JPS6280338U - - Google Patents

Info

Publication number
JPS6280338U
JPS6280338U JP17234285U JP17234285U JPS6280338U JP S6280338 U JPS6280338 U JP S6280338U JP 17234285 U JP17234285 U JP 17234285U JP 17234285 U JP17234285 U JP 17234285U JP S6280338 U JPS6280338 U JP S6280338U
Authority
JP
Japan
Prior art keywords
quartz
heat treatment
boat
groove
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17234285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0337231Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17234285U priority Critical patent/JPH0337231Y2/ja
Publication of JPS6280338U publication Critical patent/JPS6280338U/ja
Application granted granted Critical
Publication of JPH0337231Y2 publication Critical patent/JPH0337231Y2/ja
Expired legal-status Critical Current

Links

JP17234285U 1985-11-11 1985-11-11 Expired JPH0337231Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17234285U JPH0337231Y2 (enrdf_load_stackoverflow) 1985-11-11 1985-11-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17234285U JPH0337231Y2 (enrdf_load_stackoverflow) 1985-11-11 1985-11-11

Publications (2)

Publication Number Publication Date
JPS6280338U true JPS6280338U (enrdf_load_stackoverflow) 1987-05-22
JPH0337231Y2 JPH0337231Y2 (enrdf_load_stackoverflow) 1991-08-07

Family

ID=31108797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17234285U Expired JPH0337231Y2 (enrdf_load_stackoverflow) 1985-11-11 1985-11-11

Country Status (1)

Country Link
JP (1) JPH0337231Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0337231Y2 (enrdf_load_stackoverflow) 1991-08-07

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