JPS6267726A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPS6267726A JPS6267726A JP20921385A JP20921385A JPS6267726A JP S6267726 A JPS6267726 A JP S6267726A JP 20921385 A JP20921385 A JP 20921385A JP 20921385 A JP20921385 A JP 20921385A JP S6267726 A JPS6267726 A JP S6267726A
- Authority
- JP
- Japan
- Prior art keywords
- film
- recording medium
- heating
- electron beam
- induction heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、磁気記録媒体の製造方法に係り、特に垂直磁
化記録用に適する磁気記録媒体の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of manufacturing a magnetic recording medium, and particularly to a method of manufacturing a magnetic recording medium suitable for perpendicular magnetization recording.
従来の技術
磁気記録に関する方式としては、従来、記録媒体のほぼ
長手方向の磁化を用いる方式が専ら採用されている。BACKGROUND ART Conventionally, as a method for magnetic recording, a method using magnetization in a substantially longitudinal direction of a recording medium has been exclusively employed.
しかし、このように面内長手方向の磁化を用いる方式で
は、記録の高密度化を図ろうとすると、記録媒体内の減
磁界が増加するため、記録の高密度化にも自ずと限界が
ある。However, in such a system that uses magnetization in the in-plane longitudinal direction, if an attempt is made to increase the recording density, the demagnetizing field within the recording medium increases, so there is a limit to the increase in the recording density.
そこで、このような不具合を解消するために、記録媒体
の表面と直交する方向の磁化を利用する。Therefore, in order to eliminate such problems, magnetization in a direction perpendicular to the surface of the recording medium is used.
いわゆる垂直磁化記録方式が考えられている。この垂直
磁化記録方式を採用すると、記録密度の増加と共に、媒
体内域磁界が減少するため高密度記録化が可能となる。A so-called perpendicular magnetization recording method is being considered. If this perpendicular magnetization recording method is adopted, the magnetic field within the medium decreases as the recording density increases, making it possible to achieve high-density recording.
ところで、垂直磁化記録方式を採用するには、記録媒体
と直交する方向に磁化容易軸金有する記録媒体を必要と
する。By the way, in order to employ the perpendicular magnetization recording method, a recording medium having an axis of easy magnetization in a direction orthogonal to the recording medium is required.
このような記録媒体の代表的なものは、ポリイミド等の
高分子フィルム上にCr f 20 wt%前後含むC
O合金薄膜ヲ0.1μm〜0.3μm形成したものが知
られている。A typical example of such a recording medium is C containing about 20 wt% of Cr f on a polymer film such as polyimide.
It is known that an O alloy thin film is formed to a thickness of 0.1 μm to 0.3 μm.
Co−0r薄膜の形成は、スパッタリング法、電子ビー
ム蒸着法、イオンブレーティング法等が検討されている
。Sputtering method, electron beam evaporation method, ion blating method, etc. are being considered for forming the Co-0r thin film.
中でも電子ビーム蒸着法、イオンブレーティング法は薄
膜形成速度が大きいので、実用面から注目されている。Among them, the electron beam evaporation method and the ion blating method are attracting attention from a practical standpoint because they have a high thin film formation rate.
〔例えば、電子通信学会論文誌Volt、 I ee−
C、55〜61頁(1983)参照〕発明が解決しよう
とする問題点
しかし、電子ビーム蒸着法では、大きい抗磁力を得るに
は、高分子フィルムを高温にする必要が生じ、巻取り時
にシワが生じることが多く、これを避ける為に、ポリイ
ミド等の極めて高価なフィルムを用いるとすると、実用
性がなくなる難点があった。[For example, IEICE journal Volt, Iee-
C, pp. 55-61 (1983)] Problems to be Solved by the Invention However, in the electron beam evaporation method, in order to obtain a large coercive force, it is necessary to heat the polymer film to a high temperature, which causes wrinkles during winding. This often occurs, and if an extremely expensive film such as polyimide is used to avoid this, there is a problem in that it is not practical.
一方、イオンブレーティングは、高分子フィルムの温度
を電子ビーム蒸着法に比べて低くできるという期待があ
るが、装置上に難点がある。即ち、広幅の高分子フィル
ム上に均一な垂直磁化膜を得るには、グロー放電域を均
一に幅広く構成する必要があるが、安定に長時間、その
状態を保持するのは困難である。On the other hand, ion blating has the potential to lower the temperature of polymer films compared to electron beam evaporation, but it has some drawbacks in terms of equipment. That is, in order to obtain a uniform perpendicularly magnetized film on a wide polymer film, it is necessary to configure the glow discharge region uniformly and widely, but it is difficult to maintain this state stably for a long time.
