JPS6273025A - Method for controlling indoor pressure - Google Patents
Method for controlling indoor pressureInfo
- Publication number
- JPS6273025A JPS6273025A JP60211080A JP21108085A JPS6273025A JP S6273025 A JPS6273025 A JP S6273025A JP 60211080 A JP60211080 A JP 60211080A JP 21108085 A JP21108085 A JP 21108085A JP S6273025 A JPS6273025 A JP S6273025A
- Authority
- JP
- Japan
- Prior art keywords
- air
- room
- clean room
- pressure
- wind speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/0001—Control or safety arrangements for ventilation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/0001—Control or safety arrangements for ventilation
- F24F2011/0002—Control or safety arrangements for ventilation for admittance of outside air
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/0001—Control or safety arrangements for ventilation
- F24F2011/0002—Control or safety arrangements for ventilation for admittance of outside air
- F24F2011/0004—Control or safety arrangements for ventilation for admittance of outside air to create overpressure in a room
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2110/00—Control inputs relating to air properties
- F24F2110/40—Pressure, e.g. wind pressure
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
この発明はクリーンルーム、バイオクリーンルーム、エ
アドーム、恒温恒湿室等における室内圧力制御方法に関
するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an indoor pressure control method in a clean room, bio-clean room, air dome, constant temperature and constant humidity room, etc.
［従来の技術１
一般に、この種の施設たとえばクリーンルームにおいて
は、ｌ１ｌｌＴ’、前室、準清浄作業室、高清浄作業室
等に各室の清浄度に応じて順次０．５〜３．０ｍｎ＋Ａ
ｑ程度の微小な差圧をつける必要があり、これを実現す
るために従来は、室への給気量と室からの排気量とに適
度な差がつくようにあらかじめ設定しておき、この設定
された給排気組着を自刃式差圧調整ダンパで調整するこ
とにより室内圧力を一定に保つことによって所定の差圧
を得ようとする方法と、差圧を検知するダイヤフラム式
の圧力センサを使用して室への給気量または室からの排
気量を制御し、この給気９または排気量の制御により室
内圧力を一定に保つことによって所定の差ｆｆを得よう
とする方法とがあった。[Prior art 1] In general, in this type of facility, for example, a clean room, 0.5 to 3.0 m
It is necessary to create a minute pressure difference on the order of There is a method that attempts to obtain a predetermined differential pressure by keeping the indoor pressure constant by adjusting the set supply and exhaust assembly with a self-blade differential pressure adjustment damper, and a diaphragm-type pressure sensor that detects the differential pressure. There is a method that attempts to obtain a predetermined difference ff by controlling the amount of air supplied to the room or the amount of exhaust air from the room by using a Ta.
［発明が解決しようとする問題点］
しかしながら、このような従来の室内圧力制御方法には
、前者はドアの開閉やフィルタの汚れに起因した圧力損
失の増大等の圧力変動による影響を吸収するために自刃
式差圧調整ダンパが付設されるが、自刃式差圧調整ダン
パによって微小な差圧を調整することはきわめ−Ｃ困難
であるし、また大きな圧力変動を吸収することも困難で
あり、ざらに空ごとの圧力設定の段階が多い場合には各
差圧が小ざくなりすぎて自刃式差圧調整ダンパが作動不
能となったり各自刃式差圧調整ダンパがｑいにハンチン
グを起したつづる。また後者は測定レンジが５０ｍｍＡ
ｑ程度の一般的な微差圧型１〔力センサでは分解能が最
小ｉ ｌ１ｆｆｌＡ（ｌ程度であるため、このままでは
０．５〜３．０ｎｍＡｑ程度の差圧が必要なりリーンル
ームの室内圧力制御には使用することができず、また測
定レンジがＯ〜５ ｎ＋ｎ＋Ａｑ程度の高精度の微差圧
センサもあるが、この微差圧センサの基本原理はダイレ
フラム式の圧力センサを特殊化、精密化したものであっ
て、きわめて高価であるうえ信頼性、耐久性に難点があ
り、したがって前者、後者いずれも種々の問題点があっ
た。[Problems to be Solved by the Invention] However, such conventional indoor pressure control methods have problems in that the former method absorbs the effects of pressure fluctuations such as increased pressure loss caused by opening and closing of doors and dirty filters. A self-cutting type differential pressure adjustment damper is attached to the machine, but it is extremely difficult to adjust minute differential pressures with a self-cutting type differential pressure adjustment damper, and it is also difficult to absorb large pressure fluctuations. If there are many stages of pressure setting for each air, each differential pressure becomes too small and the self-blade differential pressure adjustment damper becomes inoperable, or each self-blade differential pressure adjustment damper causes excessive hunting. Spell. The latter has a measurement range of 50mmA.
