JPS6281562U - - Google Patents
Info
- Publication number
- JPS6281562U JPS6281562U JP1985173090U JP17309085U JPS6281562U JP S6281562 U JPS6281562 U JP S6281562U JP 1985173090 U JP1985173090 U JP 1985173090U JP 17309085 U JP17309085 U JP 17309085U JP S6281562 U JPS6281562 U JP S6281562U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- surface plate
- sheet
- polishing device
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 11
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985173090U JPS6281562U (de) | 1985-11-11 | 1985-11-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985173090U JPS6281562U (de) | 1985-11-11 | 1985-11-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6281562U true JPS6281562U (de) | 1987-05-25 |
Family
ID=31110224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985173090U Pending JPS6281562U (de) | 1985-11-11 | 1985-11-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6281562U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015009340A (ja) * | 2013-07-01 | 2015-01-19 | 株式会社荏原製作所 | 研磨装置、研磨パッドの配置方法、及び研磨パッド |
-
1985
- 1985-11-11 JP JP1985173090U patent/JPS6281562U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015009340A (ja) * | 2013-07-01 | 2015-01-19 | 株式会社荏原製作所 | 研磨装置、研磨パッドの配置方法、及び研磨パッド |
| US9919403B2 (en) | 2013-07-01 | 2018-03-20 | Ebara Corporation | Polishing apparatus, polishing pad positioning method, and polishing pad |