それは、蒸発源を、例えば高周波コイルが見込むように
構成してしまうと、高周波コイルが蒸着され、条件の安
定化がはかれないことになるし、これを避けようとする
と、コイルを大きくする必要が生じ、磁界の影響が弱ま
ると、電子ビームが影響を受けて、蒸発源を安定に加熱
できないという問題があった。For example, if the evaporation source is configured so that a high-frequency coil is included, the high-frequency coil will be deposited and the conditions will not be stabilized.To avoid this, it is necessary to make the coil larger. When this occurs and the influence of the magnetic field weakens, the electron beam is affected and the evaporation source cannot be stably heated.
本発明は上記問題点に鑑みてなされたもので、高分子フ
ィルムを高温にしなくても、高速で広幅の均一な高い抗
磁力の垂直磁化膜形成を行うことの出来る製造方法を提
供するものである。The present invention has been made in view of the above-mentioned problems, and it is an object of the present invention to provide a manufacturing method that can form a wide, uniform, and perpendicularly magnetized film with high coercive force at high speed without raising the polymer film to high temperatures. be.
問題点を解決するための手段
上記問題点を解決するために本発明の磁気記録媒体の製
造方法は、Cr f誘導加熱、Cof電子ビーム加熱に
より蒸着せしめるようにしたものである。Means for Solving the Problems In order to solve the above-mentioned problems, the method for manufacturing a magnetic recording medium of the present invention involves vapor deposition using Crf induction heating and Cof electron beam heating.
作 用
本発明は上記し次構成により、COの加熱により大量に
発生する2次電子が、誘導加熱の磁界の作用で、Cr蒸
気と長時間作用するようになる為、Crがエネルギー的
に大きい状態になり、co−Cr膜の結晶配向性を改良
するため、高分子フィルムの温度が低くても大きい抗磁
力ヲ褥ることができ、広幅の蒸発源を用いるだけでグロ
ー放電を用いなくてもよいので、幅方向の均一性は安定
に確保でできることになる。Function The present invention has the following configuration as described above, so that secondary electrons generated in large quantities by heating CO interact with Cr vapor for a long time due to the effect of the magnetic field of induction heating, so Cr is high in energy. Since the crystal orientation of the co-Cr film is improved, a large coercive force can be obtained even at low temperatures of the polymer film, and a glow discharge can be avoided simply by using a wide evaporation source. Therefore, uniformity in the width direction can be stably ensured.
実施例
以下、図面を参照しながら本発明の実施例について説明
する。図は本発明の実施に用いた磁気記録媒体の製造装
置の一例である。図において、1は高分子フィルム、2
は送り出し軸、3は巻取り軸、4は円筒キャン、6は第
1の蒸発源容器、6熱コイル、11はCo、12はCr
、13はマスク、14はスリット、16は真空容器、1
6は真空ポンプである。Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings. The figure shows an example of a magnetic recording medium manufacturing apparatus used in carrying out the present invention. In the figure, 1 is a polymer film, 2
is a sending shaft, 3 is a winding shaft, 4 is a cylindrical can, 6 is a first evaporation source container, 6 is a heating coil, 11 is Co, 12 is Cr
, 13 is a mask, 14 is a slit, 16 is a vacuum container, 1
6 is a vacuum pump.
図に示した装置で円筒キャン4の直径はFzOcm+マ
スク13の位置はキャン中心より28傭、スリット幅は
フィルムの運転方向に6.2 cWt、蒸発源は蒸発面
がキャン中心より48cr:Lで、CO蒸発源中心とC
r蒸発源中心との距離は10cmである。誘導加熱コイ
ルは16ターンで、周波数可変電源で加熱し、電子ビー
ムは、270度偏向型と、直進銃(30KVx2A)の
2種類を用いた。In the apparatus shown in the figure, the diameter of the cylindrical can 4 is FzOcm + the position of the mask 13 is 28 cm from the center of the can, the slit width is 6.2 cWt in the film running direction, and the evaporation surface of the evaporation source is 48 cr:L from the center of the can. , CO evaporation source center and C
The distance from the center of the r evaporation source is 10 cm. The induction heating coil had 16 turns and was heated by a variable frequency power source, and two types of electron beams were used: a 270 degree deflection type and a straight gun (30KV x 2A).
比較のために、電子ビーム蒸発源からCo、Crの両元
素を同時に蒸発させることで磁気記録媒体を製造した。For comparison, a magnetic recording medium was manufactured by simultaneously evaporating both elements Co and Cr from an electron beam evaporation source.
用いた高分子フィルムはポリエチレンテレフタレートと
、ポリアミドフィルタで夫々厚みは15μm一定とした
。The polymer films used were polyethylene terephthalate and polyamide filters, each having a constant thickness of 15 μm.
