JPS6276582A - Apparatus and method for adjusting optical axis of laser oscillator - Google Patents
Apparatus and method for adjusting optical axis of laser oscillatorInfo
- Publication number
- JPS6276582A JPS6276582A JP21592385A JP21592385A JPS6276582A JP S6276582 A JPS6276582 A JP S6276582A JP 21592385 A JP21592385 A JP 21592385A JP 21592385 A JP21592385 A JP 21592385A JP S6276582 A JPS6276582 A JP S6276582A
- Authority
- JP
- Japan
- Prior art keywords
- laser oscillator
- laser
- optical axis
- adjustment
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/025—Constructional details of solid state lasers, e.g. housings or mountings
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、電子写真方式印刷装置のレーザ発振器の光軸
調整装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an optical axis adjustment device for a laser oscillator of an electrophotographic printing apparatus.
電子写真方式印刷装置にはレーザ発振器とレ−ザビーム
を整形するための光学室が備えてあり、整形されたレー
ザビームにより、静電潜像を形成し、文字、図形等を印
刷している。所要のレーザビームを得るためには、前記
光学室内に備えたレンズ等の位置が高精度に設定され、
それぞれのレンズ間で、レンズを通過するレーザビーム
の通路（以下光軸と称す）が歪められぬようにする必要
がある。一方、レーザ発振器は、文字通りレーザビーム
を発生させる装置であり、レーザ発振器から発生するレ
ーザビームの光軸は、前記光学室内のレンズ設定以上に
高精度に設定されなければならない。The electrophotographic printing apparatus is equipped with a laser oscillator and an optical chamber for shaping the laser beam, and the shaped laser beam forms an electrostatic latent image to print characters, figures, etc. In order to obtain the required laser beam, the positions of lenses etc. provided in the optical chamber are set with high precision,
It is necessary to ensure that the path of the laser beam passing through the lenses (hereinafter referred to as the optical axis) is not distorted between the respective lenses. On the other hand, a laser oscillator is literally a device that generates a laser beam, and the optical axis of the laser beam generated from the laser oscillator must be set with higher precision than the lens setting in the optical chamber.
レーザ発振器はレーザビームを発生させる共振Ｒ：÷と
、共振器を保護支持するケースから々す、共振器とケー
スは弾性部材で支持されている。このため、共振器から
発生したレーザビームをケース基準面から高精度に位置
決めすることは困１雁だった。The laser oscillator has a resonance R which generates a laser beam, and a case which protects and supports the resonator.The resonator and the case are supported by an elastic member. For this reason, it has been difficult to position the laser beam generated from the resonator with high precision from the case reference plane.
一方、レーザ発振器を受は入れる印刷装置のレーザ発振
器光軸調整機構は、第１図、第２図に示す構成で、レー
ザ発振器１底部に固定されたＬ形プレート■の穴および
溝を利用し、３本のＢ３ ｇポルトルで調整する構造で
あった。On the other hand, the laser oscillator optical axis adjustment mechanism of the printing device that receives the laser oscillator has the configuration shown in Figs. , the structure was adjusted by three B3 g portols.
従来方式の欠点を述べる前に、前記レーザ発振器光軸調
整機構の構成について第１図、第２図を使い説明する。Before describing the drawbacks of the conventional system, the configuration of the laser oscillator optical axis adjustment mechanism will be explained using FIGS. 1 and 2.
印刷装置の光学ペースＢに固定ナツト１４により固定さ
れた３本の調整ポル）１３がレーザ発振器１のＬ形プレ
ー）１１の穴中心、溝中心に一致して取り付けられてい
る。調整ボルト２の他端には、固定ボルト必用のネジ穴
が加工されており、固定ボルト１５によりＬ形プレート
ｎを固定する。Three adjustment poles (13) fixed to the optical plate (B) of the printing device by fixing nuts (14) are attached so as to coincide with the hole centers and groove centers of the L-shaped plate (11) of the laser oscillator (1). The other end of the adjustment bolt 2 is provided with a threaded hole for a fixing bolt, and the L-shaped plate n is fixed with a fixing bolt 15.
