JPS6270182U - - Google Patents
Info
- Publication number
- JPS6270182U JPS6270182U JP15890185U JP15890185U JPS6270182U JP S6270182 U JPS6270182 U JP S6270182U JP 15890185 U JP15890185 U JP 15890185U JP 15890185 U JP15890185 U JP 15890185U JP S6270182 U JPS6270182 U JP S6270182U
- Authority
- JP
- Japan
- Prior art keywords
- group element
- vapor phase
- supplied
- reaction
- source boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000012010 growth Effects 0.000 claims description 4
- 238000001947 vapour-phase growth Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 3
- 150000001875 compounds Chemical class 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 2
- 229910000039 hydrogen halide Inorganic materials 0.000 claims 2
- 239000012433 hydrogen halide Substances 0.000 claims 2
- 238000005192 partition Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 230000007774 longterm Effects 0.000 description 2
- 150000004678 hydrides Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15890185U JPS6270182U (enExample) | 1985-10-16 | 1985-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15890185U JPS6270182U (enExample) | 1985-10-16 | 1985-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6270182U true JPS6270182U (enExample) | 1987-05-02 |
Family
ID=31082825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15890185U Pending JPS6270182U (enExample) | 1985-10-16 | 1985-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6270182U (enExample) |
-
1985
- 1985-10-16 JP JP15890185U patent/JPS6270182U/ja active Pending
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