JPS6279872U - - Google Patents

Info

Publication number
JPS6279872U
JPS6279872U JP17069885U JP17069885U JPS6279872U JP S6279872 U JPS6279872 U JP S6279872U JP 17069885 U JP17069885 U JP 17069885U JP 17069885 U JP17069885 U JP 17069885U JP S6279872 U JPS6279872 U JP S6279872U
Authority
JP
Japan
Prior art keywords
wafer
disk
vacuum evaporation
hook
evaporation apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17069885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0248425Y2 (US06633782-20031014-M00005.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985170698U priority Critical patent/JPH0248425Y2/ja
Publication of JPS6279872U publication Critical patent/JPS6279872U/ja
Application granted granted Critical
Publication of JPH0248425Y2 publication Critical patent/JPH0248425Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1985170698U 1985-11-05 1985-11-05 Expired JPH0248425Y2 (US06633782-20031014-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985170698U JPH0248425Y2 (US06633782-20031014-M00005.png) 1985-11-05 1985-11-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985170698U JPH0248425Y2 (US06633782-20031014-M00005.png) 1985-11-05 1985-11-05

Publications (2)

Publication Number Publication Date
JPS6279872U true JPS6279872U (US06633782-20031014-M00005.png) 1987-05-21
JPH0248425Y2 JPH0248425Y2 (US06633782-20031014-M00005.png) 1990-12-19

Family

ID=31105656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985170698U Expired JPH0248425Y2 (US06633782-20031014-M00005.png) 1985-11-05 1985-11-05

Country Status (1)

Country Link
JP (1) JPH0248425Y2 (US06633782-20031014-M00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013166966A (ja) * 2012-02-14 2013-08-29 Mitsubishi Electric Corp ウェハ保持構造およびそれを備えた蒸着装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61194175A (ja) * 1985-02-21 1986-08-28 Murata Mfg Co Ltd 薄膜形成装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61194175A (ja) * 1985-02-21 1986-08-28 Murata Mfg Co Ltd 薄膜形成装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013166966A (ja) * 2012-02-14 2013-08-29 Mitsubishi Electric Corp ウェハ保持構造およびそれを備えた蒸着装置

Also Published As

Publication number Publication date
JPH0248425Y2 (US06633782-20031014-M00005.png) 1990-12-19

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