前記構成において、レーザ発振器の光軸調整は第１図、
第２図中２，７方向の調整で完了する。In the above configuration, the optical axis adjustment of the laser oscillator is as shown in FIG.
The adjustment is completed by adjusting in directions 2 and 7 in Figure 2.
まず、ν方向の調整は、３コの固定ナツト１４をゆるめ
、３コの調整ポル）３３で行う。３コの調整ボルト１２
を回転させ、光軸の水平度調整後、３コの固定ナツト１
４をしめて完了する。次にＬ形プレート■の穴と溝を利
用し、穴及び溝のガタの範囲でレーザ発振器を２方向に
移動させ、光軸の方向調整を行う。χ方向調整後、固定
ボルト１５によりＬ形プレート■を［、！ｉｌｌ定し、
Ｚ、）方向光軸の調整が完了する。First, adjustment in the ν direction is performed by loosening the three fixing nuts 14 and using the three adjusting holes 33. 3 adjustment bolts 12
After adjusting the horizontality of the optical axis by rotating the
Complete step 4. Next, the laser oscillator is moved in two directions using the holes and grooves of the L-shaped plate (2) within the range of play in the holes and grooves, and the direction of the optical axis is adjusted. After adjusting the χ direction, fix the L-shaped plate ■ with the fixing bolt 15 [,! ill determine,
Z, ) direction optical axis adjustment is completed.
前記の如き、従来のレーザ発振器光軸調整機構は、３コ
の調整ポル１２を動かすことにより、光軸の水平度が確
保できるが、絶対高さの基準となるものがなく、レーザ
発振器が交換されると、基準を見失うという欠点を有し
ていた。さらに、１方向調整をレーザ発振器底部に固定
されたＬ形プレート■の穴及び冑で行うため、レーザ発
振器の微調整が困難であるばかりでなく、水平調整と同
様、絶対位置の基準となるものを見失いやすかった。As mentioned above, the conventional laser oscillator optical axis adjustment mechanism can ensure the horizontality of the optical axis by moving the three adjustment poles 12, but there is no absolute height reference, and the laser oscillator has to be replaced. This has the disadvantage of losing sight of the standard. Furthermore, since one-directional adjustment is performed using the hole and the helmet of the L-shaped plate fixed to the bottom of the laser oscillator, not only is it difficult to make fine adjustments to the laser oscillator, but also it is difficult to make fine adjustments to the laser oscillator. It was easy to lose track of it.
本発明の目的は、上記した従来技術の欠点をなくし、レ
ーザ発振器の光軸位置を高精度に設定し、併せて、光軸
位置調整を簡便にすることである〔発明の桔要〕
本発明は、レーザ光軸を３次元空間に存在する直線と仮
定し、所要の直線を得るには、直線の通る点と直線の傾
きを指定すればよい点に着目し、レーザ発振器の出射側
には光軸の通る位置を指定する調整部材としてのアジャ
ストボールを、また、レーザ発振器にあって、重心位置
付近に光軸の傾きを指定する２プレート及びアジャスト
プレート分設定し、これらの関係を工夫したものである
〔発明の実施例〕
本発明の一実施例を第３図、第４図、第５図に示す。An object of the present invention is to eliminate the drawbacks of the prior art described above, to set the optical axis position of a laser oscillator with high precision, and to simplify the adjustment of the optical axis position. [Summary of the Invention] The present invention assumes that the laser optical axis is a straight line that exists in three-dimensional space, and focuses on the fact that to obtain the desired straight line, it is only necessary to specify the point through which the straight line passes and the slope of the straight line. An adjustment ball is used as an adjustment member to specify the position where the optical axis passes, and two plates and an adjustment plate are set near the center of gravity of the laser oscillator to specify the inclination of the optical axis, and the relationship between these is devised. [Embodiment of the Invention] An embodiment of the present invention is shown in FIGS. 3, 4, and 5.