A typical differential pressure type 1 force sensor has a minimum resolution of about 11fflA (1), so a differential pressure of about 0.5 to 3.0 nmAq is required as it is, and for indoor pressure control in a lean room. There is also a high-precision micro-differential pressure sensor that cannot be used and has a measurement range of O to 5 n+n+Aq, but the basic principle of this micro-differential pressure sensor is a specialized and more precise version of the direflam-type pressure sensor. However, they are extremely expensive and have drawbacks in reliability and durability.Therefore, both the former and the latter have various problems.
この発明は上記従来のもののもつ問題点を解決して、室
内の圧力を高精度にかつ安価に、しかも高い信頼性をも
って制御することのできる室内圧力制御方法を提供する
ことを目的とするものである。The object of the present invention is to solve the problems of the conventional methods described above and to provide an indoor pressure control method that can control indoor pressure with high precision, low cost, and high reliability. be.
Ｕ問題点を解決するための手段」
この発明は上記目的を達成づ°るため、室の隔壁に通風
管を設けてこの通風管内に風速センナを配置し、前記風
速センサによって前記通風管を流れる空気の風速を検出
し、得られた風速に基づいて前記室に及ぼす風Ｍを調節
し、この風刊調節によって前記室内の圧力を制御するも
のである。Means for Solving Problem U" In order to achieve the above object, the present invention provides a ventilation pipe in the partition wall of the room, arranges a wind speed sensor in the ventilation pipe, and uses the wind speed sensor to control the flow of air through the ventilation pipe. The wind speed of the air is detected, the wind M exerted on the chamber is adjusted based on the obtained wind speed, and the pressure inside the chamber is controlled by this wind speed adjustment.
［作 用１
この発明は上記手段を採用したことにより、風速センサ
の検出した風速が一定となるように凪ケを調節すれば卒
内の圧力が一定に保たれることとなる。[Function 1] This invention employs the above-mentioned means, so that if the calm air is adjusted so that the wind speed detected by the wind speed sensor remains constant, the pressure inside the wind can be kept constant.
［実施例］ 以下、図面に示すこの発明の実施例について説明する。[Example] Embodiments of the invention shown in the drawings will be described below.
