JPS6268936U - - Google Patents
Info
- Publication number
- JPS6268936U JPS6268936U JP16157085U JP16157085U JPS6268936U JP S6268936 U JPS6268936 U JP S6268936U JP 16157085 U JP16157085 U JP 16157085U JP 16157085 U JP16157085 U JP 16157085U JP S6268936 U JPS6268936 U JP S6268936U
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- slit
- carrier case
- wafer
- covers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003028 elevating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16157085U JPS6268936U (enExample) | 1985-10-21 | 1985-10-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16157085U JPS6268936U (enExample) | 1985-10-21 | 1985-10-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6268936U true JPS6268936U (enExample) | 1987-04-30 |
Family
ID=31088002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16157085U Pending JPS6268936U (enExample) | 1985-10-21 | 1985-10-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6268936U (enExample) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5444538U (enExample) * | 1970-06-01 | 1979-03-27 | ||
| JPS60202027A (ja) * | 1984-03-26 | 1985-10-12 | Fujitsu Ltd | 基板の抜取方法および装置 |
| JPS61287636A (ja) * | 1985-06-12 | 1986-12-18 | Canon Inc | ウエハ插入・取出装置 |
-
1985
- 1985-10-21 JP JP16157085U patent/JPS6268936U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5444538U (enExample) * | 1970-06-01 | 1979-03-27 | ||
| JPS60202027A (ja) * | 1984-03-26 | 1985-10-12 | Fujitsu Ltd | 基板の抜取方法および装置 |
| JPS61287636A (ja) * | 1985-06-12 | 1986-12-18 | Canon Inc | ウエハ插入・取出装置 |