レーザ発振器■のレーザ出力側にあり、その外周が光軸
と一致するように設定された中空円筒状の調整部材であ
るアジャストボール乞が、ネジ乙によりレーザ発振器ケ
ース２４に取り付けられている。前記アジャストボール
２２は印刷装置光学室壁２５に圧入された球面すべり軸
受２６により可回転可摺動に支持されている。一方、レ
ーザ発振器ケース胴の底部には、レーザ発振器の重心位
置付近において、光軸と垂直に設定されたアジャストプ
レ−ト２７が、ネジ３により取り付けられている。前記
アジャストプレート刀はネジ四により２プレート加に固
定され、２ブレー１−３０はその両端がレーザスタンド
３１のガイド溝羽により可摺動に支持され、ネジおによ
り固定されている。レーザスタンド３１は光学室が塔載
されている図示なき印刷機構部のフレームに固定されて
いる。前記レーザスタンド３１には調整ネジあがあり、
２プレート３０の一端を支持している。An adjustment ball, which is a hollow cylindrical adjustment member located on the laser output side of the laser oscillator (1) and whose outer periphery is set to coincide with the optical axis, is attached to the laser oscillator case 24 with a screw (2). The adjustment ball 22 is rotatably and slidably supported by a spherical slide bearing 26 press-fitted into the wall 25 of the optical chamber of the printing apparatus. On the other hand, an adjustment plate 27 set perpendicular to the optical axis is attached to the bottom of the laser oscillator case body by screws 3 near the center of gravity of the laser oscillator. The adjustment plate blade is fixed to the two plates by screws 4, and the two brakes 1-30 are slidably supported at both ends by the guide groove blades of the laser stand 31, and are fixed by screws. The laser stand 31 is fixed to a frame of a printing mechanism (not shown) on which an optical chamber is mounted. The laser stand 31 has an adjustment screw,
2 supports one end of the plate 30.
前記構成において、ネジおをゆるめ、調整ネジＭを右、
まだは、左に回すと、レーザ発振器４は、それを支持す
る２プレート３０ごと、レーザスタンド３１のガイド溝
３２にならい上下に動く。本調整時、レーザ発振器２１
の出力端に固定されたアジャストボール匹に曲げ力が加
わらぬよう光学室壁２５に圧入された球面すべり軸受届
で支持し、レーザ発振器２１の傾きに追従するようにし
である。前記の如く、調整ネジＵによりν方向調整終了
後ネジおを締め乙プレート（至）をレーザスタンド３１
に固定する。In the above configuration, loosen the screw O, turn the adjustment screw M to the right,
If it is still turned to the left, the laser oscillator 4 moves up and down along with the two plates 30 that support it, following the guide groove 32 of the laser stand 31. During this adjustment, the laser oscillator 21
The adjustment ball fixed to the output end of the laser oscillator 21 is supported by a spherical slide bearing press-fitted into the optical chamber wall 25 so as not to apply bending force, and is configured to follow the inclination of the laser oscillator 21. As mentioned above, after completing the adjustment in the ν direction with the adjustment screw U, tighten the screw O and attach the plate O to the laser stand 31.
Fixed to.
さらに、２方向を調整するには、ネジ２９をゆるめ、ア
ジャストプレート２７のｕ溝３５とＺプレート３０の丸
穴あに第４．５図の如く偏心治具ｇを挿入し、回転させ
ることにより実現できる。前記固定された２プレート３
０に、レーザ発振器２１が支持された状態でアジャスト
プレート２７はレーザ発振器２１ごと２方向に動く。な
お、レーザ発振器２１のほとんどの荷重は、２プレート
（９）により支持されている。Furthermore, to adjust in two directions, loosen the screw 29, insert the eccentric jig g into the U groove 35 of the adjustment plate 27 and the round hole of the Z plate 30 as shown in Fig. 4.5, and rotate it. realizable. the fixed two plates 3
0, with the laser oscillator 21 supported, the adjustment plate 27 moves in two directions together with the laser oscillator 21. Note that most of the load of the laser oscillator 21 is supported by the two plates (9).