第１．２図はこの発射による室内圧力制御方法を実施す
るための装置の一例を示し、１はクリーンルームの清浄
室、２はクリーンルームの前室、３は清浄室１の一側た
とえば天井に設置された給気部材、４は清浄室１の他側
たとえば床に設置された排気部材、５は給気部材３およ
び排気部材４に給気管６および排気管７をそれぞれ介し
て接続された空調器、８は給気管６に設けられたモータ
ダンパである。９は清浄室１と前空２とを仕切る隔壁、
１０は隔壁９に設けられた通風管であって、第２図に示
寸ように、通風管１０の両端には通風管１０内の流れが
乱れないように人口゛」−ン１１および出口コーン１２
が設けられ、また通風管１０内には風速センサ１３が配
置され、Ｓｔ速はンサ１３は入口コーン１１内にｇ！Ｑ
置された本体１４および表示部１５とともに熱線式風速
Ｓ１を構成している。１６は風速センサ１３から得られ
た風速に基づいてモータダンパ８を開閉して清浄室１へ
の給気量を調節するコントローラである。Figure 1.2 shows an example of a device for carrying out this indoor pressure control method using firing, in which 1 is a clean room of a clean room, 2 is a front room of the clean room, and 3 is installed on one side of the clean room 1, for example, on the ceiling. 4 is an exhaust member installed on the other side of the clean room 1, for example, on the floor; 5 is an air conditioner connected to the air supply member 3 and the exhaust member 4 via an air supply pipe 6 and an exhaust pipe 7, respectively; , 8 is a motor damper provided in the air supply pipe 6. 9 is a partition wall that partitions the clean room 1 and the front space 2;
Reference numeral 10 denotes a ventilation pipe installed in the partition wall 9, and as shown in FIG. 12
In addition, a wind speed sensor 13 is arranged inside the ventilation pipe 10, and the sensor 13 is installed inside the inlet cone 11 to measure the speed St. Q
Together with the main body 14 and the display section 15 placed therein, it constitutes a hot wire type wind speed S1. 16 is a controller that opens and closes the motor damper 8 based on the wind speed obtained from the wind speed sensor 13 to adjust the amount of air supplied to the clean room 1.
つぎに上記のものの作用について説明する。Next, the operation of the above will be explained.
まず、清浄室１は前室２より高い圧力に保たれる必要が
あるため、給気部材３からの給気量が排気部材４からの
排気量を上回るようにモータダンパ８が所定の開度に設
定され、このとき清浄室１から前室２に向けて通風管１
０を流れる空気の風速は一定に保たれ、したがって風速
センサ１３の検出値も一定レベルに保たれる。つぎに、
たとえば清浄室１と前室２との間で人の出入り等があっ
て清浄室１内のかなり大量の空気が前室２へ流れ出ずど
、清浄室１と前室２との差圧が減少するため通風管１０
を流れる空気の風速は減速し、したがって風速センサ１
３の検出値が減少するためコントローラ１６がモータダ
ンパ８の開度を増大させて給気量を増量さゼ、それによ
り風速セン＋Ｈ３の検出値が所定レベルに復元するとモ
ータダンパ８がその時点の開度に設定される。また、た
とえば排気部材４に異物が詰って排気量が減少すると、
清浄室１内の圧力が高まるため通風管１０を流れる空気
の風速は増速し、したがって風速センサ１３の検出値が
増大するためコントローラ１らがモータダンパ８の開度
を減少させて給気室を減けさせ、それにより風速センサ
１３の検出値が所定レベルに復元するとモータダンパ８
がその時点のＲ度に設定される。First, since the clean chamber 1 needs to be maintained at a higher pressure than the front chamber 2, the motor damper 8 is adjusted to a predetermined opening degree so that the amount of air supplied from the air supply member 3 exceeds the amount of exhaust from the exhaust member 4. At this time, ventilation pipe 1 is opened from clean room 1 to front room 2.
The wind speed of the air flowing through the air is kept constant, and therefore the detection value of the wind speed sensor 13 is also kept at a constant level. next,
For example, when people come and go between clean room 1 and front room 2, a considerable amount of air in clean room 1 does not flow into front room 2, but the differential pressure between clean room 1 and front room 2 decreases. Ventilation pipe 10
The wind speed of the air flowing through the wind speed sensor 1 is therefore reduced.
Since the detected value of 3 decreases, the controller 16 increases the opening degree of the motor damper 8 to increase the amount of air supply, and when the detected value of the wind speed sensor +H3 is restored to a predetermined level, the motor damper 8 increases the opening degree at that point. is set to Also, for example, if the exhaust member 4 is clogged with foreign matter and the exhaust volume decreases,
As the pressure inside the clean room 1 increases, the speed of the air flowing through the ventilation pipe 10 increases, and therefore the detection value of the wind speed sensor 13 increases, so the controller 1 and others reduce the opening degree of the motor damper 8 to open the air supply chamber. When the detected value of the wind speed sensor 13 is restored to a predetermined level, the motor damper 8
is set to the R degree at that time.
