JPS6268936U - - Google Patents

Info

Publication number
JPS6268936U
JPS6268936U JP16157085U JP16157085U JPS6268936U JP S6268936 U JPS6268936 U JP S6268936U JP 16157085 U JP16157085 U JP 16157085U JP 16157085 U JP16157085 U JP 16157085U JP S6268936 U JPS6268936 U JP S6268936U
Authority
JP
Japan
Prior art keywords
shutter
slit
carrier case
wafer
covers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16157085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16157085U priority Critical patent/JPS6268936U/ja
Publication of JPS6268936U publication Critical patent/JPS6268936U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
  • Warehouses Or Storage Devices (AREA)
JP16157085U 1985-10-21 1985-10-21 Pending JPS6268936U (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16157085U JPS6268936U (https=) 1985-10-21 1985-10-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16157085U JPS6268936U (https=) 1985-10-21 1985-10-21

Publications (1)

Publication Number Publication Date
JPS6268936U true JPS6268936U (https=) 1987-04-30

Family

ID=31088002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16157085U Pending JPS6268936U (https=) 1985-10-21 1985-10-21

Country Status (1)

Country Link
JP (1) JPS6268936U (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5444538U (https=) * 1970-06-01 1979-03-27
JPS60202027A (ja) * 1984-03-26 1985-10-12 Fujitsu Ltd 基板の抜取方法および装置
JPS61287636A (ja) * 1985-06-12 1986-12-18 Canon Inc ウエハ插入・取出装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5444538U (https=) * 1970-06-01 1979-03-27
JPS60202027A (ja) * 1984-03-26 1985-10-12 Fujitsu Ltd 基板の抜取方法および装置
JPS61287636A (ja) * 1985-06-12 1986-12-18 Canon Inc ウエハ插入・取出装置

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