JPS6283126U - - Google Patents

Info

Publication number
JPS6283126U
JPS6283126U JP17369185U JP17369185U JPS6283126U JP S6283126 U JPS6283126 U JP S6283126U JP 17369185 U JP17369185 U JP 17369185U JP 17369185 U JP17369185 U JP 17369185U JP S6283126 U JPS6283126 U JP S6283126U
Authority
JP
Japan
Prior art keywords
air
clean room
room
clean
entrance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17369185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17369185U priority Critical patent/JPS6283126U/ja
Publication of JPS6283126U publication Critical patent/JPS6283126U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP17369185U 1985-11-12 1985-11-12 Pending JPS6283126U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17369185U JPS6283126U (enrdf_load_stackoverflow) 1985-11-12 1985-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17369185U JPS6283126U (enrdf_load_stackoverflow) 1985-11-12 1985-11-12

Publications (1)

Publication Number Publication Date
JPS6283126U true JPS6283126U (enrdf_load_stackoverflow) 1987-05-27

Family

ID=31111392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17369185U Pending JPS6283126U (enrdf_load_stackoverflow) 1985-11-12 1985-11-12

Country Status (1)

Country Link
JP (1) JPS6283126U (enrdf_load_stackoverflow)

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