JPH01154628U - - Google Patents

Info

Publication number
JPH01154628U
JPH01154628U JP5066488U JP5066488U JPH01154628U JP H01154628 U JPH01154628 U JP H01154628U JP 5066488 U JP5066488 U JP 5066488U JP 5066488 U JP5066488 U JP 5066488U JP H01154628 U JPH01154628 U JP H01154628U
Authority
JP
Japan
Prior art keywords
silicon
frame
protrusion
support
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5066488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5066488U priority Critical patent/JPH01154628U/ja
Publication of JPH01154628U publication Critical patent/JPH01154628U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP5066488U 1988-04-15 1988-04-15 Pending JPH01154628U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5066488U JPH01154628U (enrdf_load_stackoverflow) 1988-04-15 1988-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5066488U JPH01154628U (enrdf_load_stackoverflow) 1988-04-15 1988-04-15

Publications (1)

Publication Number Publication Date
JPH01154628U true JPH01154628U (enrdf_load_stackoverflow) 1989-10-24

Family

ID=31276703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5066488U Pending JPH01154628U (enrdf_load_stackoverflow) 1988-04-15 1988-04-15

Country Status (1)

Country Link
JP (1) JPH01154628U (enrdf_load_stackoverflow)

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