JPS6271633U - - Google Patents

Info

Publication number

JPS6271633U

JPS6271633U JP1985163395U JP16339585U JPS6271633U JP S6271633 U JPS6271633 U JP S6271633U JP 1985163395 U JP1985163395 U JP 1985163395U JP 16339585 U JP16339585 U JP 16339585U JP S6271633 U JPS6271633 U JP S6271633U

Authority

JP

Japan

Prior art keywords

pattern

photomask

metal

thin film

semiconductor element

Prior art date

1985-10-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000004065 semiconductor Substances 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 2
• CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 claims 1
• 230000000903 blocking effect Effects 0.000 claims 1
• 239000011521 glass Substances 0.000 claims 1
• 238000004519 manufacturing process Methods 0.000 claims 1
• 239000002184 metal Substances 0.000 claims 1
• 229910044991 metal oxide Inorganic materials 0.000 claims 1
• 150000004706 metal oxides Chemical class 0.000 claims 1
• 239000010453 quartz Substances 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
• 239000010409 thin film Substances 0.000 claims 1
• 239000012780 transparent material Substances 0.000 claims 1