JPS626630U - - Google Patents

Info

Publication number
JPS626630U
JPS626630U JP9512585U JP9512585U JPS626630U JP S626630 U JPS626630 U JP S626630U JP 9512585 U JP9512585 U JP 9512585U JP 9512585 U JP9512585 U JP 9512585U JP S626630 U JPS626630 U JP S626630U
Authority
JP
Japan
Prior art keywords
tunnel
clean
clean room
section
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9512585U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9512585U priority Critical patent/JPS626630U/ja
Publication of JPS626630U publication Critical patent/JPS626630U/ja
Pending legal-status Critical Current

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  • Ventilation (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係るクリーンルームにおける
空気清浄装置の一実施例を示す縦断面図、第２図
は従来のクリーンルームにおける空気清浄装置の
縦断面図である。 Ａ……クリーンルーム、Ｂ……トンネル部、Ｃ
……通路部、１……清浄空気吹出空間部、２……
清浄空気吹出口。

Claims (1)

    【実用新案登録請求の範囲】
  1. 相対する両側トンネル部間に通路部が配設され
    たクリーンルームにおいて、前記各トンネル部の
    頂部に清浄空気吹出空間部を配設するとともに、
    同各空間部の前記通路部及びトンネル部に対向す
    る側面並に下面に亘つて連続的に清浄空気吹出口
    を設けてなることを特徴とするクリーンルームに
    おける空気清浄装置。
JP9512585U 1985-06-25 1985-06-25 Pending JPS626630U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9512585U JPS626630U (ja) 1985-06-25 1985-06-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9512585U JPS626630U (ja) 1985-06-25 1985-06-25

Publications (1)

Publication Number Publication Date
JPS626630U true JPS626630U (ja) 1987-01-16

Family

ID=30959308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9512585U Pending JPS626630U (ja) 1985-06-25 1985-06-25

Country Status (1)

Country Link
JP (1) JPS626630U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58127033A (ja) * 1982-01-25 1983-07-28 Hitachi Ltd 清浄室装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58127033A (ja) * 1982-01-25 1983-07-28 Hitachi Ltd 清浄室装置

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