JPS6279743U

JPS6279743U -

Info

Publication number: JPS6279743U
Application number: JP17214785U
Authority: JP
Priority date: 1985-11-07
Filing date: 1985-11-07
Publication date: 1987-05-21

Description

[Brief explanation of the drawing]

第１図は本考案の一実施例にかかる薄膜形成装
置のワーク搬送装置を示す概略斜視図、第２，３
，４図は夫々上記搬送装置の平面図、側面図及び
正面図、第５図は上記搬送装置のタイムチヤート
である。１……定盤、１ａ……凹溝、１ｂ……空気抜き
穴、２，２′……ワーク、３……搬送ワイヤ、４
，５，６，７，１１，２２……プーリー、８……
ブラケツト、９……ベルトコンベヤ、１０……搬
送ワイヤ駆動モータ、１２……ベルト、１３……
突出板、１４……ガイドピン、１５……ブラケツ
ト上下駆動装置、１６……ボルト、１７……第１
突起、１８……第５突起、１９……シリンダ、２
０……フオトセンサ、２１……第２突起、２３…
…位置決め部材、２４……第４突起、２５……搬
送コンベヤ、２６……固定軸、２７……設置台、
２８……固定板、２９……第３突起。 FIG. 1 is a schematic perspective view showing a workpiece conveyance device of a thin film forming apparatus according to an embodiment of the present invention;
, 4 are a plan view, a side view, and a front view of the above-mentioned conveyance device, respectively, and FIG. 5 is a time chart of the above-mentioned conveyance device. 1...Surface plate, 1a...Concave groove, 1b...Air vent hole, 2, 2'...Workpiece, 3...Transportation wire, 4
, 5, 6, 7, 11, 22...Pulley, 8...
Bracket, 9... Belt conveyor, 10... Conveying wire drive motor, 12... Belt, 13...
Projection plate, 14... Guide pin, 15... Bracket vertical drive device, 16... Bolt, 17... First
Projection, 18...Fifth projection, 19...Cylinder, 2
0... Photo sensor, 21... Second protrusion, 23...
...Positioning member, 24...Fourth protrusion, 25...Transfer conveyor, 26...Fixed shaft, 27...Installation stand,
28...Fixing plate, 29...Third protrusion.

Claims

[Claims for Utility Model Registration] (1) A workpiece 2 is carried above the surface plate 1 and the workpiece 2 is placed on the upper surface of the surface plate 1, while a workpiece on which a thin film has been formed by a thin film printing device is placed on the surface plate 1. In the work transfer device of the thin film forming apparatus, the surface plate 1 is provided with a pair of concave grooves 1a extending along the work transfer direction A of the surface plate 1, and each side of the surface plate 1 a bracket 8 disposed vertically movably; a plurality of pulleys 4, 5, 6, 7 provided on each bracket 8;
, 5, 6, and 7, and the workpiece is transported in the direction A.
A conveyor 25, 25 having a workpiece conveyor wire 3 running along the surface plate 1, a conveyor wire drive device 10 fixed to the bracket 8 and rotating the conveyor wire 3, and at least one of the above-mentioned Tension adjustment devices 16, 8a move the pulley 5 relative to the bracket 8 to adjust the tension of the conveying wire 3, and the pair of brackets 8, 8 are synchronized with respect to the surface plate 1 to adjust the tension at the upper end position B. and a vertical drive device 15 for vertical movement between the upper end position B of the bracket 8 and the upper end position B of the bracket 8, so that the upper part of each conveying wire 3 comes out upward from each groove 1a of the surface plate 1. While conveying the workpiece 2, each conveyor wire 3 is connected to the surface plate 1 at the lower end position C of the bracket 8.
A work transport device for a thin film forming apparatus, characterized in that the work 2 is housed in each of the grooves 1a and placed on the upper surface of the surface plate 1. (2) The workpiece of the thin film forming apparatus according to claim 1, wherein the grooves 1a of the surface plate 1 are provided in the portion of the surface plate 1 on which the workpiece 2 is placed near both ends thereof. Conveyance device.