その結果、清浄室１内の圧力はつねに一定に保たれるこ
ととなる。As a result, the pressure within the clean room 1 is always kept constant.
すなわち、通風管１０を流れる空気の風速が一定であれ
ば、通風管１０の断面積は不変であるから通風管１０を
流れる空気の風量は一定であり、この旭川が一定であれ
ば、清浄室１の容積は不変であるから給気ｍまたは排気
量を変動さ往ない限り清浄室１内の１」］力は一定に保
たれる。したがって、風速レンサ１３の検出値が所定レ
ベルから変動した場合は、その検出値が所定レベルに復
元するように給気徂または排気量を調節すればよく、コ
ントローラ１６およびモータダンパ８によってこのｆｆ
１ｌｄ調節が実現されることとなる。そして、通風管１
０の前後の差圧をＰとし、通風管１０内を流れる空気の
風速をＶとすると、ベルヌーイの定理から式％式％）
が成立つこととなり、しかもこの式から明らかなように
０．１ｍｍＡｑの差Ｉｆは１．３１１１／Ｓｅｃの風速
の空気流を生じ、一方熱線式風速計は０．１ｍ／ｓａｃ
程度の分解能を有しているから、風速センサ１３によっ
て検出した風速に基づいて清浄室１内の圧力を制御すれ
ば、従来のように差圧に基づいて清浄室１内のＦｔ力を
制御する場合に比べて、高精度でしかも安定した制御が
行えることとなる。That is, if the speed of the air flowing through the ventilation pipe 10 is constant, the cross-sectional area of the ventilation pipe 10 remains unchanged, so the volume of air flowing through the ventilation pipe 10 is constant.If this Asahikawa is constant, the clean room Since the volume of air 1 does not change, the force inside the clean room 1 remains constant unless the supply air m or the exhaust volume is changed. Therefore, when the detected value of the wind speed sensor 13 fluctuates from a predetermined level, it is only necessary to adjust the air intake or exhaust amount so that the detected value is restored to the predetermined level.
1ld adjustment will be realized. And ventilation pipe 1
If the differential pressure before and after 0 is P, and the wind speed of the air flowing inside the ventilation pipe 10 is V, then from Bernoulli's theorem, the formula % formula %) holds true, and as is clear from this formula, 0.1 mmAq The difference If produces an air flow with a wind speed of 1.3111/sec, while the hot wire anemometer produces an air flow with a wind speed of 0.1 m/sac.
If the pressure in the clean room 1 is controlled based on the wind speed detected by the wind speed sensor 13, the Ft force in the clean room 1 can be controlled based on the differential pressure as in the conventional method This allows for more accurate and stable control than would otherwise be possible.
さらに、熱線式風速計は技術的に確立した測定手段であ
って、価格もたとえば測定レンジが○〜５ ｍｍＡｑ程
度の高精度の微差圧センサに比べてはるかに安価である
うえ、熱線式風速計の検出部を構成する風速センサ１３
はきわめて小型にすることができるため、通風管１０の
断面積は小口径のもので充分であり、そのため通風管１
０を通して漏れる空気量は排気量や定常状態においてリ
ークする空気量に比べて無視できるほどわずかな量とな
る。Furthermore, hot-wire anemometers are a technically established measurement method, and are much cheaper than, for example, high-precision micro-differential pressure sensors with a measurement range of ○ to 5 mmAq. Wind speed sensor 13 that constitutes the detection part of the meter
Since the ventilation pipe 10 can be made extremely compact, a small-diameter cross-sectional area is sufficient for the ventilation pipe 10.
The amount of air leaking through 0 is so small that it can be ignored compared to the amount of air leaking in the exhaust or steady state.
