JPS6273539U - - Google Patents

Info

Publication number
JPS6273539U
JPS6273539U JP16280485U JP16280485U JPS6273539U JP S6273539 U JPS6273539 U JP S6273539U JP 16280485 U JP16280485 U JP 16280485U JP 16280485 U JP16280485 U JP 16280485U JP S6273539 U JPS6273539 U JP S6273539U
Authority
JP
Japan
Prior art keywords
sample
moving table
electron beam
moving
sample holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16280485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16280485U priority Critical patent/JPS6273539U/ja
Publication of JPS6273539U publication Critical patent/JPS6273539U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP16280485U 1985-10-25 1985-10-25 Pending JPS6273539U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16280485U JPS6273539U (enrdf_load_stackoverflow) 1985-10-25 1985-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16280485U JPS6273539U (enrdf_load_stackoverflow) 1985-10-25 1985-10-25

Publications (1)

Publication Number Publication Date
JPS6273539U true JPS6273539U (enrdf_load_stackoverflow) 1987-05-11

Family

ID=31090413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16280485U Pending JPS6273539U (enrdf_load_stackoverflow) 1985-10-25 1985-10-25

Country Status (1)

Country Link
JP (1) JPS6273539U (enrdf_load_stackoverflow)

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