本調整時も、アジャストボールｎが球面すべり軸受２６
で支持されているため、アジャストボール２２に曲げ力
が加わらないことは明白である。Even during the main adjustment, the adjustment ball n is connected to the spherical slide bearing 26.
It is clear that no bending force is applied to the adjustment ball 22 because it is supported by the adjustment ball 22.
前記の如く、２方向調整終了後ネジ四を締め、アジャス
トプレート！を２プレート□□□に固定し、レーザ発振
器２１の光軸調整が終了する。As mentioned above, after completing the two-way adjustment, tighten the fourth screw and adjust plate! is fixed to the second plate □□□, and the optical axis adjustment of the laser oscillator 21 is completed.
さらに、レーザ発振器ユ光軸位置の高−精度位置決め方
法について、第６図を用いて説明する。アジャストボー
ルｎ先端に、中心に微小大川を設けた芯合わせ治具Ｃを
かぶせる。このとき、微小大川はアジャストボール中心
軸と一致する。次にネジ詔をゆるめ、レーザ発振器■前
方に設定されたレーザパワー測定器４３ＶＣよりレーザ
パワーの（ｍｌＪ 定値が最大となるよう、アジャスト
ボール酋をレーザ発振器２１に対し２．）方向に微動さ
せる。レーザパワーの測定値が最大となった位置で、ネ
ジｎによりアジャストボールにを固定する。アジャスト
ボール４の形状を中空円筒とし、芯合わせ治具を用いる
ことにより、レーザ発振器凪光軸位曾とアジャストホー
ル乙外周とは数十ミクロンメータのオーダーで位置間−
ｖｆＳが確保できる。Furthermore, a method for highly accurate positioning of the optical axis position of the laser oscillator will be explained with reference to FIG. Cover the tip of the adjustment ball n with the centering jig C, which has a small large river in the center. At this time, the small large river coincides with the center axis of the adjustment ball. Next, loosen the screw and slightly move the adjustment ball in the direction 2. relative to the laser oscillator 21 so that the laser power (mlJ) constant value is maximized using the laser power measuring device 43VC set in front of the laser oscillator 21. At the position where the measured value of laser power is maximum, fix it to the adjustment ball with screw n. By making the shape of the adjustment ball 4 a hollow cylinder and using a centering jig, the position between the laser oscillator's light axis position and the adjustment hole's outer circumference is on the order of several tens of micrometers.
vfS can be secured.
第５図、アジャストプレート２７のＵ字溝中心と、レー
ザ発振器２１の光軸を一致させておけば、レーザ発振器
２１の光軸調整時、２方向調整が不要となり、さらに光
軸調整が容易となる。If the center of the U-shaped groove of the adjustment plate 27 and the optical axis of the laser oscillator 21 are aligned as shown in FIG. Become.
また、本実施例は箱形レーザ発振器について説明してい
るが、円柱形レーザ発振器についてもアジャストプレー
ト支持部形状を変えるだけで同様の効果が得られる。Furthermore, although this embodiment describes a box-shaped laser oscillator, similar effects can be obtained with a cylindrical laser oscillator by simply changing the shape of the adjustment plate support.
本発明によれば、アジャストボールを光軸に合わせ、レ
ーザ発振器ケースに固定するため、光軸位置設定を高精
度で行うことができる。According to the present invention, since the adjustment ball is aligned with the optical axis and fixed to the laser oscillator case, the optical axis position can be set with high precision.
さらに、上記アジャストボール及び球面すべり軸受によ
り、光軸の通る絶対位置が決定でき、また、２プレート
、アジャストプレートをχ方向、？方向に移動可能とし
、光軸の傾きを調整できるので、レーザ発振器の光軸位
置調整を簡便に行うことができる。Furthermore, the above-mentioned adjustment ball and spherical sliding bearing allow the absolute position of the optical axis to be determined, and the two adjustment plates can be moved in the χ direction, ? Since the inclination of the optical axis can be adjusted, the optical axis position of the laser oscillator can be easily adjusted.
