JPS6278767U - - Google Patents
Info
- Publication number
- JPS6278767U JPS6278767U JP16927885U JP16927885U JPS6278767U JP S6278767 U JPS6278767 U JP S6278767U JP 16927885 U JP16927885 U JP 16927885U JP 16927885 U JP16927885 U JP 16927885U JP S6278767 U JPS6278767 U JP S6278767U
- Authority
- JP
- Japan
- Prior art keywords
- floating gate
- semiconductor device
- cover
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Non-Volatile Memory (AREA)
Description
第１図は、本考案の半導体装置の断面図であり
、第２図ａ〜ｄは、実施例の製造工程図である。
第３図は、従来例である。
１……フローテイング・ゲート、２……段差、
３……絶縁部、４……溝部。
FIG. 1 is a sectional view of the semiconductor device of the present invention, and FIGS. 2a to 2d are manufacturing process diagrams of the embodiment.
FIG. 3 shows a conventional example. 1...Floating gate, 2...Step,
3...Insulating part, 4...Groove part.
Claims (1)
おいて、 上記フローテイング・ゲートが、段差を有する
絶縁部の少なくとも溝部を覆つて形成されたもの
であることを特徴とする半導体装置。[Claims for Utility Model Registration] A semiconductor device having a floating gate, wherein the floating gate is formed to cover at least a groove portion of an insulating portion having a step.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16927885U JPS6278767U (en) | 1985-11-02 | 1985-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16927885U JPS6278767U (en) | 1985-11-02 | 1985-11-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6278767U true JPS6278767U (en) | 1987-05-20 |
Family
ID=31102935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16927885U Pending JPS6278767U (en) | 1985-11-02 | 1985-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6278767U (en) |
-
1985
- 1985-11-02 JP JP16927885U patent/JPS6278767U/ja active Pending
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