JPS6268235U - - Google Patents
Info
- Publication number
- JPS6268235U JPS6268235U JP15942085U JP15942085U JPS6268235U JP S6268235 U JPS6268235 U JP S6268235U JP 15942085 U JP15942085 U JP 15942085U JP 15942085 U JP15942085 U JP 15942085U JP S6268235 U JPS6268235 U JP S6268235U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support rod
- periphery
- boat
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985159420U JPH0648855Y2 (ja) | 1985-10-18 | 1985-10-18 | 半導体ウエ−ハ用ボ−ト |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985159420U JPH0648855Y2 (ja) | 1985-10-18 | 1985-10-18 | 半導体ウエ−ハ用ボ−ト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6268235U true JPS6268235U (enExample) | 1987-04-28 |
| JPH0648855Y2 JPH0648855Y2 (ja) | 1994-12-12 |
Family
ID=31083832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985159420U Expired - Lifetime JPH0648855Y2 (ja) | 1985-10-18 | 1985-10-18 | 半導体ウエ−ハ用ボ−ト |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648855Y2 (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59130419A (ja) * | 1983-01-17 | 1984-07-27 | Tekunisuko:Kk | 拡散治具等の製法 |
| JPS6022314A (ja) * | 1983-07-19 | 1985-02-04 | Toshiba Corp | 半導体基板用ボ−ト |
-
1985
- 1985-10-18 JP JP1985159420U patent/JPH0648855Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59130419A (ja) * | 1983-01-17 | 1984-07-27 | Tekunisuko:Kk | 拡散治具等の製法 |
| JPS6022314A (ja) * | 1983-07-19 | 1985-02-04 | Toshiba Corp | 半導体基板用ボ−ト |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648855Y2 (ja) | 1994-12-12 |