JPS6278603U - - Google Patents

Info

Publication number
JPS6278603U
JPS6278603U JP17211285U JP17211285U JPS6278603U JP S6278603 U JPS6278603 U JP S6278603U JP 17211285 U JP17211285 U JP 17211285U JP 17211285 U JP17211285 U JP 17211285U JP S6278603 U JPS6278603 U JP S6278603U
Authority
JP
Japan
Prior art keywords
chamber
line
electromagnetic switching
vacuum
switching valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17211285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0234164Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17211285U priority Critical patent/JPH0234164Y2/ja
Publication of JPS6278603U publication Critical patent/JPS6278603U/ja
Application granted granted Critical
Publication of JPH0234164Y2 publication Critical patent/JPH0234164Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Vacuum Packaging (AREA)
JP17211285U 1985-11-07 1985-11-07 Expired JPH0234164Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17211285U JPH0234164Y2 (OSRAM) 1985-11-07 1985-11-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17211285U JPH0234164Y2 (OSRAM) 1985-11-07 1985-11-07

Publications (2)

Publication Number Publication Date
JPS6278603U true JPS6278603U (OSRAM) 1987-05-20
JPH0234164Y2 JPH0234164Y2 (OSRAM) 1990-09-13

Family

ID=31108360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17211285U Expired JPH0234164Y2 (OSRAM) 1985-11-07 1985-11-07

Country Status (1)

Country Link
JP (1) JPH0234164Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010013147A (ja) * 2008-07-03 2010-01-21 Furukawa Mfg Co Ltd 真空・ガス置換包装装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010013147A (ja) * 2008-07-03 2010-01-21 Furukawa Mfg Co Ltd 真空・ガス置換包装装置

Also Published As

Publication number Publication date
JPH0234164Y2 (OSRAM) 1990-09-13

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