JPS6276248A - Electron beam scanning type analyzing device - Google Patents

Abstract

PURPOSE:To improve the operationability considerably by automatically examining the size of the portion to be enlarged then setting the magnification such that said portion will be displayed just fully onto a CRT thus displaying an enlarged image again. CONSTITUTION:A computer CPU will control a scanning circuit SC to perform scanning on the sample face and the screen of CRT synchronously thus to image display the output data from a detector D onto the CRT while to store in a memory M. Upon specification at a point on the CRT by means of a light pen L, CRT will detect the co-ordonates at the specified point to perform the magnification determining operation necessary for displaying an enlarged image again thus to control the scanning circuit SC on the basis of the determined magnification and to display an enlarged image onto CRT. Consequently, the specified portion is displayed automatically while being enlarged fully onto the screen of CRT resulting in considerable improvement of the operationability.

Description

DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention relates to a device for specifying and enlarging an arbitrary part of an image displayed on a CRT in an electron beam microanalyzer or a scanning electron microscope. .

2. Description of the Related Art There has been a conventional device for specifying, with a light pen, etc., a portion to be enlarged and re-displayed on an image scanned by an electron beam microanalyzer or the like displayed on a CRT.

However, with this conventional device, the area that is enlarged and displayed is limited to a certain range around a specified point on the image, so the enlarged image of the area that you want to enlarge may extend beyond the CRT screen.
On the contrary, there were many cases where there was a margin around the part to be observed on the CRT screen, which meant that it was possible to enlarge the area for observation. In some cases, it has been possible to change the area to be enlarged, but this has to be done manually, making the operation cumbersome.

C. Problem to be solved by the invention When specifying a part of a scanned image displayed on a CRT and redisplaying it in an enlarged manner, the size of the part to be enlarged is automatically checked and the part is exactly By setting the magnification so that the CRT screen fills the entire screen, the portion to be enlarged and redisplayed is enlarged and displayed on the CRT in just the right amount and not too much, without any operational effort.

2. Means for solving the problem Figure 1 shows an image of the sample surface displayed on a CRT, and it is assumed that it is desired to enlarge and display the portion of Q that is different from the surrounding area on this image. C
A frame 7 containing Q is set on the RT image, and the area of the portion Q included in this frame is detected. When frame F is expanded or contracted in this way, while part Q protrudes from frame F as shown in the figure, by enlarging the frame, the area of part Q included in the frame will be expanded.

On the other hand, if frame F is too wide than portion Q, the area of Q within the frame will not change even if the frame is expanded or contracted.

Based on this, frame F can be expanded or contracted to examine changes in the area of part Q within the frame. For example, if the area of part Q increases as the frame is enlarged, then Q
The enlargement of the frame is stopped when the area of the image becomes unchanged, and the frame at that time is displayed on the CRT as the display range when enlarged again.

E. The area of the effect Q can be determined by level selection of the image data to determine whether a point on the image belongs to Q, so the above-mentioned operation can be automatically performed to automate the enlarged re-display operation.

Embodiment FIG. 2 is a flowchart showing the operation of an apparatus according to an embodiment of the present invention. The sample surface is scanned with an electron beam to collect image data, which is stored in a memory (a) and is visualized and displayed on a CRT.

Set the judgment level based on the image data of the point (c)
However, there is image data that is higher (when the specified area is brighter than the surrounding area) or lower (when the specified area is darker than the surrounding area) than the standard deviation judgment level centered on the specified point on the CRT. Count the number of addresses (e), then enlarge the frame from the standard frame above, and count the number of addresses ())l, in the same way as step (e), until the number of addresses is (e). Determine whether it has increased by more than the step (a).

The meaning of the above operation is to set a frame indicating the range to be enlarged on the CR7 screen in step (), check the number of addresses, or area, of the part you want to enlarge within that frame, and if the part you want to enlarge is If it extends beyond the set frame, when you enlarge the frame in step (g), the protruding part will come into the frame, so the address count in step (g) will increase and the part you want to enlarge will be expanded. If all of the addresses fit within the frame, the address count will not increase even if the frame is enlarged, so (
The force step determines whether the initially set frame completely includes the part you want to enlarge, but whether the part you want to enlarge protrudes from the frame. (The area remains unchanged with force steps. In other words, if the initially set frame is too large compared to the part you want to enlarge, the movement goes from (man's step to (su) step. (su) sets the frame first.) This means that the address count will be too much as in step (E), so the operation returns to step (S) and further reduces the frame. Since the frame set in step (a) was already too small, the operation goes to the QO step, enlarges the frame and counts the addresses, then looks at the area in step (a) and if the area remains unchanged, calculates the area ratio according to the request. Then, in the next step (b), the magnification of the electron beam microanalyzer is set so that the frame set in the QO step matches the screen frame of the CRT, and the enlarged image is displayed on the CRT (→).

When the frame is enlarged in the step (to), if it is determined that the area has become larger in the (man's step), the operation immediately goes to the QO step, further enlarges the frame, and the following (3) (c) (Proceed with effect.

FIG. 3 shows an outline of an apparatus according to an embodiment of the present invention, where E is an electron beam, S is a sample, and X and Y are deflection coils that deflect the electron beam in both the X and Y directions to scan the sample surface. . D is a detector that detects secondary electrons etc. emitted from the sample S. The CPU is a computer that controls the entire device, and controls the scanning circuit SC to synchronously scan the sample surface and the CRT screen, display the output data of the detector as an image on the CRT, and store it in the memory. Store in M.

When you specify a point on the CRT with the light pen L, the CPU detects the coordinates of the specified point, performs the magnification determination operation for enlarged re-display, and based on the determined magnification, the scanning circuit S
C, the scanning range on the sample is reduced around the specified point, and an enlarged image is displayed on the CRT.

G. Effect According to the present invention, when an enlarged display is performed, the enlarged T is enlarged to fill the entire screen, and the operability is significantly improved.

[Brief explanation of drawings]

FIG. 1 is a diagram explaining the present invention in detail, FIG. 2 is a flowchart of the operation of an embodiment of the present invention, and FIG. 3 is a diagram showing an outline of the apparatus of the embodiment. Agent: Patent Attorney Kosuke Agata■ ■

Claims (1)

[Claims] Means for setting a standard frame centered on a designated point on a CRT screen; Means for detecting the area of a specific pattern on the CRT screen including the designated point; means for detecting a change in the area of the specific pattern included in the same frame at the time; means for detecting the size of the frame when the area changes from expanding to unchanged in the process of changing the frame from small to large; An electron beam scanning analyzer comprising: means for setting a magnification based on the size of the detected frame.