JPS6268235U - - Google Patents

Info

Publication number
JPS6268235U
JPS6268235U JP15942085U JP15942085U JPS6268235U JP S6268235 U JPS6268235 U JP S6268235U JP 15942085 U JP15942085 U JP 15942085U JP 15942085 U JP15942085 U JP 15942085U JP S6268235 U JPS6268235 U JP S6268235U
Authority
JP
Japan
Prior art keywords
wafer
support rod
periphery
boat
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15942085U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0648855Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985159420U priority Critical patent/JPH0648855Y2/ja
Publication of JPS6268235U publication Critical patent/JPS6268235U/ja
Application granted granted Critical
Publication of JPH0648855Y2 publication Critical patent/JPH0648855Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Packaging Frangible Articles (AREA)
JP1985159420U 1985-10-18 1985-10-18 半導体ウエ−ハ用ボ−ト Expired - Lifetime JPH0648855Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985159420U JPH0648855Y2 (ja) 1985-10-18 1985-10-18 半導体ウエ−ハ用ボ−ト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985159420U JPH0648855Y2 (ja) 1985-10-18 1985-10-18 半導体ウエ−ハ用ボ−ト

Publications (2)

Publication Number Publication Date
JPS6268235U true JPS6268235U (enrdf_load_stackoverflow) 1987-04-28
JPH0648855Y2 JPH0648855Y2 (ja) 1994-12-12

Family

ID=31083832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985159420U Expired - Lifetime JPH0648855Y2 (ja) 1985-10-18 1985-10-18 半導体ウエ−ハ用ボ−ト

Country Status (1)

Country Link
JP (1) JPH0648855Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59130419A (ja) * 1983-01-17 1984-07-27 Tekunisuko:Kk 拡散治具等の製法
JPS6022314A (ja) * 1983-07-19 1985-02-04 Toshiba Corp 半導体基板用ボ−ト

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59130419A (ja) * 1983-01-17 1984-07-27 Tekunisuko:Kk 拡散治具等の製法
JPS6022314A (ja) * 1983-07-19 1985-02-04 Toshiba Corp 半導体基板用ボ−ト

Also Published As

Publication number Publication date
JPH0648855Y2 (ja) 1994-12-12

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