integrated by aligning the trunk with the marker groove and the marker film.

[Effect]

In this way, a marker groove representing the trunk center is formed on the erasing head in advance, and a marker film representing the trunk center is formed on the thin film magnetic head, and alignment is carried out using these marker grooves and the marker film. , track alignment can be performed with high precision.

〔Example〕

An embodiment of the method for manufacturing a composite magnetic head according to the present invention will be described below with reference to the drawings.

First, a method for forming marker grooves in the erasing head will be described.

First, as shown in FIG.
A kerf (2) is formed on the upper surface (la) of the substrate (1) made of ferromagnetic oxide such as n-type ferrite or Ni-Zn-type ferrite using a rotating grindstone or the like to regulate the width of the trunk T1. A pair of magnetic core half-holes are formed by forming a plurality of parallel magnetic core half-holes, and one magnetic core half-hole is cut. @
(Winding groove (3) and fusion groove (4) in the direction orthogonal to 2+
) to obtain a magnetic core half-break (5).

Next, in the present invention, as shown in FIG. 2, a laser beam L is provided at the center of the trunk T and forming part of the front surface (1b) corresponding to the magnetic disk facing surface of the magnetic core half-closed (5).
is irradiated to form a marker groove (6). As shown in FIG. 3, the marker groove (6) is processed so that the length a in the depth direction does not exceed the specified depth width (10100II in this example), and the length b in the thickness direction of the substrate For example, (aXb)-
(100 μm×10 μm). Furthermore, it is preferable that the marker groove (6) is formed into a substantially V-shape. Note that the marker grooves (6) may be formed using techniques such as photolithography or grinding.

Next, as shown in FIG. 4, the magnetic core half-hole (5) obtained above and the other magnetic core half-hole (8) in which the marker groove (6) is not formed are made of a non-magnetic material such as glass. Material (1
1) and melt-fill these magnetic cores (5).

(8) through the gap film (9) with an adhesive such as glass.
After integration in step D, the magnetic core halves (8) are ground or polished to a predetermined thickness, and the fusion grooves (4) are separated to manufacture the erase block side.

Note that in this embodiment, the marker groove (6) is replaced by the winding groove (3).
Although it is formed on the magnetic core half-closed (5) having a magnetic core half-closed, it goes without saying that it may be formed on the other magnetic core half-closed (8).

Further, the above-mentioned marker groove (6) forming step can be incorporated at any point in the manufacturing process of the erase block Q as long as the marker groove (6) representing the track center remains in the completed erase block OI. comes out. for example,
After the pair of magnetic core halves are integrated, the marker grooves may be formed by laser beam irradiation or grindstone processing.

Next, a method for forming a marker film of a thin film magnetic head will be described.

First, as shown in FIG. 5, a substrate (21) on which a first insulating film (22) made of an insulating material such as Sin is formed in advance is prepared, and a method such as sputtering or vacuum evaporation is applied onto this substrate (21). After depositing and forming a conductor thin film such as Cu or A1 using a method, pattern etching is applied to this conductor thin film using a photolithography technique, and a depth marker (24>) is used to confirm the depth width.

(24) and a coil conductor (25) are formed. The winding structure of the coil conductor (25) may be any spiral type, helical type, or zigzag ring type.

Furthermore, in the present invention, at the same time as the pattern etching of the coil conductor (25) and the depth markers (24), (24), the marker films (23), (23) are etched.
form. This marker film (23), (23) is
Facing the front surface (21a) of the substrate (21) (the surface corresponding to the surface facing the LIS disk), the tracks T and CC
They are arranged on both sides with a minute gap between the center (regulated by a thin film), and this minute gap allows the
, can be checked.

As the pattern etching method, a photolithography technique, dry etching such as ion etching, wet etching using an etching liquid, etc. are employed.

Further, it is preferable to form the interval between the marker films (23) and (23) to be 3 μm or less in order to improve the accuracy of track alignment with the erasing head. Furthermore, the length f of the marker films (23), (23) in the depth direction must be formed so as not to extend over the specified depth width, and is preferably about 100 μm, for example. Note that this marker film (23) may be formed so that one edge of the marker film collapses at the center of the track T1, and the center of the track T1 may be confirmed by the edge of this marker film.

Furthermore, a second insulating film (
After forming sendust (Fe-Al-3
A magnetic thin film (26) made of a ferromagnetic metal material such as i-based alloy) or permalloy (1? e-Jli-based alloy) is deposited and etched into the desired shape using photolithography technology to regulate the trunk width. conduct. The above magnetic i! As a method for forming the four films (26), vacuum thin film forming techniques such as flash vapor deposition, vapor deposition in gas, ion blating, and Freisler ion beam method are employed.