第１図はレーザ発振器光軸調整機構の従来例側面図、第
２図はレーザ発振器光軸調整機構の従来例で、第１図の
ＡＡ横断面図、第３図は本発明になるレーザ発振器光軸
調整機構の平面図、第４図は第３図の部分縦断側面図、
第５図は第４図の側面図、第６図はし゛−ザ発振器光輔
の高精度設定方法の説明図である。
図において、２１はレーザ発振器、２２はアジャストボ
ール、２３はネジ、２６は球面すべり軸受、ｌはアジャ
ストプレート、２８ハネジ、２９はネジ、３０は２プレ
ート、３１はレーザスタンド、３２はガイド溝、おはネ
ジ、３４は調整ネジ、あはＵ溝、３６は丸穴、Ｉは偏心
治具である。
特許出願人の名称 日立工機株式会社米１国
土？口
／ＳFig. 1 is a side view of a conventional example of a laser oscillator optical axis adjustment mechanism, Fig. 2 is a conventional example of a laser oscillator optical axis adjustment mechanism, an AA cross-sectional view of Fig. 1, and Fig. 3 is a laser oscillator according to the present invention. A plan view of the optical axis adjustment mechanism, FIG. 4 is a partial longitudinal sectional side view of FIG. 3,
FIG. 5 is a side view of FIG. 4, and FIG. 6 is an explanatory diagram of a highly accurate setting method for the laser oscillator light beam. In the figure, 21 is a laser oscillator, 22 is an adjustment ball, 23 is a screw, 26 is a spherical sliding bearing, l is an adjustment plate, 28 is a screw, 29 is a screw, 30 is a 2-plate, 31 is a laser stand, 32 is a guide groove, O is a screw, 34 is an adjustment screw, A is a U groove, 36 is a round hole, and I is an eccentric jig. Name of patent applicant Hitachi Koki Co., Ltd. US 1 country? Mouth/S
Claims (1)
るレーザ発振器の出力端に、外周をレーザ光軸を基準と
して発振器本体に位置決めされ、その形状が中空円筒状
である調整部材を装着したことを特徴とするレーザ発振
器の光軸調整装置。 ２、前記調整部材を装置本体の所定の位置に可回転可摺
動に支持する球面すべり軸受と、レーザ発振器底部重心
位置付近に設けられ、偏心治具によりレーザの横方向移
動をさせるためのｕ溝を持つアジャストプレートと、レ
ーザ発振器のほぼ全重量を支持しながら前記アジャスト
プレートの横方向移動基準となる穴をもち、かつ、レー
ザの縦方向移動をさせるｚプレートと、前記ｚプレート
の移動方向を案内する溝をもち、ｚプレートを移動後固
定するためのネジ穴をもつレーザスタンドと、前記レー
ザスタンドの溝にならいｚプレートを微動させるための
調整ネジとからなり、レーザ発振器の光軸を所定の位置
に設定する特許請求の範囲第１項記載のレーザ発振器の
光軸調整装置。 ３、中空円筒状の調整部材外周と、レーザ発振器のレー
ザ光軸を高精度に一致させるため、中心にレーザビーム
径相当の微小穴を設けた芯合わせ治具を前記調整部材に
装着し、該微小穴を通過するレーザパワーを測定器で検
出し、レーザパワーが最大となる位置で前記調整部材を
レーザ発振器に位置決め固定してなるレーザ発振器の光
軸調整方法。[Claims] 1. At the output end of a laser oscillator having a resonator supported by a case via an elastic member, the outer periphery is positioned on the oscillator main body with the laser optical axis as a reference, and the shape is a hollow cylinder. An optical axis adjustment device for a laser oscillator, characterized in that a certain adjustment member is attached. 2. A spherical sliding bearing that rotatably and slidably supports the adjustment member at a predetermined position on the main body of the device, and a u provided near the center of gravity at the bottom of the laser oscillator to move the laser in the lateral direction using an eccentric jig. an adjustment plate having a groove, a z-plate having a hole that serves as a reference for lateral movement of the adjustment plate while supporting almost the entire weight of the laser oscillator, and allowing the laser to move in the vertical direction; The optical axis of the laser oscillator is adjusted to An optical axis adjustment device for a laser oscillator according to claim 1, wherein the optical axis adjustment device is set at a predetermined position. 