JPS6275825U - - Google Patents

Info

Publication number
JPS6275825U
JPS6275825U JP16901285U JP16901285U JPS6275825U JP S6275825 U JPS6275825 U JP S6275825U JP 16901285 U JP16901285 U JP 16901285U JP 16901285 U JP16901285 U JP 16901285U JP S6275825 U JPS6275825 U JP S6275825U
Authority
JP
Japan
Prior art keywords
gas purification
cartridge
gas
purification device
mounting base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16901285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16901285U priority Critical patent/JPS6275825U/ja
Publication of JPS6275825U publication Critical patent/JPS6275825U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gas Separation By Absorption (AREA)
JP16901285U 1985-10-31 1985-10-31 Pending JPS6275825U (ref)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16901285U JPS6275825U (ref) 1985-10-31 1985-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16901285U JPS6275825U (ref) 1985-10-31 1985-10-31

Publications (1)

Publication Number Publication Date
JPS6275825U true JPS6275825U (ref) 1987-05-15

Family

ID=31102424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16901285U Pending JPS6275825U (ref) 1985-10-31 1985-10-31

Country Status (1)

Country Link
JP (1) JPS6275825U (ref)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020522122A (ja) * 2017-06-02 2020-07-27 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ ゲッターを備えたアニールチャンバ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5465171A (en) * 1977-11-02 1979-05-25 Jgc Corp Catalytic reactor
JPS59189924A (ja) * 1983-04-09 1984-10-27 Shimizu Constr Co Ltd 脱臭装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5465171A (en) * 1977-11-02 1979-05-25 Jgc Corp Catalytic reactor
JPS59189924A (ja) * 1983-04-09 1984-10-27 Shimizu Constr Co Ltd 脱臭装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020522122A (ja) * 2017-06-02 2020-07-27 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ ゲッターを備えたアニールチャンバ

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