JPS6279419A - Method for connecting wiring of optical shutter array electrode - Google Patents

Abstract

PURPOSE:To lessen the labor of wiring by mounting an optical shutter array provided with electrodes on respective surfaces onto a base, providing flexible printed wiring connectors via anisotropically conductive connectors on the array and connecting the connectors by means of a pushing bar in the stage of connecting the wirings to the electrodes. CONSTITUTION:A transparent substrate 3 made of an electrooptic material consisting of transparent ceramics or the like which generates an optical modulation effect when impressed with a voltage is mounted on the base 2 consisting of ceramics or glass and while the electrodes 4 provided thereon are included, the substrate 3 is divided to form the optical shutter arrays 1 respectively having driving parts 30. The wirings are connected to these electrodes 4. The anisotropically conductive connectors 5 are preliminarily provided on the substrate 3 in this stage and the flexible printed wiring connectors 6 having conductors 9 and lead-out electrodes 10 are superposed thereon and are pushed by the pushing bar to couple the conductors 9 and the electrodes 4. The need for wire bonding is eliminated in the above-mentioned manner, by which the time for connecting the wirings is shortened.

Description

DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to a wiring connection method for optical shutter array electrodes that utilizes electro-optic effects, which facilitates wiring and has a high yield.

<Prior Art> In recent years, electro-optic materials such as PLZT that exhibit electro-optic effects have been developed. Here, the electro-optic effect refers to a phenomenon in which the refractive index of a medium changes due to an applied direct current or low frequency (compared to optical frequency) electric field.

A typical example of such electro-optic materials is 9/65/
PLZT (La9 atomic% PbZr
O3/PbTiO3= 65/35 (molar ratio)
] Transparent ceramics are well known.

There is an optical shutter that utilizes this PLZT.

The optical shutter has a structure in which a pair of bottom electrodes are formed on one side of a plate-shaped PLZT element at a constant interval, and is installed between a polarizer and an analyzer whose polarization directions are perpendicular to each other. Transmission and blocking of light can be controlled between the polarizer and the analyzer by turning the applied voltage ON and OFF. An optical shutter array in which a plurality of such optical shutters each consisting of one pixel are assembled can be used in a printer or the like.

The structure of the wiring connection part of the conventional optical shutter array electrode is
0 and 11. This optical shutter array l was wired by connecting each electrode 4 and the corresponding lead-out type Vj10 with wires 8.

However, the work of bonding the wire 8 to the electrodes 4 and 10 requires a large number of wires and is time-consuming, and furthermore, if the adhesion of the wire bonding is poor, the wire will break. This caused a decrease in yield. In particular, when the electrode 4 is a groove-type electrode (a relatively deep groove is formed in the transparent substrate 3 made of electro-optic material and a conductive material that becomes the electrode is buried in the groove), the area of the electrode to be wire bonded is Wire bonding was difficult due to the small amount of wire bonding, and the above-mentioned drawbacks were conspicuous.

In addition, in the optical shutter array shown in FIG. 11, which is configured such that the longitudinal direction of the electrode 4 and the direction of the incident light are the same, the wire connecting them is Since the wires 11 cross the optical path, there is a strong possibility that the wires may obstruct the incidence of light or scatter the incident light, resulting in stray light, resulting in a decrease in the performance of the optical shutter array.

<Objective of the Invention> An object of the present invention is to provide a wiring connection method for optical shutter array electrodes that can reduce wiring effort, shorten manufacturing time, and improve yield.

<Structure of the Invention> The present invention provides an anisotropic conductive material on the transparent substrate made of an electro-optic material when wiring is connected to each electrode of an optical shutter array having a plurality of optical shutter electrodes on a transparent substrate made of an electro-optic material. Install the connector and place a flexible printed wiring connector (hereinafter referred to as F, P) on top of it.

(referred to as F and P) are placed so that one end of the F and P are overlapped.

C and the anisotropic conductive connector are pressed by pressing means to 11t.
``The light is characterized by electrically connecting the outer electrodes of the transparent substrate made of the electro-optic material and the corresponding conductive wires F, P, and C by being compressed and supported by the transparent substrate made of the electro-optic material. This is a wiring connection method for shutter array electrodes.

Further, the electrode is preferably formed by embedding a conductive substance in a groove formed in a transparent substrate made of an electro-optical material.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the optical shutter array wiring connection method of the present invention will be described in detail with reference to the accompanying drawings.

The wiring connection method for an optical shutter array according to the present invention is roughly divided into first to fifth steps.