なお、イオンブレーティングによる製造も試みたが、そ
の時、高周波コイルは3ターンで、キャン中心よりコイ
ルの上部までが29ctn、下部までが36c、とじた
コイルで、はぼ長方形のコイルでフィルムの移動方向に
11crn、それと直角方向に69備のものを用いた。We also tried manufacturing by ion blating, but at that time, the high frequency coil had 3 turns, 29ctn from the can center to the top of the coil, and 36ctn to the bottom, and the film was moved using a closed coil with a rectangular coil. One with 11 crns in the direction and 69 crns in the direction perpendicular to it was used.
先ず、本発明の磁気記録媒体Aの製造条件の主なものは
次の通りである。真空度:lX1O−6(Torr)
、誘導加熱:10)Ji 24KW、電子ビーム条件
: 5oKV 1.sA 、媒体Bの条件は、誘導加熱
:100k)h、26KW以外はAと同一、媒体C条件
は、電子ビーム条件が10KV1.6Aの270度偏向
型を4台幅方向に並べた以外はへ条件に合わせた。First, the main manufacturing conditions for the magnetic recording medium A of the present invention are as follows. Vacuum degree: 1X1O-6 (Torr)
, induction heating: 10) Ji 24KW, electron beam conditions: 5oKV 1. sA, the conditions of medium B are the same as A except for induction heating: 100 k) h, 26 KW, and the conditions of medium C are the same except that the electron beam condition is 4 270 degree deflection type with 10 KV 1.6 A arranged in the width direction. adapted to the conditions.
イオンブレーティング条件は、1001.[1,1KW
の高周波グロー放電を起こして、7.θx 10−”T
orrで蒸着した。The ion brating conditions were 1001. [1,1KW
7. causing a high frequency glow discharge; θx 10-”T
It was deposited at orr.
他の条件と得られた磁気特性の幅方向の均一性。Other conditions and the uniformity of the obtained magnetic properties in the width direction.
長手方向の均一性を調べた結果を次表に示した。The results of examining the uniformity in the longitudinal direction are shown in the table below.
上表より、本発明によれば、円筒キャンの温度を高くし
なくても、大きな保磁力が得られる。従ってポリエチレ
ンテレフタレートフィルムを用いることができる。From the table above, according to the present invention, a large coercive force can be obtained without increasing the temperature of the cylindrical can. Therefore, a polyethylene terephthalate film can be used.
又、磁気特性の均一性にも優れている。It also has excellent uniformity of magnetic properties.
これらは、誘導加熱方式と、電子ビーム蒸発源の恐らく
2次電子の多量発生に基づくものと思われる。 Crの
活性を著しく高める作用とが組み合わされてでてくる効
果と考えられるものであり、他の高分子フィルムでも全
く同様の効果が得られるものである。These are thought to be based on the induction heating method and probably the generation of a large amount of secondary electrons from the electron beam evaporation source. This effect is thought to be a combination of the effect of significantly increasing the activity of Cr, and the same effect can be obtained with other polymer films.
発明の効果 以上のように本発明によれば、高い抗磁力のC。Effect of the invention As described above, according to the present invention, C has a high coercive force.
−Or 垂直磁化膜を、高分子フィルムを加熱しなく
ても、高速で、均一に得ることができるといったすぐれ
た効果を有する。-Or It has an excellent effect of being able to uniformly obtain a perpendicularly magnetized film at high speed without heating the polymer film.
図は本発明を実施するのに用いた蒸着装置の一例の要部
構成図である。
1・・・・・・高分子フィルム、4・・・・・・円筒キ
ャン、8・・・・・・2次電子ビーム、10・・・・・
・誘導加熱コイル。The figure is a configuration diagram of essential parts of an example of a vapor deposition apparatus used to carry out the present invention. 1...Polymer film, 4...Cylindrical can, 8...Secondary electron beam, 10...
・Induction heating coil.
Claims (1)
誘導加熱、Coを電子ビーム加熱により、蒸着せしめる
ようにしたことを特徴とする磁気記録媒体の製造方法。1. A method of manufacturing a magnetic recording medium, characterized in that when forming a perpendicularly magnetized film made of Co--Cr, Cr is evaporated by induction heating and Co is evaporated by electron beam heating.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20921385A JPS6267726A (en) | 1985-09-20 | 1985-09-20 | Production of magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20921385A JPS6267726A (en) | 1985-09-20 | 1985-09-20 | Production of magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6267726A true JPS6267726A (en) | 1987-03-27 |
Family
ID=16569221
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20921385A Pending JPS6267726A (en) | 1985-09-20 | 1985-09-20 | Production of magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6267726A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003089867A (en) * | 2001-09-18 | 2003-03-28 | Toppan Printing Co Ltd | Method for producing vapor-deposited thin film |
-
1985
- 1985-09-20 JP JP20921385A patent/JPS6267726A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003089867A (en) * | 2001-09-18 | 2003-03-28 | Toppan Printing Co Ltd | Method for producing vapor-deposited thin film |
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