3. In order to align the outer periphery of the hollow cylindrical adjustment member with the laser optical axis of the laser oscillator with high precision, a centering jig with a microhole equivalent to the diameter of the laser beam in the center is attached to the adjustment member, and A method for adjusting an optical axis of a laser oscillator, comprising detecting the laser power passing through a microhole with a measuring device, and positioning and fixing the adjustment member to the laser oscillator at a position where the laser power is maximum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60215923A JPH0640594B2 (en) | 1985-09-27 | 1985-09-27 | Optical axis adjusting device and adjusting method for laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60215923A JPH0640594B2 (en) | 1985-09-27 | 1985-09-27 | Optical axis adjusting device and adjusting method for laser oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6276582A true JPS6276582A (en) | 1987-04-08 |
| JPH0640594B2 JPH0640594B2 (en) | 1994-05-25 |
Family
ID=16680497
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60215923A Expired - Lifetime JPH0640594B2 (en) | 1985-09-27 | 1985-09-27 | Optical axis adjusting device and adjusting method for laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0640594B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0629551U (en) * | 1992-09-28 | 1994-04-19 | 城田鉄工株式会社 | Slowdown |
| WO2014141511A1 (en) * | 2013-03-12 | 2014-09-18 | 大日本スクリーン製造株式会社 | Printing device and placement position-adjusting method therefor |
| WO2016075806A1 (en) * | 2014-11-14 | 2016-05-19 | ギガフォトン株式会社 | Band-narrowing module, band-narrowing laser device, and method for positioning band-narrowing module |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5010120A (en) * | 1973-05-25 | 1975-02-01 | ||
| JPS5663071U (en) * | 1979-10-22 | 1981-05-27 | ||
| JPS58127391A (en) * | 1982-01-25 | 1983-07-29 | Ushio Inc | Adjusting method for mirror optical axis of internal mirror type laser tube |
| JPS605578A (en) * | 1984-05-30 | 1985-01-12 | Matsushita Electric Ind Co Ltd | Output coupling mirror |
-
1985
- 1985-09-27 JP JP60215923A patent/JPH0640594B2/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5010120A (en) * | 1973-05-25 | 1975-02-01 | ||
| JPS5663071U (en) * | 1979-10-22 | 1981-05-27 | ||
| JPS58127391A (en) * | 1982-01-25 | 1983-07-29 | Ushio Inc | Adjusting method for mirror optical axis of internal mirror type laser tube |
| JPS605578A (en) * | 1984-05-30 | 1985-01-12 | Matsushita Electric Ind Co Ltd | Output coupling mirror |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0629551U (en) * | 1992-09-28 | 1994-04-19 | 城田鉄工株式会社 | Slowdown |
| WO2014141511A1 (en) * | 2013-03-12 | 2014-09-18 | 大日本スクリーン製造株式会社 | Printing device and placement position-adjusting method therefor |
| JP2014172350A (en) * | 2013-03-12 | 2014-09-22 | Dainippon Screen Mfg Co Ltd | Printing device and method for adjusting arrangement position thereof |
| WO2016075806A1 (en) * | 2014-11-14 | 2016-05-19 | ギガフォトン株式会社 | Band-narrowing module, band-narrowing laser device, and method for positioning band-narrowing module |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0640594B2 (en) | 1994-05-25 |
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