なお、上記実施例ではクリーンルームに適用したがこれ
に限定するものでなく、また上記実施例では風ω調節手
段として給気管６に設けたモータダンパ８を使用したが
、モータダンパ８を排気管７に設けてもよいし、モータ
ダンパ８以外のものを使用してもよく、また上記実施例
では風速センリ１３を熱線式風速計の検出部によって構
成したがこれに限定するものでなく、その他この発明は
上記実施例の種々の変更、修正が可能であることはいう
までもない。In the above embodiment, the application was applied to a clean room, but the application is not limited thereto.Also, in the above embodiment, the motor damper 8 provided in the air supply pipe 6 was used as the wind ω adjustment means, but the motor damper 8 may be provided in the exhaust pipe 7. Alternatively, something other than the motor damper 8 may be used.Also, in the above embodiment, the wind speed sensor 13 was configured by a detection section of a hot wire anemometer, but the present invention is not limited to this. It goes without saying that various changes and modifications to the embodiments are possible.
［発明の効果］
この発明は上記のように構成したので、圧力変動に対し
高い分解能をもつこととなって鋭敏な制御が可能となり
、かつ安価でしかも高い信頼性をもって制御することが
でき、そのうえ微小な圧力変動から大ぎな圧力変動まで
広い範囲にわたって安定した室内圧力制御を行うことが
できる等のずぐれた効果を有するものである。[Effects of the Invention] Since the present invention is configured as described above, it has a high resolution for pressure fluctuations, enables sensitive control, is inexpensive, and can be controlled with high reliability. It has outstanding effects such as being able to perform stable indoor pressure control over a wide range from minute pressure fluctuations to large pressure fluctuations.
第１図はこの発明による室内圧力制御方法を実施するた
めの装置の一例を示す概略図、第２図は第１図のものの
要部の拡大断面図である。
１・・・清浄室、２・・・前室、３・・・給気部材、４
・・・排気部材、５・・・空調器、６・・・給気管、７
・・・排気管、８・・・モータダンパ、９・・・隔壁、
１０・・・通風管、１１・・・入口コーン、１２・・・
出口コーン、１３・・・風速センサ、１４・・・本体、
１５・・・表示部、１６・・・コントローラ。FIG. 1 is a schematic view showing an example of a device for carrying out the indoor pressure control method according to the present invention, and FIG. 2 is an enlarged sectional view of a main part of the device shown in FIG. 1...Clean room, 2...Ante chamber, 3...Air supply member, 4
...Exhaust member, 5...Air conditioner, 6...Air supply pipe, 7
...exhaust pipe, 8...motor damper, 9...bulkhead,
10... Ventilation pipe, 11... Inlet cone, 12...
Exit cone, 13... Wind speed sensor, 14... Main body,
15...Display unit, 16...Controller.
Claims (1)
サを配置し、前記風速センサによって前記通風管を流れ
る空気の風速を検出し、得られた風速に基づいて前記室
に及ぼす風量を調節し、この風量調節によつて前記室内
の圧力を制御することを特徴とする室内圧力制御方法。 ２ 前記隔壁は室内圧力を制御すべきクリーンルームの
清浄室等の前記室とその前室とを仕切る壁からなる特許
請求の範囲第１項記載の室内圧力制御方法。 ３ 前記風速センサは風速計の検出部からなる特許請求
の範囲第１項記載の室内圧力制御方法。 ４ 前記風量は前記室への給気量からなる特許請求の範
囲第１項記載の室内圧力制御方法。[Scope of Claims] 1. A ventilation pipe is provided in the partition wall of the room, a wind speed sensor is disposed inside the ventilation pipe, the wind speed of the air flowing through the ventilation pipe is detected by the wind speed sensor, and the A method for controlling indoor pressure, comprising adjusting the amount of air applied to the room, and controlling the pressure inside the room by adjusting the amount of air. 2. The indoor pressure control method according to claim 1, wherein the partition wall is a wall that partitions the chamber such as a clean room of a clean room whose indoor pressure is to be controlled and its front chamber. 3. The indoor pressure control method according to claim 1, wherein the wind speed sensor comprises a detection section of an anemometer. 4. The indoor pressure control method according to claim 1, wherein the air volume is the amount of air supplied to the room.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60211080A JPS6273025A (en) | 1985-09-26 | 1985-09-26 | Method for controlling indoor pressure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60211080A JPS6273025A (en) | 1985-09-26 | 1985-09-26 | Method for controlling indoor pressure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6273025A true JPS6273025A (en) | 1987-04-03 |
