JPS628131B2 - - Google Patents
Info
- Publication number
- JPS628131B2 JPS628131B2 JP18719081A JP18719081A JPS628131B2 JP S628131 B2 JPS628131 B2 JP S628131B2 JP 18719081 A JP18719081 A JP 18719081A JP 18719081 A JP18719081 A JP 18719081A JP S628131 B2 JPS628131 B2 JP S628131B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- light
- refractive index
- spectrum
- birefringence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001228 spectrum Methods 0.000 claims description 36
- 230000010287 polarization Effects 0.000 claims description 31
- 230000003287 optical effect Effects 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 9
- 238000005259 measurement Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000001066 destructive effect Effects 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 229910052740 iodine Inorganic materials 0.000 description 2
- 239000011630 iodine Substances 0.000 description 2
- -1 iodine halogen Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000001907 polarising light microscopy Methods 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/23—Bi-refringence
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18719081A JPS5887445A (ja) | 1981-11-20 | 1981-11-20 | 透明フイルムの複屈折度測定方法およびその装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18719081A JPS5887445A (ja) | 1981-11-20 | 1981-11-20 | 透明フイルムの複屈折度測定方法およびその装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5887445A JPS5887445A (ja) | 1983-05-25 |
JPS628131B2 true JPS628131B2 (US07943777-20110517-C00090.png) | 1987-02-20 |
Family
ID=16201676
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18719081A Granted JPS5887445A (ja) | 1981-11-20 | 1981-11-20 | 透明フイルムの複屈折度測定方法およびその装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5887445A (US07943777-20110517-C00090.png) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6520951B2 (ja) * | 2014-08-26 | 2019-05-29 | 学校法人同志社 | 複屈折測定装置および複屈折測定方法 |
JP7077199B2 (ja) * | 2018-10-01 | 2022-05-30 | 富士フイルム株式会社 | 光学測定装置および配向度測定方法 |
-
1981
- 1981-11-20 JP JP18719081A patent/JPS5887445A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5887445A (ja) | 1983-05-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4332476A (en) | Method and apparatus for studying surface properties | |
Rothen | The ellipsometer, an apparatus to measure thicknesses of thin surface films | |
KR100917912B1 (ko) | 단일 편광자 초점 타원계측기 | |
KR100742982B1 (ko) | 초점 타원계측기 | |
US11906281B2 (en) | Device and method for measuring thickness and refractive index of multilayer thin film by using angle-resolved spectral reflectometry | |
JPS63127133A (ja) | 分光楕円偏光計用の試料照明装置 | |
JPH0678892B2 (ja) | 被膜厚さ測定器 | |
CN1405550A (zh) | 测量光学薄膜等效折射率及物理厚度的设备和方法 | |
JP3520379B2 (ja) | 光学定数測定方法およびその装置 | |
JPS628131B2 (US07943777-20110517-C00090.png) | ||
CN110307963B (zh) | 检测透射式光学系统任意波长焦距的方法 | |
JPS6326763Y2 (US07943777-20110517-C00090.png) | ||
Lunazzi et al. | Fabry-Perot laser interferometry to measure refractive index or thickness of transparent materials | |
JPH02116732A (ja) | 光学測定方法及び測定装置 | |
JPH055699A (ja) | 異方性薄膜の屈折率及び膜厚測定方法 | |
Karabegov | Metrological and technical characteristics of total internal reflection refractometers | |
JP2787809B2 (ja) | ガラス物質から成るウエハーの屈折率を測定する方法及び装置 | |
US2425399A (en) | Method and apparatus for measuring the index of refraction of thin layers of transparent material | |
Faust | Fresnel diffraction at a transparent lamina | |
RU2102700C1 (ru) | Двухлучевой интерферометр для измерения показателя преломления изотропных и анизотропных материалов | |
Rao | Spectrographic technique for determining refractive indices | |
US2923198A (en) | Method and apparatus for examining sheet materials | |
SU737817A1 (ru) | Интерференционный способ измерени показател преломлени диэлектрических пленок переменной толщины | |
RU2032166C1 (ru) | Способ определения показателя преломления клиновидных образцов | |
SU1755125A1 (ru) | Устройство дл определени показател преломлени |