JPS6273534U - - Google Patents

Info

Publication number
JPS6273534U
JPS6273534U JP16392585U JP16392585U JPS6273534U JP S6273534 U JPS6273534 U JP S6273534U JP 16392585 U JP16392585 U JP 16392585U JP 16392585 U JP16392585 U JP 16392585U JP S6273534 U JPS6273534 U JP S6273534U
Authority
JP
Japan
Prior art keywords
susceptor
segments
semiconductor substrate
utility
combination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16392585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16392585U priority Critical patent/JPS6273534U/ja
Publication of JPS6273534U publication Critical patent/JPS6273534U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP16392585U 1985-10-25 1985-10-25 Pending JPS6273534U (US06272168-20010807-M00014.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16392585U JPS6273534U (US06272168-20010807-M00014.png) 1985-10-25 1985-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16392585U JPS6273534U (US06272168-20010807-M00014.png) 1985-10-25 1985-10-25

Publications (1)

Publication Number Publication Date
JPS6273534U true JPS6273534U (US06272168-20010807-M00014.png) 1987-05-11

Family

ID=31092573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16392585U Pending JPS6273534U (US06272168-20010807-M00014.png) 1985-10-25 1985-10-25

Country Status (1)

Country Link
JP (1) JPS6273534U (US06272168-20010807-M00014.png)

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