| JPH0213215B2 JPH0213215B2 (en) | 1990-04-03 |
Family
ID=16600075
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60211080A Granted JPS6273025A (en) | 1985-09-26 | 1985-09-26 | Method for controlling indoor pressure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6273025A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6441743A (en) * | 1987-07-20 | 1989-02-14 | Boeing Co | Ventilation controller and method of pressed closed space |
| JPH03531U (en) * | 1989-05-24 | 1991-01-07 | ||
| JP2002039580A (en) * | 2000-07-27 | 2002-02-06 | Okumura Corp | Method of controlling indoor pressure in high-purity clean facility |
| JP2002061943A (en) * | 2000-08-11 | 2002-02-28 | Sanken Setsubi Kogyo Co Ltd | Room pressure control system and differential pressure retention damper |
| JP2008224178A (en) * | 2007-03-15 | 2008-09-25 | Daikin Ind Ltd | Air supply-exhaust system |
| JP2016020771A (en) * | 2014-07-15 | 2016-02-04 | アズビル株式会社 | Air volume control system and air volume control method |
| CN111703273A (en) * | 2020-07-02 | 2020-09-25 | 西安电子科技大学芜湖研究院 | Air inlet box of automobile air conditioner |
| CN113757833A (en) * | 2021-09-14 | 2021-12-07 | 北京联合大学 | Production mode and duty mode switching method and system based on data driving |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03261927A (en) * | 1990-03-13 | 1991-11-21 | Matsushita Electric Ind Co Ltd | Lens barrel turning device |
| JPH0533005U (en) * | 1991-10-09 | 1993-04-30 | 忠男 戸塚 | Dimension measuring device |
-
1985
- 1985-09-26 JP JP60211080A patent/JPS6273025A/en active Granted
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6441743A (en) * | 1987-07-20 | 1989-02-14 | Boeing Co | Ventilation controller and method of pressed closed space |
| JPH03531U (en) * | 1989-05-24 | 1991-01-07 | ||
| JP2002039580A (en) * | 2000-07-27 | 2002-02-06 | Okumura Corp | Method of controlling indoor pressure in high-purity clean facility |
| JP4558152B2 (en) * | 2000-07-27 | 2010-10-06 | 株式会社奥村組 | Room pressure control method in advanced clean facility |
| JP2002061943A (en) * | 2000-08-11 | 2002-02-28 | Sanken Setsubi Kogyo Co Ltd | Room pressure control system and differential pressure retention damper |
| JP4627846B2 (en) * | 2000-08-11 | 2011-02-09 | 三建設備工業株式会社 | Room pressure control system |
| JP2008224178A (en) * | 2007-03-15 | 2008-09-25 | Daikin Ind Ltd | Air supply-exhaust system |
| JP2016020771A (en) * | 2014-07-15 | 2016-02-04 | アズビル株式会社 | Air volume control system and air volume control method |
| CN111703273A (en) * | 2020-07-02 | 2020-09-25 | 西安电子科技大学芜湖研究院 | Air inlet box of automobile air conditioner |
| CN113757833A (en) * | 2021-09-14 | 2021-12-07 | 北京联合大学 | Production mode and duty mode switching method and system based on data driving |
| CN113757833B (en) * | 2021-09-14 | 2022-04-08 | 北京联合大学 | Production mode and duty mode switching method and system based on data driving |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0213215B2 (en) | 1990-04-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |