JPS627045U - - Google Patents
Info
- Publication number
- JPS627045U JPS627045U JP9858085U JP9858085U JPS627045U JP S627045 U JPS627045 U JP S627045U JP 9858085 U JP9858085 U JP 9858085U JP 9858085 U JP9858085 U JP 9858085U JP S627045 U JPS627045 U JP S627045U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- semiconductor
- conducting
- semiconductor substrate
- sensor chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
- 238000010276 construction Methods 0.000 description 2
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9858085U JPS627045U (me) | 1985-06-28 | 1985-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9858085U JPS627045U (me) | 1985-06-28 | 1985-06-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS627045U true JPS627045U (me) | 1987-01-16 |
Family
ID=30966646
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9858085U Pending JPS627045U (me) | 1985-06-28 | 1985-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS627045U (me) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012002810A (ja) * | 2010-06-18 | 2012-01-05 | General Electric Co <Ge> | センサ、及びセンサを製造する方法 |
-
1985
- 1985-06-28 JP JP9858085U patent/JPS627045U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012002810A (ja) * | 2010-06-18 | 2012-01-05 | General Electric Co <Ge> | センサ、及びセンサを製造する方法 |