JPS6270438U - - Google Patents

Info

Publication number

JPS6270438U

JPS6270438U JP16159085U JP16159085U JPS6270438U JP S6270438 U JPS6270438 U JP S6270438U JP 16159085 U JP16159085 U JP 16159085U JP 16159085 U JP16159085 U JP 16159085U JP S6270438 U JPS6270438 U JP S6270438U

Authority

JP

Japan

Prior art keywords

aluminum

comb

blade row

wafer

wafer receiving

Prior art date

1985-10-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000463 material Substances 0.000 claims description 9
• 239000004809 Teflon Substances 0.000 claims description 2
• 229920006362 Teflon® Polymers 0.000 claims description 2
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
• 229910052782 aluminium Inorganic materials 0.000 claims 2
• 238000005452 bending Methods 0.000 claims 1
• -1 polytetrafluoroethylene Polymers 0.000 claims 1
• 229920001343 polytetrafluoroethylene Polymers 0.000 claims 1
• 239000004810 polytetrafluoroethylene Substances 0.000 claims 1
• 235000012431 wafers Nutrition 0.000 description 5
• 238000007796 conventional method Methods 0.000 description 1
• 230000008878 coupling Effects 0.000 description 1
• 238000010168 coupling process Methods 0.000 description 1
• 238000005859 coupling reaction Methods 0.000 description 1
• 238000007493 shaping process Methods 0.000 description 1