In the first step, as shown in FIG. 5, an extraction electrode 10 corresponding to the optical shutter electrode 4 is formed in advance by an appropriate method, and a transparent substrate 3 made of an electro-optic material is attached to the upper surface of the support 2 using an adhesive. Glue using.

In the case of the optical shutter array having the configuration shown in FIG. 1, since the incident light passes through the support 2, the support 2 should be a substantially transparent plate, and the substrate 3 should be adhered using an optical adhesive. preferable.

In the case of the optical shutter array having the configuration shown in FIG. 2, the support body 2 has a convex portion 20, and the substrate 3 is adhered to the tip of the convex portion 20. In this case, since the incident light does not pass through the support 2, the support 2 may be transparent or opaque, and the adhesive used is not particularly limited to optical use.
It can be something general.

Examples of the material used for such a support 2 include a ceramic plate, and when the support 2 is a transparent plate, it is preferable to use glass, sapphire, or the like.

The transparent substrate 3 made of electro-optic material will be explained below. This transparent substrate 3 made of an electro-optical material has a property of producing a gradient effect when a voltage is applied, and is preferably 97
PLZT (La9 original f%,
Pb7. A transparent ceramic of r (13/PbTiO3=65/35 (molar ratio)) is used.

In addition, 7/65/35.8/65/35, 8/4
PLZT with a ratio of 0/60, 12/40/60.10/65/35, PBLN with a ratio of 60/2.70/8, PLHT with a ratio of 10/65/35.
, PB consisting of the ratio of 4/60/40.8/60/40
LN, SBN, LiTaO3, LiNb30, KH2
PO4, ADP, KD2 PO4, BNN, KT
N etc. can also be used.

In such electro-optic materials, the induced refractive index change is
There are some that exhibit a temporary electro-optic effect (Pockels effect) that is proportional to the first power of the electric field, and a second-order electro-optic effect (Kerr effect) that is proportional to the square of the electric field, and it is possible to use either of them. , those exhibiting a secondary electro-optic effect are preferred.

Electrical conductors 44 are formed in parallel and at regular intervals on this transparent substrate 3 made of electro-optical material. The electrode 4 is on the surface of the substrate 3,
It is also possible to form a thin metal film using methods such as vapor deposition, sputtering, coating, or plating, and then form a short 111-shaped planar electrode by etching, but in order to increase the effective optical path length and reduce the driving voltage, it is necessary to It is preferable to form an electrode (hereinafter referred to as a groove-type electrode) in which a groove is formed in the groove and a conductive material is buried in the groove.

The groove-type electrode is made by forming grooves of equal width and depth in parallel and at equal intervals on the substrate 3 by mechanical grinding or etching, and then filling these grooves with a conductive resin or depositing a metal film by vapor deposition or sputtering. Formed by forming.

The depth of the groove is appropriately determined as necessary, but when the depth of the groove is 50 μm or more, it is preferable to fill the groove with a conductive resin to form a groove-shaped electrode.

As such a conductive resin, a polyimide resin, an epoxy resin, or the like containing Ag, Au, Cu, or the like as a filler can be used.

A driving section 30 is formed between the electrodes 4 thus formed, and when a voltage is applied to the electrodes 4, the driving section 30 produces an electro-optic effect.

In the second step, as shown in FIG. 6, an anisotropically conductive connector 5 is installed on a transparent substrate 3 made of electro-optic material so as to be electrically connected to a conductor 744 as described later. Also,
When installing this connector, accurate alignment is not required due to the characteristics of the connector, which will be described later.

As shown in FIG. 4, this anisotropic conductive connector 5 has a structure in which fine metal wires 51 such as Au are implanted in an orderly manner with a certain directionality inside an elastic insulator 50 such as silicone rubber. Both ends of the thin metal wire 51 protrude from the surface of the elastic insulator 50 by a length of about 10 to 20 μm.

One of the protrusions is in contact with the electrode 4, and the other protrusion is in contact with conducting wires 9 of F, P, and C6, which will be described later, to be electrically connected.

This metal wire! 151 is a dense conductor, so when installing the anisotropic conductive connector 5 on the board 3, it can be electrically connected simply by placing it on the board 3, and the wiring can be easily connected. Labor can be reduced.

In the third step, as shown in FIG.
Place one end of 6 on top of each other.

In these F, P, and C6, the conducting wires 9 are formed parallel to each other at intervals equal to the spacing between the electrodes 4, and as shown in FIG. They are installed so that they are electrically connected via thin metal wires 51.

These F, P, and C are made of a flexible soft resin such as Kapton, and are preferably insulating since they form the conductor 16A9.

The conductive wire 9 is formed using a metal such as Cu or Au by a method such as sputtering or vapor deposition.

