JPS627718B2 - - Google Patents
Info
- Publication number
- JPS627718B2 JPS627718B2 JP51083610A JP8361076A JPS627718B2 JP S627718 B2 JPS627718 B2 JP S627718B2 JP 51083610 A JP51083610 A JP 51083610A JP 8361076 A JP8361076 A JP 8361076A JP S627718 B2 JPS627718 B2 JP S627718B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- wafer
- basic body
- strip
- infrared
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 53
- 238000004519 manufacturing process Methods 0.000 claims description 19
- 239000004020 conductor Substances 0.000 claims description 17
- 238000000151 deposition Methods 0.000 claims description 8
- 230000002829 reductive effect Effects 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 118
- 238000000034 method Methods 0.000 description 38
- 238000005498 polishing Methods 0.000 description 38
- 229920002120 photoresistant polymer Polymers 0.000 description 31
- 229910052737 gold Inorganic materials 0.000 description 29
- 239000010931 gold Substances 0.000 description 29
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 28
- 230000008569 process Effects 0.000 description 24
- 238000011282 treatment Methods 0.000 description 21
- 238000001514 detection method Methods 0.000 description 20
- 238000002161 passivation Methods 0.000 description 19
- 230000000873 masking effect Effects 0.000 description 15
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 description 13
- MCMSPRNYOJJPIZ-UHFFFAOYSA-N cadmium;mercury;tellurium Chemical compound [Cd]=[Te]=[Hg] MCMSPRNYOJJPIZ-UHFFFAOYSA-N 0.000 description 13
- 238000007517 polishing process Methods 0.000 description 12
- 239000002344 surface layer Substances 0.000 description 11
- 229910052715 tantalum Inorganic materials 0.000 description 10
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 10
- 238000012545 processing Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 230000007797 corrosion Effects 0.000 description 7
- 238000005260 corrosion Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- 230000009467 reduction Effects 0.000 description 7
- 238000000926 separation method Methods 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000003518 caustics Substances 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 238000011946 reduction process Methods 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- 238000010998 test method Methods 0.000 description 3
- 241000587161 Gomphocarpus Species 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 150000002343 gold Chemical class 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000001235 sensitizing effect Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XSOKHXFFCGXDJZ-UHFFFAOYSA-N telluride(2-) Chemical compound [Te-2] XSOKHXFFCGXDJZ-UHFFFAOYSA-N 0.000 description 1
- 238000012956 testing procedure Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Radiation Pyrometers (AREA)
- Light Receiving Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8361076A JPS5310293A (en) | 1976-07-15 | 1976-07-15 | Method and device for producing plural infrared ray detectors |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8361076A JPS5310293A (en) | 1976-07-15 | 1976-07-15 | Method and device for producing plural infrared ray detectors |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5310293A JPS5310293A (en) | 1978-01-30 |
| JPS627718B2 true JPS627718B2 (enrdf_load_stackoverflow) | 1987-02-18 |
Family
ID=13807245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8361076A Granted JPS5310293A (en) | 1976-07-15 | 1976-07-15 | Method and device for producing plural infrared ray detectors |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5310293A (enrdf_load_stackoverflow) |
-
1976
- 1976-07-15 JP JP8361076A patent/JPS5310293A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5310293A (en) | 1978-01-30 |
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