JPS6277612A - Abnormality diagnosing method for plant - Google Patents

Abnormality diagnosing method for plant

Info

Publication number
JPS6277612A
JPS6277612A JP60216200A JP21620085A JPS6277612A JP S6277612 A JPS6277612 A JP S6277612A JP 60216200 A JP60216200 A JP 60216200A JP 21620085 A JP21620085 A JP 21620085A JP S6277612 A JPS6277612 A JP S6277612A
Authority
JP
Japan
Prior art keywords
input signal
storage device
signal
plant
abnormality
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60216200A
Inventor
Akira Sakuma
Original Assignee
Nippon Atom Ind Group Co Ltd
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Atom Ind Group Co Ltd, Toshiba Corp filed Critical Nippon Atom Ind Group Co Ltd
Priority to JP60216200A priority Critical patent/JPS6277612A/en
Publication of JPS6277612A publication Critical patent/JPS6277612A/en
Application status is Pending legal-status Critical

Links

Abstract

PURPOSE:To analyze abnormality speedily without evaluating all logical expressions on every sampling operation by evaluating only logical expressions regarding variation of the process signal of a plant selectively. CONSTITUTION:The processing signal obtained from the plant at constant intervals of time is inputted to a signal input device 6. The input signal is supplied to an input signal processor 7 to check whether its value varies or not and the evaluation result is sent to an input signal storage device 8. The input signal storage device 8 and an evaluation order storage device 9 are used to evaluate the logical expressions regarding the input signal which has the variation. The last evaluation result is substituted in other logical ex pressions as it is. Consequently, the output signal which contains abnormality diagnostic logic generated previously by an abnormality diagnostic logic storage device 10 is inputted to an abnormality diagnostic processor 11, whose diagnostic result is displayed on a diagnostic result display device 12 to an operator.
JP60216200A 1985-10-01 1985-10-01 Abnormality diagnosing method for plant Pending JPS6277612A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60216200A JPS6277612A (en) 1985-10-01 1985-10-01 Abnormality diagnosing method for plant

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60216200A JPS6277612A (en) 1985-10-01 1985-10-01 Abnormality diagnosing method for plant

Publications (1)

Publication Number Publication Date
JPS6277612A true JPS6277612A (en) 1987-04-09

Family

ID=16684842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60216200A Pending JPS6277612A (en) 1985-10-01 1985-10-01 Abnormality diagnosing method for plant

Country Status (1)

Country Link
JP (1) JPS6277612A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7186582B2 (en) 2001-02-12 2007-03-06 Asm America, Inc. Process for deposition of semiconductor films

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7186582B2 (en) 2001-02-12 2007-03-06 Asm America, Inc. Process for deposition of semiconductor films

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