JPS6276533U - - Google Patents
Info
- Publication number
- JPS6276533U JPS6276533U JP16862185U JP16862185U JPS6276533U JP S6276533 U JPS6276533 U JP S6276533U JP 16862185 U JP16862185 U JP 16862185U JP 16862185 U JP16862185 U JP 16862185U JP S6276533 U JPS6276533 U JP S6276533U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- lid
- opening
- centrifugal dehydration
- dehydration section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 230000018044 dehydration Effects 0.000 claims 2
- 238000006297 dehydration reaction Methods 0.000 claims 2
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16862185U JPS6276533U (enExample) | 1985-10-30 | 1985-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16862185U JPS6276533U (enExample) | 1985-10-30 | 1985-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6276533U true JPS6276533U (enExample) | 1987-05-16 |
Family
ID=31101667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16862185U Pending JPS6276533U (enExample) | 1985-10-30 | 1985-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6276533U (enExample) |
-
1985
- 1985-10-30 JP JP16862185U patent/JPS6276533U/ja active Pending
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