JPS6270240A - Method of welding quartz ampul - Google Patents

Abstract

PURPOSE:To seal up a quartz ampul without oxidizing a test specimen, by joining a main body of a quartz ampul containing a test specimen and an upper part having a shoulder part and welding them while introducing an inert gas into the interior. CONSTITUTION:The main body 4A of quartz ampul having a compound semiconductor of as a test specimen and the quartz small-sized device 5 supporting the specimen is combined with an upper part having the connecting part 2, the sealing and cutting part 3 and the shoulder part 6 in such a way that they are joined. Then, the inert gas 14 is introduced through the connecting part 2, the sealing and cutting part 3 into the main body 4A of quartz ampul, the inert gas is exhausted through a gas of the a welding part as a joining part and the main body 4A is welded to the upper part while sending the tip of the oxyhydrogen burner in the arrow direction 15. Consequently, oxidation and stain of the test specimen caused by steam generated from the oxyhydrogen burner are prevented and the ampul can be welded while keeping the test specimen in a clear state.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for welding quartz ampoules containing electronic materials such as semiconductors and metals and auxiliary small devices as samples.

[Conventional technology and its problems]

The method of enclosing a sample in a quartz ampoule for heat treatment in a vacuum has been used for a long time, and the typical method is 71
are shown in FIGS. 2(a) and (b).

The ampoule shown in FIG. 2(a) is used when the sample 1 is small in size, and the sample 1 is easily passed through the sealing part 3 from the connection part 2 of the vacuum device l\ to the ampoule body 4. can be accommodated. After connecting the connecting part 2 to a vacuum device and evacuating the inside of the ampoule, the sample is sealed in a vacuum by melting and sealing the quartz with an oxyhydrogen burner at the sealing part 3.

The ampoule shown in FIG. 2(b) is used when the sample 1 cannot be made small or is enclosed together with a small auxiliary device 5. It is made separately from the upper part, which consists of After storing the sample etc. in the ampoule body 4A, the upper parts are assembled, and the welding part 7, which is the fitting part, is welded with an oxyhydrogen burner as shown in the dotted line to integrate them. .

However, although the flame of the oxyhydrogen burner is applied from the lateral direction of this welded portion 7 as shown by the arrow 11, it is not necessarily applied directly from the side, but also from diagonally above and diagonally below. If the direction is from the side or diagonally downward as shown by arrows 12 and 13, the water vapor produced by the combustion of the oxyhydrogen flame will enter the ampoule body 4A through the gap as shown by the dotted line arrow, adhere to the sample, and oxidize it. There are drawbacks. Samples are always washed with acid or the like to remove surface dirt and oxides before being placed in an ampoule, but if the sample is oxidized by steam from the burner flame when it is sealed, there is no point in washing the sample before being placed in the ampoule.

[Purpose of the invention]

The object of the present invention is to weld a quartz ampoule, which eliminates the disadvantages of the above-mentioned conventional methods and allows the sample contained therein to be enclosed by the welding method using an ampoule of the same configuration and an oxyhydrogen burner without being oxidized by water vapor caused by the burner flame. The purpose is to provide a method.

[Structure of the invention]

The method for welding a quartz ampoule according to the present invention is such that when welding a quartz ampoule body in which a sample is housed and an upper part having a shoulder part to be fitted into the upper part of the ampoule body at the fitting part, the quartz ampoule body is Welding is performed while blowing inert gas inside.

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view for explaining the present invention in detail.

In FIG. 1, the ampoule main body 4A is made of quartz and has an outer diameter of 25 mm, a wall thickness of 2 mm, and a length of 100 mm.A compound semiconductor sample and a small device 5 made of quartz that supports it are shown in the diagonal line. It is housed in a portion. This ampoule body 4A
The ampoule body 4A was fixed on the workbench to prevent it from falling over, and the connection part 2 with an outer diameter of 15 m and the outer diameter of 8II1 were attached.
1 sealing part 3 and a shoulder part 6 with an inner diameter of 26 mm at the lower end
1, which is a combination of E part parts consisting of
Next, the center of the connecting part 2 was fixed using a fixture, and a pipe for introducing argon gas, which is an inert gas, was attached to the upper end of the connecting part 2, so that the entire upper part did not become unstable. .

After such preparations, introduction of argon gas was started as indicated by arrow 14. The argon gas passes through the sealing part 3 as shown by the arrow, and is discharged through the gap between the shoulder part 6 and the ampoule body 4A, that is, the gap between the welded part 7, which is the fitting part. The force of this discharged argon gas prevents water vapor generated from the oxyhydrogen burner flame from entering the ampoule. Therefore, the pressure of the argon gas introduced must be higher than the strength of the oxyhydrogen burner flame, and only after confirming that the tip of the burner flame is blown off by the discharged argon gas as shown by arrow 15, can welding begin in earnest. I need to get to work. As the welding process progresses, the gap between the welds gradually decreases, so it is necessary to gradually reduce the argon gas pressure accordingly. This is because if the argon pressure remains the same throughout, the discharge pressure will increase as the gap becomes smaller, and the resulting cooling effect will lower the temperature of the weld zone, making it impossible to maintain the temperature necessary for welding.

As a result of welding the ampoule body 4A and the upper part using the method described above, no water droplets due to the oxyhydrogen burner flame, which were previously clearly visible to the naked eye, were observed inside the ampoule, and the sample remained clean. I understand.

[Effects of the Invention] As explained in detail above, according to the present invention, oxidation and contamination of the sample due to water vapor generated from the oxyhydrogen burner flame during welding of quartz ampoules can be completely prevented.
The ampoule can be welded while keeping the sample clean.

[Brief explanation of drawings]

FIG. 1 is a sectional view for explaining one embodiment of the present invention, and FIGS. 2(a) and 2(b) are sectional views for explaining types of quartz ampoules and conventional welding methods. 1... Sample, 2... Connection part, 3... Sealing light part,
4, 4A... Ampoule body, 5... Small device for sample and support, 6... Shoulder. Agent Patent Attorney Uchihara To the Old Police Officer - 1 Destination II! ! r ((1)
(g) Bud 2 Father

Claims (1)

[Claims] When welding the quartz ampoule body containing the sample and the upper part having a shoulder part to be fitted to the upper part of the ampoule body at the fitting part, while blowing inert gas inside from the opening of the upper part. A method of welding a quartz ampoule, which is characterized by welding.