In the fourth step, as shown in FIG. 8, the anisotropically conductive connector 5 and F, P, and C6 are pressed and supported on the substrate 3 by a pressing means using a pressing rod 7. This process makes the electrical connection between the electrode 4 and the conductive wire 9 more reliable and strong than the conventional connection by wire bonding.

As a specific example of a press support method using the press rod 7, there is a method in which a prismatic or cylindrical press rod 7 made of an insulating material is fixed to the substrate 3 or the support 2 using a mounting bracket or the like. It will be done.

Note that the anisotropically conductive connector 5 and F, P, and C6 can be pressed and supported by the pressing rod 7, and the resulting electrical connection can be easily and reliably performed, and the process of wiring connection can be done in a timely manner.
Since B is purified, the labor required for manufacturing the optical shutter array is reduced.

As a specific example of a suppression method that does not use the press rod 7, the glass plate and the support body 2 are faced to each other, and F and P are used.

C.6, a method of sandwiching the anisotropically conductive connector 5 and the substrate 3 is mentioned.

In the fifth step, as shown in FIG. 9, the respective conductive wires 9 at the ends of F, P, and C6 on the side not supported by pressure are connected to the corresponding extraction electrodes 10 formed on the support 2). .

Possible methods for connecting to the electrode 10 include compression support, heat sealing, and the like.

In the optical shutter array 1 having the configuration shown in FIG.
C6 is installed at a position where it does not obstruct the optical path of the incident light.

On the other hand, the optical shutter array 1 having the configuration shown in FIG.
Now, an extraction electrode is formed on the support 2, and F, P,
If one end of C6 is connected, F, P, and C6 will obstruct the optical path of the incident light, so such a configuration is not possible. Therefore, it is necessary to connect one end of F, P, and C6 to a lead-out electrode provided at any other position. Even in this case, since F, P, and C6 have flexibility, wiring connections can be easily made regardless of the installation position of the extraction electrode.

<Effects of the Invention> According to the wiring connection method of the optical shutter array electrode of the present invention, it is only necessary to place the anisotropic conductive connector and F, P, and C on the substrate and press and support them, and the optical shutter There is no need to perform wire bonding for each electrode in the array, which reduces the effort required to connect the wires and shortens the time required to connect the wires.

Further, it is possible to prevent a decrease in yield due to wire breakage that occurs in wire bonding with a large number of wires, and to manufacture a good optical shutter array.

Furthermore, due to the structural features of the anisotropically conductive connector, wiring connections can be easily made to any type of electrode, such as a flat electrode or a groove-shaped electrode.

In addition, by using flexible F, P, and C wires, it is now possible to connect wires to optical shutter arrays where wire bonding was difficult or impossible due to the positional relationship of the electrodes. It is possible to increase variations in the structure of the array.

[Brief explanation of drawings]

1 and 2 are perspective views showing the wiring structure of the optical shutter array of the present invention. FIG. 3 is a sectional view taken along the line ■-■ in FIG. 1. FIG. 4 is a longitudinal sectional view of the anisotropically conductive connector used in the present invention. FIGS. 5 to 9 are perspective views showing the steps of the wiring connection method for optical shutter array electrodes of the present invention. FIGS. 10 and 11 are perspective views showing the wiring structure of a conventional optical shutter array. Explanation of symbols 1... Optical shutter array, 2... Support body, 3...
Transparent substrate made of electro-optical material, 30--driving section, 4--
Electrode, 5--Anisotropic conductive connector, 50--Elastic insulator, 51--Thin metal wire, 6-F, P, C17--Press rod, 8--Wire, 9--Conducting wire , 10... Takeout electrode patent applicant Tomigami Photo Film Co., Ltd.■ FIG, 2 FIG, 3 FIG・45 and FIG, 6 FIG, 9

Claims (2)

[Claims] (1) When wiring is connected to each electrode of an optical shutter array having a plurality of optical shutter electrodes on a transparent substrate made of an electro-optic material, an anisotropically conductive connector is installed on the transparent substrate made of the electro-optic material, and One end of a flexible printed wiring connector is placed on top of the electro-optical substrate, and the flexible printed wiring connector and the anisotropically conductive connector are pressed and supported by a pressing means against the transparent substrate made of electro-optic material. 1. A wiring connection method for optical shutter array electrodes, which comprises electrically connecting each electrode of a transparent substrate made of a material and each conductive wire of a flexible printed wiring connector corresponding thereto. (2) The wiring connection method of an optical shutter array electrode according to claim 1, wherein the electrode is formed by embedding a conductive material in a groove formed in a transparent substrate made of an electro-optic material.