JPS6278603U - - Google Patents

Info

Publication number
JPS6278603U
JPS6278603U JP17211285U JP17211285U JPS6278603U JP S6278603 U JPS6278603 U JP S6278603U JP 17211285 U JP17211285 U JP 17211285U JP 17211285 U JP17211285 U JP 17211285U JP S6278603 U JPS6278603 U JP S6278603U
Authority
JP
Japan
Prior art keywords
chamber
line
electromagnetic switching
vacuum
switching valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17211285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0234164Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17211285U priority Critical patent/JPH0234164Y2/ja
Publication of JPS6278603U publication Critical patent/JPS6278603U/ja
Application granted granted Critical
Publication of JPH0234164Y2 publication Critical patent/JPH0234164Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Vacuum Packaging (AREA)
JP17211285U 1985-11-07 1985-11-07 Expired JPH0234164Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17211285U JPH0234164Y2 (enrdf_load_stackoverflow) 1985-11-07 1985-11-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17211285U JPH0234164Y2 (enrdf_load_stackoverflow) 1985-11-07 1985-11-07

Publications (2)

Publication Number Publication Date
JPS6278603U true JPS6278603U (enrdf_load_stackoverflow) 1987-05-20
JPH0234164Y2 JPH0234164Y2 (enrdf_load_stackoverflow) 1990-09-13

Family

ID=31108360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17211285U Expired JPH0234164Y2 (enrdf_load_stackoverflow) 1985-11-07 1985-11-07

Country Status (1)

Country Link
JP (1) JPH0234164Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010013147A (ja) * 2008-07-03 2010-01-21 Furukawa Mfg Co Ltd 真空・ガス置換包装装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010013147A (ja) * 2008-07-03 2010-01-21 Furukawa Mfg Co Ltd 真空・ガス置換包装装置

Also Published As

Publication number Publication date
JPH0234164Y2 (enrdf_load_stackoverflow) 1990-09-13

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