JPS6279875U - - Google Patents
Info
- Publication number
- JPS6279875U JPS6279875U JP16824285U JP16824285U JPS6279875U JP S6279875 U JPS6279875 U JP S6279875U JP 16824285 U JP16824285 U JP 16824285U JP 16824285 U JP16824285 U JP 16824285U JP S6279875 U JPS6279875 U JP S6279875U
- Authority
- JP
- Japan
- Prior art keywords
- wall
- faces
- reaction chamber
- registration request
- quartz glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16824285U JPS6279875U (cs) | 1985-10-31 | 1985-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16824285U JPS6279875U (cs) | 1985-10-31 | 1985-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6279875U true JPS6279875U (cs) | 1987-05-21 |
Family
ID=31100936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16824285U Pending JPS6279875U (cs) | 1985-10-31 | 1985-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6279875U (cs) |
-
1985
- 1985-10-31 JP JP16824285U patent/JPS6279875U/ja active Pending