Next, as shown in FIG. 6, a protective film (27) made of SiO or the like is formed on this magnetic thin film (26), and then an inorganic adhesive (28) made of a non-magnetic material such as glass is applied. The thin film block (30) is produced by melting and filling in an inert gas atmosphere and flattening it by surface grinding or mirror finishing. Therefore, the joint surface (30a) of the thin film magnetic head (30) with the erase head becomes flat, and the erase head (30a) becomes flat.
When integrated with 10), uneven bonding will not occur and bonding with excellent chain reliability will be possible. The adhesive (28) used has a softening point of 650° C. or lower at a temperature at which the magnetic properties of the magnetic thin film (26) do not deteriorate, for example, when sendust is used as the magnetic thin film (26).

In this example, the marker film was formed using a part of the conductor film for forming the four coils, but it is also possible to use a magnetic thin film and form it simultaneously with the etching of this magnetic thin film. Needless to say.

With respect to the erase block (10) and thin film block (30) produced above, as shown in FIG. The pointed portion of the groove (6) and the thin film block (30)
Trunk alignment is performed between the marker films (23) and (23) formed on. Next, each block (10), (
After fixing the composite block (30) with a jig, the composite block (35
).

In this way, by aligning the track using the marker groove (6) and the marker film (23), this track alignment can be easily performed, and the operator's intuition is no longer required, improving the accuracy of track alignment. be able to. Therefore, processing yield can be improved and manufacturing costs can be reduced.

Subsequently, as shown in FIG. 8(A) and FIG. 8(B),
With respect to the composite block (35), the magnetic disk contact surface (35a) is arranged so that each head has a desired depth width.
Polish. In this case, the marker groove (6) formed on the erasing head (10) and the marker M (23) formed on the 'ill film magnetic head are formed in advance so as not to overlap the predetermined depth width. It is scraped off by this polishing and does not remain on the surface facing the magnetic disk.

Finally, in order to obtain the specified width with respect to the magnetic disk, slicing was performed at the positions of the X-X line and the x'-x' line in FIG. Complete.

The composite magnetic head manufactured in this manner has a structure in which the trunk T of the thin film magnetic head is located at the center of the track T of the erasing head. In fact, according to this embodiment, the deviation between the center of the trunk T and the center of the track T could be suppressed to ±1.5 μm or less.

In this embodiment, the marker grooves and the markers 11 are formed to represent the center of each track, but they may be formed anywhere as long as they are formed so that the center of each rank can be seen.

Furthermore, the present invention is not limited to the above-mentioned embodiments,
It goes without saying that various other manufacturing methods can be used without departing from the gist of the present invention.

〔Effect of the invention〕

As described above, according to the present invention, a marker groove representing the track center is formed in advance on the surface of the erase head corresponding to the magnetic disk facing surface, and a marker groove corresponding to the track facing surface of the thin film magnetic head (recording/reproducing head) is formed in advance. A marker film representing the track center is formed near the area where the track is located, and track positioning is performed using these marker grooves and the marker film, so that track alignment can be performed with high precision. Therefore, according to the present invention, a composite magnetic head capable of good recording and reproducing without unerased data or inadvertent erasure of adjacent track signals can be obtained, and the processing yield can also be improved.

4. Simple Explanation of Concave Surface FIGS. 1 to 9 show the method of manufacturing a composite magnetic head of the present invention according to the process order.

Here, FIGS. 1 to 4 are schematic perspective views showing the manufacturing process of the erase block. FIG. 1 shows the groove forming process, FIG. 2 shows the marker groove forming process, and FIG. 3 shows the marker groove forming process. The vicinity of the groove is shown enlarged. FIG. 4 shows the joining process of the magnetic core semi-dead pair.

FIGS. 5 and 6 are schematic perspective views showing the manufacturing process of the thin film block, with FIG. 5 showing the marker film forming process and FIG. 6 showing the flattening process, respectively.

FIG. 7(A) is a perspective view showing the process of integrating the erase block and the thin film block, and FIG. 7(B) is a perspective view showing the process of integrating the erase block and the thin film block.
8(A) is a perspective view showing the polishing process of the magnetic disk contact surface, and FIG. 8(B) is a sectional view taken along line 8(A).
FIG. 9 is a cross-sectional view taken along line dd and a front view showing the magnetic disk contacting surface of the completed composite magnetic head.

FIG. 10 is a front view showing a magnetic disk contacting surface for explaining a conventional method of manufacturing a composite magnetic head.

5.8...Magnetic core half-off 6... Marker groove lO...Erase block (erase head) 21...Substrate 23... Marker film 26...Magnetic WJ'm

Claims (1)

[Claims] A marker groove representing the track center is formed in an erasing head made of an oxide magnetic material, and a marker film representing the track center is provided in the thin film magnetic head in which recording and reproduction is performed by a magnetic thin film formed on a substrate. 1. A method of manufacturing a composite magnetic head, comprising: forming a composite magnetic head, and integrating the erasing head and the thin film magnetic head by aligning tracks using the marker groove and the marker film.